Surface plasmon resonance heterodyne interferometry for measuring physical parameters

Der Chin Su, Jing Heng Chen, Kun Huang Chen, Jiun-You Lin

Research output: Contribution to journalConference article

Abstract

A light beam is incident on the boundary surface between the thin metal film of a surface-plasmon-resonance (SPR) apparatus and the test medium. If the incident angle is equal or very near to the resonant angle, then the phase difference between p- and s- polarizations of the reflected light is related to the associated physical parameter. The phase difference can be measured accurately by the heterodyne interferometry. If the relation between the phase difference and the associated physical parameter is specified, the associated physical parameter can be estimated with the data of the phase difference. This method has the advantages of both common-path interferometry and heterodyne interferometry.

Original languageEnglish
Pages (from-to)566-573
Number of pages8
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume5457
DOIs
Publication statusPublished - 2004 Dec 20
EventOptical Metrology in Production Engineering - Strasbourg, France
Duration: 2004 Apr 272004 Apr 30

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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