Silicon two-dimensional phononic crystal resonators using alternate defects

Nan Wang; Fu Li Hsiao; Moorthi Palaniapan; Chengkuo Lee

doi:10.1063/1.3665956

Silicon two-dimensional phononic crystal resonators using alternate defects

Nan Wang, Fu Li Hsiao, Moorthi Palaniapan, Chengkuo Lee

Graduate Institute of Photonics

Research output: Contribution to journal › Article › peer-review

12 Citations (Scopus)

Abstract

We present the numerical and experimental investigations of micromechanical resonators made by creating alternate defects with different central-hole radii (r′) in a two-dimensional (2-D) phononic crystal (PnC) slab. The PnC structures were fabricated by etching a square array of cylindrical air holes in a 10 m thick free-standing silicon plate using a CMOS-compatible process. Preliminary experimental results show that the performance of the PnC resonators in terms of resonant frequency, Q factor, and insertion loss (IL) is highly dependent on r′. A Q factor of more than 3000 is achieved for the case of r′ 6 m while all the designed resonators with alternate defects have higher Q factor and lower IL than the resonators based on the normal Fabry-Perot structure due to the reduction in the mode mismatch.

Original language	English
Article number	234102
Journal	Applied Physics Letters
Volume	99
Issue number	23
DOIs	https://doi.org/10.1063/1.3665956
Publication status	Published - 2011 Dec 5

All Science Journal Classification (ASJC) codes

Physics and Astronomy (miscellaneous)

Access to Document

10.1063/1.3665956

Fingerprint Dive into the research topics of 'Silicon two-dimensional phononic crystal resonators using alternate defects'. Together they form a unique fingerprint.

Cite this

@article{b567bcaa19264d7e96c37ea811f490a2,

title = "Silicon two-dimensional phononic crystal resonators using alternate defects",

abstract = "We present the numerical and experimental investigations of micromechanical resonators made by creating alternate defects with different central-hole radii (r′) in a two-dimensional (2-D) phononic crystal (PnC) slab. The PnC structures were fabricated by etching a square array of cylindrical air holes in a 10 m thick free-standing silicon plate using a CMOS-compatible process. Preliminary experimental results show that the performance of the PnC resonators in terms of resonant frequency, Q factor, and insertion loss (IL) is highly dependent on r′. A Q factor of more than 3000 is achieved for the case of r′ 6 m while all the designed resonators with alternate defects have higher Q factor and lower IL than the resonators based on the normal Fabry-Perot structure due to the reduction in the mode mismatch.",

author = "Nan Wang and Hsiao, {Fu Li} and Moorthi Palaniapan and Chengkuo Lee",

note = "Funding Information: This work was supported in research grants of MOE Tier 2 (2009-T2-2011) under WBS: R-263-000-598-112 at the National University of Singapore. ",

year = "2011",

month = dec,

day = "5",

doi = "10.1063/1.3665956",

language = "English",

volume = "99",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics Publising LLC",

number = "23",

}

TY - JOUR

T1 - Silicon two-dimensional phononic crystal resonators using alternate defects

AU - Wang, Nan

AU - Hsiao, Fu Li

AU - Palaniapan, Moorthi

AU - Lee, Chengkuo

N1 - Funding Information: This work was supported in research grants of MOE Tier 2 (2009-T2-2011) under WBS: R-263-000-598-112 at the National University of Singapore.

PY - 2011/12/5

Y1 - 2011/12/5

N2 - We present the numerical and experimental investigations of micromechanical resonators made by creating alternate defects with different central-hole radii (r′) in a two-dimensional (2-D) phononic crystal (PnC) slab. The PnC structures were fabricated by etching a square array of cylindrical air holes in a 10 m thick free-standing silicon plate using a CMOS-compatible process. Preliminary experimental results show that the performance of the PnC resonators in terms of resonant frequency, Q factor, and insertion loss (IL) is highly dependent on r′. A Q factor of more than 3000 is achieved for the case of r′ 6 m while all the designed resonators with alternate defects have higher Q factor and lower IL than the resonators based on the normal Fabry-Perot structure due to the reduction in the mode mismatch.

AB - We present the numerical and experimental investigations of micromechanical resonators made by creating alternate defects with different central-hole radii (r′) in a two-dimensional (2-D) phononic crystal (PnC) slab. The PnC structures were fabricated by etching a square array of cylindrical air holes in a 10 m thick free-standing silicon plate using a CMOS-compatible process. Preliminary experimental results show that the performance of the PnC resonators in terms of resonant frequency, Q factor, and insertion loss (IL) is highly dependent on r′. A Q factor of more than 3000 is achieved for the case of r′ 6 m while all the designed resonators with alternate defects have higher Q factor and lower IL than the resonators based on the normal Fabry-Perot structure due to the reduction in the mode mismatch.

UR - http://www.scopus.com/inward/record.url?scp=83455163956&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=83455163956&partnerID=8YFLogxK

U2 - 10.1063/1.3665956

DO - 10.1063/1.3665956

M3 - Article

AN - SCOPUS:83455163956

VL - 99

JO - Applied Physics Letters

JF - Applied Physics Letters

SN - 0003-6951

IS - 23

M1 - 234102

ER -