Stress sensing based on one dimensional photonic crystal nano beam

Fu-Li Hsiao, Zhen Hong Yang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We demonstrate a one-dimensional photonic crystal nano beam. The structure is formed by silicon waveguide. A Si3N4 layer is deposited above the waveguide. The thermal stress between Si/ Si3N4 induces the deformation of beam and affects the transmission peak of slow light mode. The thermal stress can be detected by measuring the shift of peaks in transmission spectrum.

Original languageEnglish
Title of host publicationIEEE ISSNIP 2014 - 2014 IEEE 9th International Conference on Intelligent Sensors, Sensor Networks and Information Processing, Conference Proceedings
PublisherIEEE Computer Society
ISBN (Print)9781479928439
DOIs
Publication statusPublished - 2014 Jan 1
Event9th IEEE International Conference on Intelligent Sensors, Sensor Networks and Information Processing, IEEE ISSNIP 2014 - Singapore, Singapore
Duration: 2014 Apr 212014 Apr 24

Publication series

NameIEEE ISSNIP 2014 - 2014 IEEE 9th International Conference on Intelligent Sensors, Sensor Networks and Information Processing, Conference Proceedings

Other

Other9th IEEE International Conference on Intelligent Sensors, Sensor Networks and Information Processing, IEEE ISSNIP 2014
CountrySingapore
CitySingapore
Period14-04-2114-04-24

All Science Journal Classification (ASJC) codes

  • Artificial Intelligence
  • Computer Networks and Communications
  • Information Systems

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