Abstract
We present the numerical and experimental investigations of micromechanical resonators made by creating alternate defects with different central-hole radii (r′) in a two-dimensional (2-D) phononic crystal (PnC) slab. The PnC structures were fabricated by etching a square array of cylindrical air holes in a 10 m thick free-standing silicon plate using a CMOS-compatible process. Preliminary experimental results show that the performance of the PnC resonators in terms of resonant frequency, Q factor, and insertion loss (IL) is highly dependent on r′. A Q factor of more than 3000 is achieved for the case of r′ 6 m while all the designed resonators with alternate defects have higher Q factor and lower IL than the resonators based on the normal Fabry-Perot structure due to the reduction in the mode mismatch.
Original language | English |
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Article number | 234102 |
Journal | Applied Physics Letters |
Volume | 99 |
Issue number | 23 |
DOIs | |
Publication status | Published - 2011 Dec 5 |
All Science Journal Classification (ASJC) codes
- Physics and Astronomy (miscellaneous)