Abstract
The nonlinear dynamic behavior of the micro actuators is analyzed in this paper. In general, analysis of the electrostatic device is quite difficult and complicated due to the electrostatic coupling effect and the nonlinear electrostatic force. In this study, a hybrid method for the micro-structure system, which combines the differential transformation and finite difference approximation techniques, is used to overcome the nonlinear electrostatic coupling phenomenon. The analysis takes account of the electrostatic coupling effect, the fringing field effect, the residual stress, the nonlinear electrostatic force and squeeze-film damping effect. Finally, the actuating conditions which ensure the stability of the micro actuators are identified by reference to phase portraits.
| Original language | English |
|---|---|
| Title of host publication | Applied Science and Precision Engineering Innovation |
| Pages | 431-435 |
| Number of pages | 5 |
| DOIs | |
| Publication status | Published - 2014 Jan 1 |
| Event | International Applied Science and Precision Engineering Conference 2013, ASPEC 2013 - NanTou, Taiwan Duration: 2013 Oct 18 → 2013 Oct 22 |
Publication series
| Name | Applied Mechanics and Materials |
|---|---|
| Volume | 479-480 |
| ISSN (Print) | 1660-9336 |
| ISSN (Electronic) | 1662-7482 |
Other
| Other | International Applied Science and Precision Engineering Conference 2013, ASPEC 2013 |
|---|---|
| Country | Taiwan |
| City | NanTou |
| Period | 13-10-18 → 13-10-22 |
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All Science Journal Classification (ASJC) codes
- Engineering(all)
Cite this
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Stability and dynamic analysis of the electrostatic MEMS actuators. / Liu, Chin-Chia.
Applied Science and Precision Engineering Innovation. 2014. p. 431-435 (Applied Mechanics and Materials; Vol. 479-480).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
TY - GEN
T1 - Stability and dynamic analysis of the electrostatic MEMS actuators
AU - Liu, Chin-Chia
PY - 2014/1/1
Y1 - 2014/1/1
N2 - The nonlinear dynamic behavior of the micro actuators is analyzed in this paper. In general, analysis of the electrostatic device is quite difficult and complicated due to the electrostatic coupling effect and the nonlinear electrostatic force. In this study, a hybrid method for the micro-structure system, which combines the differential transformation and finite difference approximation techniques, is used to overcome the nonlinear electrostatic coupling phenomenon. The analysis takes account of the electrostatic coupling effect, the fringing field effect, the residual stress, the nonlinear electrostatic force and squeeze-film damping effect. Finally, the actuating conditions which ensure the stability of the micro actuators are identified by reference to phase portraits.
AB - The nonlinear dynamic behavior of the micro actuators is analyzed in this paper. In general, analysis of the electrostatic device is quite difficult and complicated due to the electrostatic coupling effect and the nonlinear electrostatic force. In this study, a hybrid method for the micro-structure system, which combines the differential transformation and finite difference approximation techniques, is used to overcome the nonlinear electrostatic coupling phenomenon. The analysis takes account of the electrostatic coupling effect, the fringing field effect, the residual stress, the nonlinear electrostatic force and squeeze-film damping effect. Finally, the actuating conditions which ensure the stability of the micro actuators are identified by reference to phase portraits.
UR - http://www.scopus.com/inward/record.url?scp=84891106446&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84891106446&partnerID=8YFLogxK
U2 - 10.4028/www.scientific.net/AMM.479-480.431
DO - 10.4028/www.scientific.net/AMM.479-480.431
M3 - Conference contribution
AN - SCOPUS:84891106446
SN - 9783037859476
T3 - Applied Mechanics and Materials
SP - 431
EP - 435
BT - Applied Science and Precision Engineering Innovation
ER -