Small-angle measurement with highly sensitive total-internal-reflection heterodyne interferometer

Jiun You Lin; Yu Cheng Liao

doi:10.1364/AO.53.001903

Small-angle measurement with highly sensitive total-internal-reflection heterodyne interferometer

Jiun You Lin, Yu Cheng Liao

Department of Mechatronic Engineering

Research output: Contribution to journal › Article

24 Citations (Scopus)

Abstract

In this paper, a high-sensitivity total-internal-reflection (TIR) heterodyne interferometer is proposed for measuring small angles. In the proposed interferometer, a half-wave plate and two quarter-wave plates that exhibit specific optic-axis azimuths are combined to form a phase shifter. When a rhomboid prism is placed between the phase shifter and an analyzer that exhibits suitable transmission-axis azimuth, it shifts and enhances the phase difference of the s- and p-polarization states at double TIR. The enhanced phase difference is dependent on the incident angle; thus small angles can be easily and accurately measured by estimating the phase difference. The experimental results demonstrate the feasibility of this method. Angular resolution and sensitivity levels superior to 1.2 × 10^-4deg (2.1 × 10^-6rad) and 100 (deg/deg), respectively, were attainable in a dynamic range of 0.5 deg.

Original language	English
Pages (from-to)	1903-1908
Number of pages	6
Journal	Applied Optics
Issue number	9
DOIs	https://doi.org/10.1364/AO.53.001903
Publication status	Published - 2014 Mar 20

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All Science Journal Classification (ASJC) codes

Atomic and Molecular Physics, and Optics
Engineering (miscellaneous)
Electrical and Electronic Engineering

Cite this

Lin, J. Y., & Liao, Y. C. (2014). Small-angle measurement with highly sensitive total-internal-reflection heterodyne interferometer. Applied Optics, (9), 1903-1908. https://doi.org/10.1364/AO.53.001903

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Access to Document

10.1364/AO.53.001903