Robust tracking control of a piezodriven monolithic flexure-hinge stage

Yi Cheng Huang, Chih Hao Cheng

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)


This study presents the controller design and tests of a new piezodriven two degree-of freedom (DOF) monolithic stage for precision motion. The computer-controlled system is developed, designed and employed for better displacement error compensation by proportional-integral-derivative (PID) controller based on Internal Model Control (IMC), Iterative Learning Control (ILC) and Disturbance Observer (DO). Experimental results show that stage positioning is precisely controlled (error ≈ 1.42%) for tracking sinusoidal waveforms by IMC and P-type ILC with repeatable disturbance. With additional DO, experiment tests perform error ≈ 0.5% with non-repeatable disturbance up to 16% of the maximum traveling length in roughly 5 iterations. This is close to the hardware reproducibility level. Experimental results show the piezo-stage controlled system can be potentially used for nano technology applications for precision engineering in industrial systems.

Original languageEnglish
Pages (from-to)926-934
Number of pages9
JournalScience in China, Series G: Physics, Mechanics and Astronomy
Issue number6
Publication statusPublished - 2009 Jun 1

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

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