Small-angle measurement with highly sensitive total-internal-reflection heterodyne interferometer

Jiun You Lin, Yu Cheng Liao

Research output: Contribution to journalArticlepeer-review

30 Citations (Scopus)


In this paper, a high-sensitivity total-internal-reflection (TIR) heterodyne interferometer is proposed for measuring small angles. In the proposed interferometer, a half-wave plate and two quarter-wave plates that exhibit specific optic-axis azimuths are combined to form a phase shifter. When a rhomboid prism is placed between the phase shifter and an analyzer that exhibits suitable transmission-axis azimuth, it shifts and enhances the phase difference of the s- and p-polarization states at double TIR. The enhanced phase difference is dependent on the incident angle; thus small angles can be easily and accurately measured by estimating the phase difference. The experimental results demonstrate the feasibility of this method. Angular resolution and sensitivity levels superior to 1.2 × 10-4deg (2.1 × 10-6rad) and 100 (deg/deg), respectively, were attainable in a dynamic range of 0.5 deg.

Original languageEnglish
Pages (from-to)1903-1908
Number of pages6
JournalApplied Optics
Issue number9
Publication statusPublished - 2014 Mar 20

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics
  • Engineering (miscellaneous)
  • Electrical and Electronic Engineering

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