Stability and dynamic analysis of the electrostatic MEMS actuators

Chin-Chia Liu

doi:10.4028/www.scientific.net/AMM.479-480.431

Stability and dynamic analysis of the electrostatic MEMS actuators

Chin-Chia Liu

Department of Industrial Education and Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

The nonlinear dynamic behavior of the micro actuators is analyzed in this paper. In general, analysis of the electrostatic device is quite difficult and complicated due to the electrostatic coupling effect and the nonlinear electrostatic force. In this study, a hybrid method for the micro-structure system, which combines the differential transformation and finite difference approximation techniques, is used to overcome the nonlinear electrostatic coupling phenomenon. The analysis takes account of the electrostatic coupling effect, the fringing field effect, the residual stress, the nonlinear electrostatic force and squeeze-film damping effect. Finally, the actuating conditions which ensure the stability of the micro actuators are identified by reference to phase portraits.

Original language	English
Title of host publication	Applied Science and Precision Engineering Innovation
Pages	431-435
Number of pages	5
DOIs	https://doi.org/10.4028/www.scientific.net/AMM.479-480.431
Publication status	Published - 2014 Jan 1
Event	International Applied Science and Precision Engineering Conference 2013, ASPEC 2013 - NanTou, Taiwan Duration: 2013 Oct 18 → 2013 Oct 22

Publication series

Name	Applied Mechanics and Materials
Volume	479-480
ISSN (Print)	1660-9336
ISSN (Electronic)	1662-7482

Other

Other	International Applied Science and Precision Engineering Conference 2013, ASPEC 2013
Country	Taiwan
City	NanTou
Period	13-10-18 → 13-10-22

All Science Journal Classification (ASJC) codes

Engineering(all)

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Liu, C-C. (2014). Stability and dynamic analysis of the electrostatic MEMS actuators. In Applied Science and Precision Engineering Innovation (pp. 431-435). (Applied Mechanics and Materials; Vol. 479-480). https://doi.org/10.4028/www.scientific.net/AMM.479-480.431

@inproceedings{0c60526e25024769aa34fca3fb159765,

title = "Stability and dynamic analysis of the electrostatic MEMS actuators",

abstract = "The nonlinear dynamic behavior of the micro actuators is analyzed in this paper. In general, analysis of the electrostatic device is quite difficult and complicated due to the electrostatic coupling effect and the nonlinear electrostatic force. In this study, a hybrid method for the micro-structure system, which combines the differential transformation and finite difference approximation techniques, is used to overcome the nonlinear electrostatic coupling phenomenon. The analysis takes account of the electrostatic coupling effect, the fringing field effect, the residual stress, the nonlinear electrostatic force and squeeze-film damping effect. Finally, the actuating conditions which ensure the stability of the micro actuators are identified by reference to phase portraits.",

author = "Chin-Chia Liu",

year = "2014",

month = jan,

day = "1",

doi = "10.4028/www.scientific.net/AMM.479-480.431",

language = "English",

isbn = "9783037859476",

series = "Applied Mechanics and Materials",

pages = "431--435",

booktitle = "Applied Science and Precision Engineering Innovation",

note = "International Applied Science and Precision Engineering Conference 2013, ASPEC 2013 ; Conference date: 18-10-2013 Through 22-10-2013",

}

TY - GEN

T1 - Stability and dynamic analysis of the electrostatic MEMS actuators

AU - Liu, Chin-Chia

PY - 2014/1/1

Y1 - 2014/1/1

N2 - The nonlinear dynamic behavior of the micro actuators is analyzed in this paper. In general, analysis of the electrostatic device is quite difficult and complicated due to the electrostatic coupling effect and the nonlinear electrostatic force. In this study, a hybrid method for the micro-structure system, which combines the differential transformation and finite difference approximation techniques, is used to overcome the nonlinear electrostatic coupling phenomenon. The analysis takes account of the electrostatic coupling effect, the fringing field effect, the residual stress, the nonlinear electrostatic force and squeeze-film damping effect. Finally, the actuating conditions which ensure the stability of the micro actuators are identified by reference to phase portraits.

AB - The nonlinear dynamic behavior of the micro actuators is analyzed in this paper. In general, analysis of the electrostatic device is quite difficult and complicated due to the electrostatic coupling effect and the nonlinear electrostatic force. In this study, a hybrid method for the micro-structure system, which combines the differential transformation and finite difference approximation techniques, is used to overcome the nonlinear electrostatic coupling phenomenon. The analysis takes account of the electrostatic coupling effect, the fringing field effect, the residual stress, the nonlinear electrostatic force and squeeze-film damping effect. Finally, the actuating conditions which ensure the stability of the micro actuators are identified by reference to phase portraits.

UR - http://www.scopus.com/inward/record.url?scp=84891106446&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84891106446&partnerID=8YFLogxK

U2 - 10.4028/www.scientific.net/AMM.479-480.431

DO - 10.4028/www.scientific.net/AMM.479-480.431

M3 - Conference contribution

AN - SCOPUS:84891106446

SN - 9783037859476

T3 - Applied Mechanics and Materials

SP - 431

EP - 435

BT - Applied Science and Precision Engineering Innovation

T2 - International Applied Science and Precision Engineering Conference 2013, ASPEC 2013

Y2 - 18 October 2013 through 22 October 2013

ER -