Abstract
We present the numerical and experimental investigations of micromechanical resonators made by creating alternate defects with different central-hole radii (r′) in a two-dimensional (2-D) phononic crystal (PnC) slab. The PnC structures were fabricated by etching a square array of cylindrical air holes in a 10 m thick free-standing silicon plate using a CMOS-compatible process. Preliminary experimental results show that the performance of the PnC resonators in terms of resonant frequency, Q factor, and insertion loss (IL) is highly dependent on r′. A Q factor of more than 3000 is achieved for the case of r′ 6 m while all the designed resonators with alternate defects have higher Q factor and lower IL than the resonators based on the normal Fabry-Perot structure due to the reduction in the mode mismatch.
| Original language | English |
|---|---|
| Article number | 234102 |
| Journal | Applied Physics Letters |
| Volume | 99 |
| Issue number | 23 |
| DOIs | |
| Publication status | Published - 2011 Dec 5 |
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All Science Journal Classification (ASJC) codes
- Physics and Astronomy (miscellaneous)
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Silicon two-dimensional phononic crystal resonators using alternate defects. / Wang, Nan; Hsiao, Fu Li; Palaniapan, Moorthi; Lee, Chengkuo.
In: Applied Physics Letters, Vol. 99, No. 23, 234102, 05.12.2011.Research output: Contribution to journal › Article
TY - JOUR
T1 - Silicon two-dimensional phononic crystal resonators using alternate defects
AU - Wang, Nan
AU - Hsiao, Fu Li
AU - Palaniapan, Moorthi
AU - Lee, Chengkuo
PY - 2011/12/5
Y1 - 2011/12/5
N2 - We present the numerical and experimental investigations of micromechanical resonators made by creating alternate defects with different central-hole radii (r′) in a two-dimensional (2-D) phononic crystal (PnC) slab. The PnC structures were fabricated by etching a square array of cylindrical air holes in a 10 m thick free-standing silicon plate using a CMOS-compatible process. Preliminary experimental results show that the performance of the PnC resonators in terms of resonant frequency, Q factor, and insertion loss (IL) is highly dependent on r′. A Q factor of more than 3000 is achieved for the case of r′ 6 m while all the designed resonators with alternate defects have higher Q factor and lower IL than the resonators based on the normal Fabry-Perot structure due to the reduction in the mode mismatch.
AB - We present the numerical and experimental investigations of micromechanical resonators made by creating alternate defects with different central-hole radii (r′) in a two-dimensional (2-D) phononic crystal (PnC) slab. The PnC structures were fabricated by etching a square array of cylindrical air holes in a 10 m thick free-standing silicon plate using a CMOS-compatible process. Preliminary experimental results show that the performance of the PnC resonators in terms of resonant frequency, Q factor, and insertion loss (IL) is highly dependent on r′. A Q factor of more than 3000 is achieved for the case of r′ 6 m while all the designed resonators with alternate defects have higher Q factor and lower IL than the resonators based on the normal Fabry-Perot structure due to the reduction in the mode mismatch.
UR - http://www.scopus.com/inward/record.url?scp=83455163956&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=83455163956&partnerID=8YFLogxK
U2 - 10.1063/1.3665956
DO - 10.1063/1.3665956
M3 - Article
AN - SCOPUS:83455163956
VL - 99
JO - Applied Physics Letters
JF - Applied Physics Letters
SN - 0003-6951
IS - 23
M1 - 234102
ER -