Surface modification nanoporous titanium oxide films using continuous wave CO2 laser

Wen Tse Hsiao, Chih Chung Yang, Shih Feng Tseng, Donyau Chiang, Kuo Cheng Huang, Keh Moh Lin, Ming-Fei Chen

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

This study investigated the characteristics of titanium dioxide (TiO2) films modified through laser annealing by using a CO2 laser source (CSS 500 AIR, Spectral Inc., Italy) with a wavelength of 10,600 nm and a continuous wave mode. Commercial TiO2 thin films with a thickness of 100 nm were prepared through radio-frequency magnetron sputtering on soda-lime glass substrates. The optical properties (optical absorption and transmittance spectra), surface morphology, and surface chemical composition characteristics of the TiO2 films depended on the laser irradiation conditions. The characteristics of the films were systematically analyzed using a ultraviolet–visible near-infrared spectrophotometer, an X-ray photoelectron spectroscope, and a field emission scanning electron microscope. The experimental results demonstrated that the experimental transmittance spectra exhibited slight changes caused by laser annealing and a maximum transmittance in the visible region of approximately 91.4 %. The absorbance of all annealed TiO2 films exceeded that of as-deposited films. Moreover, the absorption band edge moved toward the long-wavelength side (red shift) as the annealing speed decreased because the heat applied during annealing caused the TiO2 film grains to grow. Diffusion and mobility between the films and glass substrates during laser annealing segregated elemental Ag.

Original languageEnglish
Article number381
JournalApplied Physics A: Materials Science and Processing
Volume122
Issue number4
DOIs
Publication statusPublished - 2016 Apr 1

Fingerprint

Continuous wave lasers
Titanium oxides
Oxide films
Surface treatment
Annealing
Lasers
Infrared spectrophotometers
Glass
Wavelength
Opacity
Substrates
Laser beam effects
Photoelectrons
titanium dioxide
Lime
Field emission
Magnetron sputtering
Titanium dioxide
Light absorption
Surface morphology

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Materials Science(all)

Cite this

Hsiao, Wen Tse ; Yang, Chih Chung ; Tseng, Shih Feng ; Chiang, Donyau ; Huang, Kuo Cheng ; Lin, Keh Moh ; Chen, Ming-Fei. / Surface modification nanoporous titanium oxide films using continuous wave CO2 laser. In: Applied Physics A: Materials Science and Processing. 2016 ; Vol. 122, No. 4.
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abstract = "This study investigated the characteristics of titanium dioxide (TiO2) films modified through laser annealing by using a CO2 laser source (CSS 500 AIR, Spectral Inc., Italy) with a wavelength of 10,600 nm and a continuous wave mode. Commercial TiO2 thin films with a thickness of 100 nm were prepared through radio-frequency magnetron sputtering on soda-lime glass substrates. The optical properties (optical absorption and transmittance spectra), surface morphology, and surface chemical composition characteristics of the TiO2 films depended on the laser irradiation conditions. The characteristics of the films were systematically analyzed using a ultraviolet–visible near-infrared spectrophotometer, an X-ray photoelectron spectroscope, and a field emission scanning electron microscope. The experimental results demonstrated that the experimental transmittance spectra exhibited slight changes caused by laser annealing and a maximum transmittance in the visible region of approximately 91.4 {\%}. The absorbance of all annealed TiO2 films exceeded that of as-deposited films. Moreover, the absorption band edge moved toward the long-wavelength side (red shift) as the annealing speed decreased because the heat applied during annealing caused the TiO2 film grains to grow. Diffusion and mobility between the films and glass substrates during laser annealing segregated elemental Ag.",
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Surface modification nanoporous titanium oxide films using continuous wave CO2 laser. / Hsiao, Wen Tse; Yang, Chih Chung; Tseng, Shih Feng; Chiang, Donyau; Huang, Kuo Cheng; Lin, Keh Moh; Chen, Ming-Fei.

In: Applied Physics A: Materials Science and Processing, Vol. 122, No. 4, 381, 01.04.2016.

Research output: Contribution to journalArticle

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