The development of a portable line-shaping optical system for silicon surface treatment

Shih Feng Tseng, Wen Tse Hsiao, Han Chao Chang, Ming-Fei Chen

Research output: Contribution to journalArticle

Abstract

This study proposes a beam shaper for converting a circle beam profile generated with a Gaussian intensity distribution by an 808 nm diode laser into a line beam profile for silicon surface treatment applications. To produce a hand-held and low-cost device with a large spot-size laser, this study uses a portable optical system consisting of a diode laser source, a collimator, a cylindrical lens, and a plano-convex lens to generate an approximately 40 × 3:5mm2 line beam profile at a working distance of 200 mm. The silicon surface treated by the line-shaped laser beam has significantly reduced reflectance spectra. The proposed system is also suitable for the surface cleaning of materials.

Original languageEnglish
Pages (from-to)163-166
Number of pages4
JournalOptical Review
Volume20
Issue number2
DOIs
Publication statusPublished - 2013 Apr 3

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All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics

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