Stability and dynamic analysis of the electrostatic MEMS actuators

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The nonlinear dynamic behavior of the micro actuators is analyzed in this paper. In general, analysis of the electrostatic device is quite difficult and complicated due to the electrostatic coupling effect and the nonlinear electrostatic force. In this study, a hybrid method for the micro-structure system, which combines the differential transformation and finite difference approximation techniques, is used to overcome the nonlinear electrostatic coupling phenomenon. The analysis takes account of the electrostatic coupling effect, the fringing field effect, the residual stress, the nonlinear electrostatic force and squeeze-film damping effect. Finally, the actuating conditions which ensure the stability of the micro actuators are identified by reference to phase portraits.

Original languageEnglish
Title of host publicationApplied Science and Precision Engineering Innovation
Pages431-435
Number of pages5
DOIs
Publication statusPublished - 2014 Jan 1
EventInternational Applied Science and Precision Engineering Conference 2013, ASPEC 2013 - NanTou, Taiwan
Duration: 2013 Oct 182013 Oct 22

Publication series

NameApplied Mechanics and Materials
Volume479-480
ISSN (Print)1660-9336
ISSN (Electronic)1662-7482

Other

OtherInternational Applied Science and Precision Engineering Conference 2013, ASPEC 2013
CountryTaiwan
CityNanTou
Period13-10-1813-10-22

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All Science Journal Classification (ASJC) codes

  • Engineering(all)

Cite this

Liu, C-C. (2014). Stability and dynamic analysis of the electrostatic MEMS actuators. In Applied Science and Precision Engineering Innovation (pp. 431-435). (Applied Mechanics and Materials; Vol. 479-480). https://doi.org/10.4028/www.scientific.net/AMM.479-480.431