Small-angle measurement with highly sensitive total-internal-reflection heterodyne interferometer

Jiun You Lin, Yu Cheng Liao

Research output: Contribution to journalArticle

20 Citations (Scopus)

Abstract

In this paper, a high-sensitivity total-internal-reflection (TIR) heterodyne interferometer is proposed for measuring small angles. In the proposed interferometer, a half-wave plate and two quarter-wave plates that exhibit specific optic-axis azimuths are combined to form a phase shifter. When a rhomboid prism is placed between the phase shifter and an analyzer that exhibits suitable transmission-axis azimuth, it shifts and enhances the phase difference of the s- and p-polarization states at double TIR. The enhanced phase difference is dependent on the incident angle; thus small angles can be easily and accurately measured by estimating the phase difference. The experimental results demonstrate the feasibility of this method. Angular resolution and sensitivity levels superior to 1.2 × 10-4deg (2.1 × 10-6rad) and 100 (deg/deg), respectively, were attainable in a dynamic range of 0.5 deg.

Original languageEnglish
Pages (from-to)1903-1908
Number of pages6
JournalApplied Optics
Issue number9
DOIs
Publication statusPublished - 2014 Mar 20

Fingerprint

Phase shifters
Angle measurement
Interferometers
interferometers
azimuth
Prisms
rhomboids
Optics
Sand
sensitivity
Polarization
angular resolution
sands
prisms
dynamic range
analyzers
estimating
optics
shift
polarization

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics

Cite this

@article{9217509fa73d4a8db823da12ced314ed,
title = "Small-angle measurement with highly sensitive total-internal-reflection heterodyne interferometer",
abstract = "In this paper, a high-sensitivity total-internal-reflection (TIR) heterodyne interferometer is proposed for measuring small angles. In the proposed interferometer, a half-wave plate and two quarter-wave plates that exhibit specific optic-axis azimuths are combined to form a phase shifter. When a rhomboid prism is placed between the phase shifter and an analyzer that exhibits suitable transmission-axis azimuth, it shifts and enhances the phase difference of the s- and p-polarization states at double TIR. The enhanced phase difference is dependent on the incident angle; thus small angles can be easily and accurately measured by estimating the phase difference. The experimental results demonstrate the feasibility of this method. Angular resolution and sensitivity levels superior to 1.2 × 10-4deg (2.1 × 10-6rad) and 100 (deg/deg), respectively, were attainable in a dynamic range of 0.5 deg.",
author = "Lin, {Jiun You} and Liao, {Yu Cheng}",
year = "2014",
month = "3",
day = "20",
doi = "10.1364/AO.53.001903",
language = "English",
pages = "1903--1908",
journal = "Applied Optics",
issn = "1559-128X",
publisher = "The Optical Society",
number = "9",

}

Small-angle measurement with highly sensitive total-internal-reflection heterodyne interferometer. / Lin, Jiun You; Liao, Yu Cheng.

In: Applied Optics, No. 9, 20.03.2014, p. 1903-1908.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Small-angle measurement with highly sensitive total-internal-reflection heterodyne interferometer

AU - Lin, Jiun You

AU - Liao, Yu Cheng

PY - 2014/3/20

Y1 - 2014/3/20

N2 - In this paper, a high-sensitivity total-internal-reflection (TIR) heterodyne interferometer is proposed for measuring small angles. In the proposed interferometer, a half-wave plate and two quarter-wave plates that exhibit specific optic-axis azimuths are combined to form a phase shifter. When a rhomboid prism is placed between the phase shifter and an analyzer that exhibits suitable transmission-axis azimuth, it shifts and enhances the phase difference of the s- and p-polarization states at double TIR. The enhanced phase difference is dependent on the incident angle; thus small angles can be easily and accurately measured by estimating the phase difference. The experimental results demonstrate the feasibility of this method. Angular resolution and sensitivity levels superior to 1.2 × 10-4deg (2.1 × 10-6rad) and 100 (deg/deg), respectively, were attainable in a dynamic range of 0.5 deg.

AB - In this paper, a high-sensitivity total-internal-reflection (TIR) heterodyne interferometer is proposed for measuring small angles. In the proposed interferometer, a half-wave plate and two quarter-wave plates that exhibit specific optic-axis azimuths are combined to form a phase shifter. When a rhomboid prism is placed between the phase shifter and an analyzer that exhibits suitable transmission-axis azimuth, it shifts and enhances the phase difference of the s- and p-polarization states at double TIR. The enhanced phase difference is dependent on the incident angle; thus small angles can be easily and accurately measured by estimating the phase difference. The experimental results demonstrate the feasibility of this method. Angular resolution and sensitivity levels superior to 1.2 × 10-4deg (2.1 × 10-6rad) and 100 (deg/deg), respectively, were attainable in a dynamic range of 0.5 deg.

UR - http://www.scopus.com/inward/record.url?scp=84942371266&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84942371266&partnerID=8YFLogxK

U2 - 10.1364/AO.53.001903

DO - 10.1364/AO.53.001903

M3 - Article

AN - SCOPUS:84942371266

SP - 1903

EP - 1908

JO - Applied Optics

JF - Applied Optics

SN - 1559-128X

IS - 9

ER -