Stress sensing based on one dimensional photonic crystal nano beam

Fu-Li Hsiao, Zhen Hong Yang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We demonstrate a one-dimensional photonic crystal nano beam. The structure is formed by silicon waveguide. A Si3N4 layer is deposited above the waveguide. The thermal stress between Si/ Si3N4 induces the deformation of beam and affects the transmission peak of slow light mode. The thermal stress can be detected by measuring the shift of peaks in transmission spectrum.

Original languageEnglish
Title of host publicationIEEE ISSNIP 2014 - 2014 IEEE 9th International Conference on Intelligent Sensors, Sensor Networks and Information Processing, Conference Proceedings
PublisherIEEE Computer Society
ISBN (Print)9781479928439
DOIs
Publication statusPublished - 2014 Jan 1
Event9th IEEE International Conference on Intelligent Sensors, Sensor Networks and Information Processing, IEEE ISSNIP 2014 - Singapore, Singapore
Duration: 2014 Apr 212014 Apr 24

Publication series

NameIEEE ISSNIP 2014 - 2014 IEEE 9th International Conference on Intelligent Sensors, Sensor Networks and Information Processing, Conference Proceedings

Other

Other9th IEEE International Conference on Intelligent Sensors, Sensor Networks and Information Processing, IEEE ISSNIP 2014
CountrySingapore
CitySingapore
Period14-04-2114-04-24

Fingerprint

Photonic crystals
Thermal stress
Waveguides
Slow light
Silicon

All Science Journal Classification (ASJC) codes

  • Artificial Intelligence
  • Computer Networks and Communications
  • Information Systems

Cite this

Hsiao, F-L., & Yang, Z. H. (2014). Stress sensing based on one dimensional photonic crystal nano beam. In IEEE ISSNIP 2014 - 2014 IEEE 9th International Conference on Intelligent Sensors, Sensor Networks and Information Processing, Conference Proceedings [6827615] (IEEE ISSNIP 2014 - 2014 IEEE 9th International Conference on Intelligent Sensors, Sensor Networks and Information Processing, Conference Proceedings). IEEE Computer Society. https://doi.org/10.1109/ISSNIP.2014.6827615
Hsiao, Fu-Li ; Yang, Zhen Hong. / Stress sensing based on one dimensional photonic crystal nano beam. IEEE ISSNIP 2014 - 2014 IEEE 9th International Conference on Intelligent Sensors, Sensor Networks and Information Processing, Conference Proceedings. IEEE Computer Society, 2014. (IEEE ISSNIP 2014 - 2014 IEEE 9th International Conference on Intelligent Sensors, Sensor Networks and Information Processing, Conference Proceedings).
@inproceedings{e10132a9ff674d3aab622355eb73fc10,
title = "Stress sensing based on one dimensional photonic crystal nano beam",
abstract = "We demonstrate a one-dimensional photonic crystal nano beam. The structure is formed by silicon waveguide. A Si3N4 layer is deposited above the waveguide. The thermal stress between Si/ Si3N4 induces the deformation of beam and affects the transmission peak of slow light mode. The thermal stress can be detected by measuring the shift of peaks in transmission spectrum.",
author = "Fu-Li Hsiao and Yang, {Zhen Hong}",
year = "2014",
month = "1",
day = "1",
doi = "10.1109/ISSNIP.2014.6827615",
language = "English",
isbn = "9781479928439",
series = "IEEE ISSNIP 2014 - 2014 IEEE 9th International Conference on Intelligent Sensors, Sensor Networks and Information Processing, Conference Proceedings",
publisher = "IEEE Computer Society",
booktitle = "IEEE ISSNIP 2014 - 2014 IEEE 9th International Conference on Intelligent Sensors, Sensor Networks and Information Processing, Conference Proceedings",
address = "United States",

}

Hsiao, F-L & Yang, ZH 2014, Stress sensing based on one dimensional photonic crystal nano beam. in IEEE ISSNIP 2014 - 2014 IEEE 9th International Conference on Intelligent Sensors, Sensor Networks and Information Processing, Conference Proceedings., 6827615, IEEE ISSNIP 2014 - 2014 IEEE 9th International Conference on Intelligent Sensors, Sensor Networks and Information Processing, Conference Proceedings, IEEE Computer Society, 9th IEEE International Conference on Intelligent Sensors, Sensor Networks and Information Processing, IEEE ISSNIP 2014, Singapore, Singapore, 14-04-21. https://doi.org/10.1109/ISSNIP.2014.6827615

Stress sensing based on one dimensional photonic crystal nano beam. / Hsiao, Fu-Li; Yang, Zhen Hong.

IEEE ISSNIP 2014 - 2014 IEEE 9th International Conference on Intelligent Sensors, Sensor Networks and Information Processing, Conference Proceedings. IEEE Computer Society, 2014. 6827615 (IEEE ISSNIP 2014 - 2014 IEEE 9th International Conference on Intelligent Sensors, Sensor Networks and Information Processing, Conference Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

TY - GEN

T1 - Stress sensing based on one dimensional photonic crystal nano beam

AU - Hsiao, Fu-Li

AU - Yang, Zhen Hong

PY - 2014/1/1

Y1 - 2014/1/1

N2 - We demonstrate a one-dimensional photonic crystal nano beam. The structure is formed by silicon waveguide. A Si3N4 layer is deposited above the waveguide. The thermal stress between Si/ Si3N4 induces the deformation of beam and affects the transmission peak of slow light mode. The thermal stress can be detected by measuring the shift of peaks in transmission spectrum.

AB - We demonstrate a one-dimensional photonic crystal nano beam. The structure is formed by silicon waveguide. A Si3N4 layer is deposited above the waveguide. The thermal stress between Si/ Si3N4 induces the deformation of beam and affects the transmission peak of slow light mode. The thermal stress can be detected by measuring the shift of peaks in transmission spectrum.

UR - http://www.scopus.com/inward/record.url?scp=84903701098&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84903701098&partnerID=8YFLogxK

U2 - 10.1109/ISSNIP.2014.6827615

DO - 10.1109/ISSNIP.2014.6827615

M3 - Conference contribution

AN - SCOPUS:84903701098

SN - 9781479928439

T3 - IEEE ISSNIP 2014 - 2014 IEEE 9th International Conference on Intelligent Sensors, Sensor Networks and Information Processing, Conference Proceedings

BT - IEEE ISSNIP 2014 - 2014 IEEE 9th International Conference on Intelligent Sensors, Sensor Networks and Information Processing, Conference Proceedings

PB - IEEE Computer Society

ER -

Hsiao F-L, Yang ZH. Stress sensing based on one dimensional photonic crystal nano beam. In IEEE ISSNIP 2014 - 2014 IEEE 9th International Conference on Intelligent Sensors, Sensor Networks and Information Processing, Conference Proceedings. IEEE Computer Society. 2014. 6827615. (IEEE ISSNIP 2014 - 2014 IEEE 9th International Conference on Intelligent Sensors, Sensor Networks and Information Processing, Conference Proceedings). https://doi.org/10.1109/ISSNIP.2014.6827615