Abstract
This study proposes a beam shaper for converting a circle beam profile generated with a Gaussian intensity distribution by an 808 nm diode laser into a line beam profile for silicon surface treatment applications. To produce a hand-held and low-cost device with a large spot-size laser, this study uses a portable optical system consisting of a diode laser source, a collimator, a cylindrical lens, and a plano-convex lens to generate an approximately 40 × 3:5mm2 line beam profile at a working distance of 200 mm. The silicon surface treated by the line-shaped laser beam has significantly reduced reflectance spectra. The proposed system is also suitable for the surface cleaning of materials.
| Original language | English |
|---|---|
| Pages (from-to) | 163-166 |
| Number of pages | 4 |
| Journal | Optical Review |
| Volume | 20 |
| Issue number | 2 |
| DOIs | |
| Publication status | Published - 2013 Apr 3 |
All Science Journal Classification (ASJC) codes
- Atomic and Molecular Physics, and Optics
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Cite this
Tseng, S. F., Hsiao, W. T., Chang, H. C., & Chen, M-F. (2013). The development of a portable line-shaping optical system for silicon surface treatment. Optical Review, 20(2), 163-166. https://doi.org/10.1007/s10043-013-0026-1