The development of a portable line-shaping optical system for silicon surface treatment

Shih Feng Tseng; Wen Tse Hsiao; Han Chao Chang; Ming-Fei Chen

doi:10.1007/s10043-013-0026-1

The development of a portable line-shaping optical system for silicon surface treatment

Shih Feng Tseng, Wen Tse Hsiao, Han Chao Chang, Ming-Fei Chen

Department of Mechatronic Engineering

Research output: Contribution to journal › Article

Abstract

This study proposes a beam shaper for converting a circle beam profile generated with a Gaussian intensity distribution by an 808 nm diode laser into a line beam profile for silicon surface treatment applications. To produce a hand-held and low-cost device with a large spot-size laser, this study uses a portable optical system consisting of a diode laser source, a collimator, a cylindrical lens, and a plano-convex lens to generate an approximately 40 × 3:5mm² line beam profile at a working distance of 200 mm. The silicon surface treated by the line-shaped laser beam has significantly reduced reflectance spectra. The proposed system is also suitable for the surface cleaning of materials.

Original language	English
Pages (from-to)	163-166
Number of pages	4
Journal	Optical Review
Volume	20
Issue number	2
DOIs	https://doi.org/10.1007/s10043-013-0026-1
Publication status	Published - 2013 Apr 3

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All Science Journal Classification (ASJC) codes

Atomic and Molecular Physics, and Optics

Cite this

Tseng, S. F., Hsiao, W. T., Chang, H. C., & Chen, M-F. (2013). The development of a portable line-shaping optical system for silicon surface treatment. Optical Review, 20(2), 163-166. https://doi.org/10.1007/s10043-013-0026-1

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10.1007/s10043-013-0026-1