Abstract
This study proposes a beam shaper for converting a circle beam profile generated with a Gaussian intensity distribution by an 808 nm diode laser into a line beam profile for silicon surface treatment applications. To produce a hand-held and low-cost device with a large spot-size laser, this study uses a portable optical system consisting of a diode laser source, a collimator, a cylindrical lens, and a plano-convex lens to generate an approximately 40 × 3:5mm2 line beam profile at a working distance of 200 mm. The silicon surface treated by the line-shaped laser beam has significantly reduced reflectance spectra. The proposed system is also suitable for the surface cleaning of materials.
| Original language | English |
|---|---|
| Pages (from-to) | 163-166 |
| Number of pages | 4 |
| Journal | Optical Review |
| Volume | 20 |
| Issue number | 2 |
| DOIs | |
| Publication status | Published - 2013 Apr 3 |
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All Science Journal Classification (ASJC) codes
- Atomic and Molecular Physics, and Optics
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The development of a portable line-shaping optical system for silicon surface treatment. / Tseng, Shih Feng; Hsiao, Wen Tse; Chang, Han Chao; Chen, Ming-Fei.
In: Optical Review, Vol. 20, No. 2, 03.04.2013, p. 163-166.Research output: Contribution to journal › Article
TY - JOUR
T1 - The development of a portable line-shaping optical system for silicon surface treatment
AU - Tseng, Shih Feng
AU - Hsiao, Wen Tse
AU - Chang, Han Chao
AU - Chen, Ming-Fei
PY - 2013/4/3
Y1 - 2013/4/3
N2 - This study proposes a beam shaper for converting a circle beam profile generated with a Gaussian intensity distribution by an 808 nm diode laser into a line beam profile for silicon surface treatment applications. To produce a hand-held and low-cost device with a large spot-size laser, this study uses a portable optical system consisting of a diode laser source, a collimator, a cylindrical lens, and a plano-convex lens to generate an approximately 40 × 3:5mm2 line beam profile at a working distance of 200 mm. The silicon surface treated by the line-shaped laser beam has significantly reduced reflectance spectra. The proposed system is also suitable for the surface cleaning of materials.
AB - This study proposes a beam shaper for converting a circle beam profile generated with a Gaussian intensity distribution by an 808 nm diode laser into a line beam profile for silicon surface treatment applications. To produce a hand-held and low-cost device with a large spot-size laser, this study uses a portable optical system consisting of a diode laser source, a collimator, a cylindrical lens, and a plano-convex lens to generate an approximately 40 × 3:5mm2 line beam profile at a working distance of 200 mm. The silicon surface treated by the line-shaped laser beam has significantly reduced reflectance spectra. The proposed system is also suitable for the surface cleaning of materials.
UR - http://www.scopus.com/inward/record.url?scp=84875501329&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84875501329&partnerID=8YFLogxK
U2 - 10.1007/s10043-013-0026-1
DO - 10.1007/s10043-013-0026-1
M3 - Article
AN - SCOPUS:84875501329
VL - 20
SP - 163
EP - 166
JO - Optical Review
JF - Optical Review
SN - 1340-6000
IS - 2
ER -