Stability and dynamic analysis of the electrostatic MEMS actuators

Chin-Chia Liu

doi:10.4028/www.scientific.net/AMM.479-480.431

Stability and dynamic analysis of the electrostatic MEMS actuators

Chin-Chia Liu

Department of Industrial Education and Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

The nonlinear dynamic behavior of the micro actuators is analyzed in this paper. In general, analysis of the electrostatic device is quite difficult and complicated due to the electrostatic coupling effect and the nonlinear electrostatic force. In this study, a hybrid method for the micro-structure system, which combines the differential transformation and finite difference approximation techniques, is used to overcome the nonlinear electrostatic coupling phenomenon. The analysis takes account of the electrostatic coupling effect, the fringing field effect, the residual stress, the nonlinear electrostatic force and squeeze-film damping effect. Finally, the actuating conditions which ensure the stability of the micro actuators are identified by reference to phase portraits.

Original language	English
Title of host publication	Applied Science and Precision Engineering Innovation
Pages	431-435
Number of pages	5
DOIs	https://doi.org/10.4028/www.scientific.net/AMM.479-480.431
Publication status	Published - 2014 Jan 1
Event	International Applied Science and Precision Engineering Conference 2013, ASPEC 2013 - NanTou, Taiwan Duration: 2013 Oct 18 → 2013 Oct 22

Publication series

Name	Applied Mechanics and Materials
Volume	479-480
ISSN (Print)	1660-9336
ISSN (Electronic)	1662-7482

Other

Other	International Applied Science and Precision Engineering Conference 2013, ASPEC 2013
Country	Taiwan
City	NanTou
Period	13-10-18 → 13-10-22

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All Science Journal Classification (ASJC) codes

Engineering(all)

Cite this

Liu, C-C. (2014). Stability and dynamic analysis of the electrostatic MEMS actuators. In Applied Science and Precision Engineering Innovation (pp. 431-435). (Applied Mechanics and Materials; Vol. 479-480). https://doi.org/10.4028/www.scientific.net/AMM.479-480.431

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10.4028/www.scientific.net/AMM.479-480.431