TY - GEN
T1 - Stability and dynamic analysis of the electrostatic MEMS actuators
AU - Liu, Chin Chia
N1 - Copyright:
Copyright 2014 Elsevier B.V., All rights reserved.
PY - 2014
Y1 - 2014
N2 - The nonlinear dynamic behavior of the micro actuators is analyzed in this paper. In general, analysis of the electrostatic device is quite difficult and complicated due to the electrostatic coupling effect and the nonlinear electrostatic force. In this study, a hybrid method for the micro-structure system, which combines the differential transformation and finite difference approximation techniques, is used to overcome the nonlinear electrostatic coupling phenomenon. The analysis takes account of the electrostatic coupling effect, the fringing field effect, the residual stress, the nonlinear electrostatic force and squeeze-film damping effect. Finally, the actuating conditions which ensure the stability of the micro actuators are identified by reference to phase portraits.
AB - The nonlinear dynamic behavior of the micro actuators is analyzed in this paper. In general, analysis of the electrostatic device is quite difficult and complicated due to the electrostatic coupling effect and the nonlinear electrostatic force. In this study, a hybrid method for the micro-structure system, which combines the differential transformation and finite difference approximation techniques, is used to overcome the nonlinear electrostatic coupling phenomenon. The analysis takes account of the electrostatic coupling effect, the fringing field effect, the residual stress, the nonlinear electrostatic force and squeeze-film damping effect. Finally, the actuating conditions which ensure the stability of the micro actuators are identified by reference to phase portraits.
UR - http://www.scopus.com/inward/record.url?scp=84891106446&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84891106446&partnerID=8YFLogxK
U2 - 10.4028/www.scientific.net/AMM.479-480.431
DO - 10.4028/www.scientific.net/AMM.479-480.431
M3 - Conference contribution
AN - SCOPUS:84891106446
SN - 9783037859476
T3 - Applied Mechanics and Materials
SP - 431
EP - 435
BT - Applied Science and Precision Engineering Innovation
T2 - International Applied Science and Precision Engineering Conference 2013, ASPEC 2013
Y2 - 18 October 2013 through 22 October 2013
ER -