Abstract
This study presents the controller design and tests of a new piezodriven two degree-of freedom (DOF) monolithic stage for precision motion. The computer-controlled system is developed, designed and employed for better displacement error compensation by proportional-integral-derivative (PID) controller based on Internal Model Control (IMC), Iterative Learning Control (ILC) and Disturbance Observer (DO). Experimental results show that stage positioning is precisely controlled (error ≈ 1.42%) for tracking sinusoidal waveforms by IMC and P-type ILC with repeatable disturbance. With additional DO, experiment tests perform error ≈ 0.5% with non-repeatable disturbance up to 16% of the maximum traveling length in roughly 5 iterations. This is close to the hardware reproducibility level. Experimental results show the piezo-stage controlled system can be potentially used for nano technology applications for precision engineering in industrial systems.
Original language | English |
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Pages (from-to) | 926-934 |
Number of pages | 9 |
Journal | Science in China, Series G: Physics, Mechanics and Astronomy |
Volume | 52 |
Issue number | 6 |
DOIs | |
Publication status | Published - 2009 Jun 1 |
All Science Journal Classification (ASJC) codes
- Physics and Astronomy(all)