The stability and non-linear vibration analysis of a circular clamped microplate under electrostatic actuation

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

A study was made of the dynamic response of a circular clamped micro-plate actuated by a DC/AC voltage. The analysis considers not only the non-linear electrostatic coupling force, residual stress effect, and hydrostatic pressure acting on the upper surface, but also the squeeze-film damping effect generated by the air gap between the vibrating micro-plate and the fixed substrate. The nonlinear governing equation of motion of the circular micro-plate was solved using a hybrid numerical method comprising the differential transformation and the finite difference. It was shown that the numerical results obtained for the pure DC pull-in voltage deviate by no more than 1.6% from the results presented in the literature. The effects of the actuating voltage, hydrostatic pressure, squeezefilm damping, and residual stress on the dynamic response of the clamped circular micro-plate were systematically examined. In addition, the stability of the vibrating micro-plate was investigated examined by reference to phase portraits. (Figure presented.).

Original languageEnglish
Pages (from-to)132-139
Number of pages8
JournalSmart Science
Volume5
Issue number3
DOIs
Publication statusPublished - 2017 Jan 1

Fingerprint

Nonlinear Vibration
Vibration Analysis
Vibration analysis
Nonlinear Analysis
Electrostatics
Hydrostatic pressure
Dynamic response
Residual stresses
Electric potential
Damping
Hydrostatic Pressure
Voltage
Residual Stress
Dynamic Response
Nonlinear equations
Equations of motion
Numerical methods
Phase Portrait
Hybrid Method
Substrates

All Science Journal Classification (ASJC) codes

  • Fluid Flow and Transfer Processes
  • Computer Networks and Communications
  • Chemistry (miscellaneous)
  • Energy (miscellaneous)
  • Engineering(all)
  • Computational Mathematics
  • Modelling and Simulation

Cite this

@article{313ece9c45854a919702668094abc65f,
title = "The stability and non-linear vibration analysis of a circular clamped microplate under electrostatic actuation",
abstract = "A study was made of the dynamic response of a circular clamped micro-plate actuated by a DC/AC voltage. The analysis considers not only the non-linear electrostatic coupling force, residual stress effect, and hydrostatic pressure acting on the upper surface, but also the squeeze-film damping effect generated by the air gap between the vibrating micro-plate and the fixed substrate. The nonlinear governing equation of motion of the circular micro-plate was solved using a hybrid numerical method comprising the differential transformation and the finite difference. It was shown that the numerical results obtained for the pure DC pull-in voltage deviate by no more than 1.6{\%} from the results presented in the literature. The effects of the actuating voltage, hydrostatic pressure, squeezefilm damping, and residual stress on the dynamic response of the clamped circular micro-plate were systematically examined. In addition, the stability of the vibrating micro-plate was investigated examined by reference to phase portraits. (Figure presented.).",
author = "Chin-Chia Liu",
year = "2017",
month = "1",
day = "1",
doi = "10.1080/23080477.2017.1339251",
language = "English",
volume = "5",
pages = "132--139",
journal = "Smart Science",
issn = "2308-0477",
publisher = "Taylor and Francis Ltd.",
number = "3",

}

The stability and non-linear vibration analysis of a circular clamped microplate under electrostatic actuation. / Liu, Chin-Chia.

In: Smart Science, Vol. 5, No. 3, 01.01.2017, p. 132-139.

Research output: Contribution to journalArticle

TY - JOUR

T1 - The stability and non-linear vibration analysis of a circular clamped microplate under electrostatic actuation

AU - Liu, Chin-Chia

PY - 2017/1/1

Y1 - 2017/1/1

N2 - A study was made of the dynamic response of a circular clamped micro-plate actuated by a DC/AC voltage. The analysis considers not only the non-linear electrostatic coupling force, residual stress effect, and hydrostatic pressure acting on the upper surface, but also the squeeze-film damping effect generated by the air gap between the vibrating micro-plate and the fixed substrate. The nonlinear governing equation of motion of the circular micro-plate was solved using a hybrid numerical method comprising the differential transformation and the finite difference. It was shown that the numerical results obtained for the pure DC pull-in voltage deviate by no more than 1.6% from the results presented in the literature. The effects of the actuating voltage, hydrostatic pressure, squeezefilm damping, and residual stress on the dynamic response of the clamped circular micro-plate were systematically examined. In addition, the stability of the vibrating micro-plate was investigated examined by reference to phase portraits. (Figure presented.).

AB - A study was made of the dynamic response of a circular clamped micro-plate actuated by a DC/AC voltage. The analysis considers not only the non-linear electrostatic coupling force, residual stress effect, and hydrostatic pressure acting on the upper surface, but also the squeeze-film damping effect generated by the air gap between the vibrating micro-plate and the fixed substrate. The nonlinear governing equation of motion of the circular micro-plate was solved using a hybrid numerical method comprising the differential transformation and the finite difference. It was shown that the numerical results obtained for the pure DC pull-in voltage deviate by no more than 1.6% from the results presented in the literature. The effects of the actuating voltage, hydrostatic pressure, squeezefilm damping, and residual stress on the dynamic response of the clamped circular micro-plate were systematically examined. In addition, the stability of the vibrating micro-plate was investigated examined by reference to phase portraits. (Figure presented.).

UR - http://www.scopus.com/inward/record.url?scp=85028685463&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85028685463&partnerID=8YFLogxK

U2 - 10.1080/23080477.2017.1339251

DO - 10.1080/23080477.2017.1339251

M3 - Article

VL - 5

SP - 132

EP - 139

JO - Smart Science

JF - Smart Science

SN - 2308-0477

IS - 3

ER -