The Simulation and Fabrication of Ag/SiO2/Ag Thin Films Color Filter

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

This research is based on concepts of the Fabry-Perot principle to design a non-absorption inorganic thin film color filter to increase the saturation of color filters. To make red (R), green (G), and blue (B) color filters, the SiO2 should possess three different thicknesses sandwiched by the silver (Ag) reflective layer. Through thin film optical software simulation, the transmittance and color saturation of R, G, and B color filters were analyzed by changing different thin film materials and thickness thereof. In addition, the actual R, G, and B color filter samples were made by pulse direct current magnetron sputtering and radio frequency magnetron sputtering, respectively. The simulated results show that Ag film has a better transmittance and color saturation than aluminum film. The effect of the magnitude of refractive index, n of SiO2 on the transmittance of R, G, and B color filters is not significant, but, it will result in the red color filter sample center peak wavelength shifts at about 20 nm. The better thicknesses of Ag/SiO2/Ag for the color saturation as well as transmittance in R, G, and B color filters are 30 nm/170 nm/30 nm, 30 nm/131 nm/30 nm, 30 nm/100 nm/30 nm, respectively. Compared with the organic photo resistance coating color filter, this inorganic thin film color filter has better color saturation and optical transmittance than the organic photo resistance coating color filter. When the color filter deviates 15 degrees from the straight angle, the center peak wavelength of R, G, and B will shift left 15∼30 nm, and its transmittance will also decrease 1∼5%. This is because that with a larger viewing angle, the longer the path for the light has to traverse through the color filter, which would result with the change in the color wavelength as well as effect to transmittance.

Original languageEnglish
Title of host publication18th International Vacuum Congress, IVC 2010
EditorsFeng Pan, Xu Chen
PublisherElsevier B.V.
Pages19-30
Number of pages12
ISBN (Electronic)9781627487481
DOIs
Publication statusPublished - 2012 Jan 1
Event18th International Vacuum Congress, IVC 2010 - Beijing, China
Duration: 2010 Aug 232010 Aug 27

Publication series

NamePhysics Procedia
Volume32
ISSN (Print)1875-3884
ISSN (Electronic)1875-3892

Other

Other18th International Vacuum Congress, IVC 2010
CountryChina
CityBeijing
Period10-08-2310-08-27

Fingerprint

color
filters
fabrication
thin films
simulation
transmittance
saturation
magnetron sputtering
wavelengths
coatings
shift
radio frequencies
direct current
silver
refractivity
computer programs
aluminum

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

Cite this

Lin, Y-C. O. Y. C., Chen, Z. A., & Shen, C-H. (2012). The Simulation and Fabrication of Ag/SiO2/Ag Thin Films Color Filter. In F. Pan, & X. Chen (Eds.), 18th International Vacuum Congress, IVC 2010 (pp. 19-30). (Physics Procedia; Vol. 32). Elsevier B.V.. https://doi.org/10.1016/j.phpro.2012.03.513
Lin, Yi-Cheng or Y. C. ; Chen, Z. A. ; Shen, Chih-Hsiung. / The Simulation and Fabrication of Ag/SiO2/Ag Thin Films Color Filter. 18th International Vacuum Congress, IVC 2010. editor / Feng Pan ; Xu Chen. Elsevier B.V., 2012. pp. 19-30 (Physics Procedia).
@inproceedings{d1b74fed3e144d3586300d2dbbbad05e,
title = "The Simulation and Fabrication of Ag/SiO2/Ag Thin Films Color Filter",
abstract = "This research is based on concepts of the Fabry-Perot principle to design a non-absorption inorganic thin film color filter to increase the saturation of color filters. To make red (R), green (G), and blue (B) color filters, the SiO2 should possess three different thicknesses sandwiched by the silver (Ag) reflective layer. Through thin film optical software simulation, the transmittance and color saturation of R, G, and B color filters were analyzed by changing different thin film materials and thickness thereof. In addition, the actual R, G, and B color filter samples were made by pulse direct current magnetron sputtering and radio frequency magnetron sputtering, respectively. The simulated results show that Ag film has a better transmittance and color saturation than aluminum film. The effect of the magnitude of refractive index, n of SiO2 on the transmittance of R, G, and B color filters is not significant, but, it will result in the red color filter sample center peak wavelength shifts at about 20 nm. The better thicknesses of Ag/SiO2/Ag for the color saturation as well as transmittance in R, G, and B color filters are 30 nm/170 nm/30 nm, 30 nm/131 nm/30 nm, 30 nm/100 nm/30 nm, respectively. Compared with the organic photo resistance coating color filter, this inorganic thin film color filter has better color saturation and optical transmittance than the organic photo resistance coating color filter. When the color filter deviates 15 degrees from the straight angle, the center peak wavelength of R, G, and B will shift left 15∼30 nm, and its transmittance will also decrease 1∼5{\%}. This is because that with a larger viewing angle, the longer the path for the light has to traverse through the color filter, which would result with the change in the color wavelength as well as effect to transmittance.",
author = "Lin, {Yi-Cheng or Y. C.} and Chen, {Z. A.} and Chih-Hsiung Shen",
year = "2012",
month = "1",
day = "1",
doi = "10.1016/j.phpro.2012.03.513",
language = "English",
series = "Physics Procedia",
publisher = "Elsevier B.V.",
pages = "19--30",
editor = "Feng Pan and Xu Chen",
booktitle = "18th International Vacuum Congress, IVC 2010",

}

Lin, Y-COYC, Chen, ZA & Shen, C-H 2012, The Simulation and Fabrication of Ag/SiO2/Ag Thin Films Color Filter. in F Pan & X Chen (eds), 18th International Vacuum Congress, IVC 2010. Physics Procedia, vol. 32, Elsevier B.V., pp. 19-30, 18th International Vacuum Congress, IVC 2010, Beijing, China, 10-08-23. https://doi.org/10.1016/j.phpro.2012.03.513

The Simulation and Fabrication of Ag/SiO2/Ag Thin Films Color Filter. / Lin, Yi-Cheng or Y. C.; Chen, Z. A.; Shen, Chih-Hsiung.

18th International Vacuum Congress, IVC 2010. ed. / Feng Pan; Xu Chen. Elsevier B.V., 2012. p. 19-30 (Physics Procedia; Vol. 32).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

TY - GEN

T1 - The Simulation and Fabrication of Ag/SiO2/Ag Thin Films Color Filter

AU - Lin, Yi-Cheng or Y. C.

AU - Chen, Z. A.

AU - Shen, Chih-Hsiung

PY - 2012/1/1

Y1 - 2012/1/1

N2 - This research is based on concepts of the Fabry-Perot principle to design a non-absorption inorganic thin film color filter to increase the saturation of color filters. To make red (R), green (G), and blue (B) color filters, the SiO2 should possess three different thicknesses sandwiched by the silver (Ag) reflective layer. Through thin film optical software simulation, the transmittance and color saturation of R, G, and B color filters were analyzed by changing different thin film materials and thickness thereof. In addition, the actual R, G, and B color filter samples were made by pulse direct current magnetron sputtering and radio frequency magnetron sputtering, respectively. The simulated results show that Ag film has a better transmittance and color saturation than aluminum film. The effect of the magnitude of refractive index, n of SiO2 on the transmittance of R, G, and B color filters is not significant, but, it will result in the red color filter sample center peak wavelength shifts at about 20 nm. The better thicknesses of Ag/SiO2/Ag for the color saturation as well as transmittance in R, G, and B color filters are 30 nm/170 nm/30 nm, 30 nm/131 nm/30 nm, 30 nm/100 nm/30 nm, respectively. Compared with the organic photo resistance coating color filter, this inorganic thin film color filter has better color saturation and optical transmittance than the organic photo resistance coating color filter. When the color filter deviates 15 degrees from the straight angle, the center peak wavelength of R, G, and B will shift left 15∼30 nm, and its transmittance will also decrease 1∼5%. This is because that with a larger viewing angle, the longer the path for the light has to traverse through the color filter, which would result with the change in the color wavelength as well as effect to transmittance.

AB - This research is based on concepts of the Fabry-Perot principle to design a non-absorption inorganic thin film color filter to increase the saturation of color filters. To make red (R), green (G), and blue (B) color filters, the SiO2 should possess three different thicknesses sandwiched by the silver (Ag) reflective layer. Through thin film optical software simulation, the transmittance and color saturation of R, G, and B color filters were analyzed by changing different thin film materials and thickness thereof. In addition, the actual R, G, and B color filter samples were made by pulse direct current magnetron sputtering and radio frequency magnetron sputtering, respectively. The simulated results show that Ag film has a better transmittance and color saturation than aluminum film. The effect of the magnitude of refractive index, n of SiO2 on the transmittance of R, G, and B color filters is not significant, but, it will result in the red color filter sample center peak wavelength shifts at about 20 nm. The better thicknesses of Ag/SiO2/Ag for the color saturation as well as transmittance in R, G, and B color filters are 30 nm/170 nm/30 nm, 30 nm/131 nm/30 nm, 30 nm/100 nm/30 nm, respectively. Compared with the organic photo resistance coating color filter, this inorganic thin film color filter has better color saturation and optical transmittance than the organic photo resistance coating color filter. When the color filter deviates 15 degrees from the straight angle, the center peak wavelength of R, G, and B will shift left 15∼30 nm, and its transmittance will also decrease 1∼5%. This is because that with a larger viewing angle, the longer the path for the light has to traverse through the color filter, which would result with the change in the color wavelength as well as effect to transmittance.

UR - http://www.scopus.com/inward/record.url?scp=84905963026&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84905963026&partnerID=8YFLogxK

U2 - 10.1016/j.phpro.2012.03.513

DO - 10.1016/j.phpro.2012.03.513

M3 - Conference contribution

AN - SCOPUS:84905963026

T3 - Physics Procedia

SP - 19

EP - 30

BT - 18th International Vacuum Congress, IVC 2010

A2 - Pan, Feng

A2 - Chen, Xu

PB - Elsevier B.V.

ER -

Lin Y-COYC, Chen ZA, Shen C-H. The Simulation and Fabrication of Ag/SiO2/Ag Thin Films Color Filter. In Pan F, Chen X, editors, 18th International Vacuum Congress, IVC 2010. Elsevier B.V. 2012. p. 19-30. (Physics Procedia). https://doi.org/10.1016/j.phpro.2012.03.513