Short-time discrete wavelet transform for wafer microcrack detection

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)

Abstract

This paper presents design and proof-of-principle experiments for a real-time in-line wafer microcrack detection system. The line-scanning method is chosen because entire wafer can be inspected without image processing technology. Short-Time Discrete Wavelet Transform (STDWT) is developed in order to determine reflective characteristics of microcrack, and smaller computation complexity in order to shorten system resolving time.

Original languageEnglish
Title of host publicationProceedings - IEEE ISIE 2009, IEEE International Symposium on Industrial Electronics
Pages2069-2074
Number of pages6
DOIs
Publication statusPublished - 2009 Dec 1
EventIEEE International Symposium on Industrial Electronics, IEEE ISIE 2009 - Seoul, Korea, Republic of
Duration: 2009 Jul 52009 Jul 8

Publication series

NameIEEE International Symposium on Industrial Electronics

Other

OtherIEEE International Symposium on Industrial Electronics, IEEE ISIE 2009
CountryKorea, Republic of
CitySeoul
Period09-07-0509-07-08

Fingerprint

Discrete wavelet transforms
Microcracks
Image processing
Scanning
Experiments

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering
  • Control and Systems Engineering

Cite this

Yang, W-R. (2009). Short-time discrete wavelet transform for wafer microcrack detection. In Proceedings - IEEE ISIE 2009, IEEE International Symposium on Industrial Electronics (pp. 2069-2074). [5213600] (IEEE International Symposium on Industrial Electronics). https://doi.org/10.1109/ISIE.2009.5213600
Yang, Wen-Ren. / Short-time discrete wavelet transform for wafer microcrack detection. Proceedings - IEEE ISIE 2009, IEEE International Symposium on Industrial Electronics. 2009. pp. 2069-2074 (IEEE International Symposium on Industrial Electronics).
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Yang, W-R 2009, Short-time discrete wavelet transform for wafer microcrack detection. in Proceedings - IEEE ISIE 2009, IEEE International Symposium on Industrial Electronics., 5213600, IEEE International Symposium on Industrial Electronics, pp. 2069-2074, IEEE International Symposium on Industrial Electronics, IEEE ISIE 2009, Seoul, Korea, Republic of, 09-07-05. https://doi.org/10.1109/ISIE.2009.5213600

Short-time discrete wavelet transform for wafer microcrack detection. / Yang, Wen-Ren.

Proceedings - IEEE ISIE 2009, IEEE International Symposium on Industrial Electronics. 2009. p. 2069-2074 5213600 (IEEE International Symposium on Industrial Electronics).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Yang W-R. Short-time discrete wavelet transform for wafer microcrack detection. In Proceedings - IEEE ISIE 2009, IEEE International Symposium on Industrial Electronics. 2009. p. 2069-2074. 5213600. (IEEE International Symposium on Industrial Electronics). https://doi.org/10.1109/ISIE.2009.5213600