Abstract
A study was made of the dynamic response of a circular clamped micro-plate actuated by a DC/AC voltage. The analysis considers not only the non-linear electrostatic coupling force, residual stress effect, and hydrostatic pressure acting on the upper surface, but also the squeeze-film damping effect generated by the air gap between the vibrating micro-plate and the fixed substrate. The nonlinear governing equation of motion of the circular micro-plate was solved using a hybrid numerical method comprising the differential transformation and the finite difference. It was shown that the numerical results obtained for the pure DC pull-in voltage deviate by no more than 1.6% from the results presented in the literature. The effects of the actuating voltage, hydrostatic pressure, squeezefilm damping, and residual stress on the dynamic response of the clamped circular micro-plate were systematically examined. In addition, the stability of the vibrating micro-plate was investigated examined by reference to phase portraits. (Figure presented.).
| Original language | English |
|---|---|
| Pages (from-to) | 132-139 |
| Number of pages | 8 |
| Journal | Smart Science |
| Volume | 5 |
| Issue number | 3 |
| DOIs | |
| Publication status | Published - 2017 Jan 1 |
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All Science Journal Classification (ASJC) codes
- Fluid Flow and Transfer Processes
- Computer Networks and Communications
- Chemistry (miscellaneous)
- Energy (miscellaneous)
- Engineering(all)
- Computational Mathematics
- Modelling and Simulation
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The stability and non-linear vibration analysis of a circular clamped microplate under electrostatic actuation. / Liu, Chin-Chia.
In: Smart Science, Vol. 5, No. 3, 01.01.2017, p. 132-139.Research output: Contribution to journal › Article
TY - JOUR
T1 - The stability and non-linear vibration analysis of a circular clamped microplate under electrostatic actuation
AU - Liu, Chin-Chia
PY - 2017/1/1
Y1 - 2017/1/1
N2 - A study was made of the dynamic response of a circular clamped micro-plate actuated by a DC/AC voltage. The analysis considers not only the non-linear electrostatic coupling force, residual stress effect, and hydrostatic pressure acting on the upper surface, but also the squeeze-film damping effect generated by the air gap between the vibrating micro-plate and the fixed substrate. The nonlinear governing equation of motion of the circular micro-plate was solved using a hybrid numerical method comprising the differential transformation and the finite difference. It was shown that the numerical results obtained for the pure DC pull-in voltage deviate by no more than 1.6% from the results presented in the literature. The effects of the actuating voltage, hydrostatic pressure, squeezefilm damping, and residual stress on the dynamic response of the clamped circular micro-plate were systematically examined. In addition, the stability of the vibrating micro-plate was investigated examined by reference to phase portraits. (Figure presented.).
AB - A study was made of the dynamic response of a circular clamped micro-plate actuated by a DC/AC voltage. The analysis considers not only the non-linear electrostatic coupling force, residual stress effect, and hydrostatic pressure acting on the upper surface, but also the squeeze-film damping effect generated by the air gap between the vibrating micro-plate and the fixed substrate. The nonlinear governing equation of motion of the circular micro-plate was solved using a hybrid numerical method comprising the differential transformation and the finite difference. It was shown that the numerical results obtained for the pure DC pull-in voltage deviate by no more than 1.6% from the results presented in the literature. The effects of the actuating voltage, hydrostatic pressure, squeezefilm damping, and residual stress on the dynamic response of the clamped circular micro-plate were systematically examined. In addition, the stability of the vibrating micro-plate was investigated examined by reference to phase portraits. (Figure presented.).
UR - http://www.scopus.com/inward/record.url?scp=85028685463&partnerID=8YFLogxK
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U2 - 10.1080/23080477.2017.1339251
DO - 10.1080/23080477.2017.1339251
M3 - Article
AN - SCOPUS:85028685463
VL - 5
SP - 132
EP - 139
JO - Smart Science
JF - Smart Science
SN - 2308-0477
IS - 3
ER -