Abstract
This study presents the controller design and tests of a piezo-driven system for precision motion of a novel two degree-of-freedom (DOF) monolithic stage. The computer-controlled system was developed, designed and employed for better displacement error compensation by PID controller based on Internal Model Control (IMC), Iterative Learning Control (ILC) and Disturbance Observer (DO). Experiments results shows that stage positioning is precisely controlled (error ≈ 1.42%) for tracking sinusoidal waveforms by IMC and P-type ILC with repeatable disturbance. With additional DO, experiment tests perform error ≈ 0.5% with non repeatable disturbance up to 16% of the maximum traveling length by in roughly 5 iterations. This is close to the hardware reproducibility level. Experimental results show the piezo-stage control system can be potentially used for nano technology applications for precision engineering in industrial systems.
| Original language | English |
|---|---|
| Pages | 977-982 |
| Number of pages | 6 |
| Publication status | Published - 2004 Dec 1 |
| Event | 2004 IEEE International Conference on Control Applications - Taipei, Taiwan Duration: 2004 Sep 2 → 2004 Sep 4 |
Other
| Other | 2004 IEEE International Conference on Control Applications |
|---|---|
| Country | Taiwan |
| City | Taipei |
| Period | 04-09-02 → 04-09-04 |
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All Science Journal Classification (ASJC) codes
- Engineering(all)
Cite this
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Robust tracking control of a novel piezodriven monolithic flexure-hinge stage. / Huang, Yi Cheng; Cheng, Chih Hao.
2004. 977-982 Paper presented at 2004 IEEE International Conference on Control Applications, Taipei, Taiwan.Research output: Contribution to conference › Paper
TY - CONF
T1 - Robust tracking control of a novel piezodriven monolithic flexure-hinge stage
AU - Huang, Yi Cheng
AU - Cheng, Chih Hao
PY - 2004/12/1
Y1 - 2004/12/1
N2 - This study presents the controller design and tests of a piezo-driven system for precision motion of a novel two degree-of-freedom (DOF) monolithic stage. The computer-controlled system was developed, designed and employed for better displacement error compensation by PID controller based on Internal Model Control (IMC), Iterative Learning Control (ILC) and Disturbance Observer (DO). Experiments results shows that stage positioning is precisely controlled (error ≈ 1.42%) for tracking sinusoidal waveforms by IMC and P-type ILC with repeatable disturbance. With additional DO, experiment tests perform error ≈ 0.5% with non repeatable disturbance up to 16% of the maximum traveling length by in roughly 5 iterations. This is close to the hardware reproducibility level. Experimental results show the piezo-stage control system can be potentially used for nano technology applications for precision engineering in industrial systems.
AB - This study presents the controller design and tests of a piezo-driven system for precision motion of a novel two degree-of-freedom (DOF) monolithic stage. The computer-controlled system was developed, designed and employed for better displacement error compensation by PID controller based on Internal Model Control (IMC), Iterative Learning Control (ILC) and Disturbance Observer (DO). Experiments results shows that stage positioning is precisely controlled (error ≈ 1.42%) for tracking sinusoidal waveforms by IMC and P-type ILC with repeatable disturbance. With additional DO, experiment tests perform error ≈ 0.5% with non repeatable disturbance up to 16% of the maximum traveling length by in roughly 5 iterations. This is close to the hardware reproducibility level. Experimental results show the piezo-stage control system can be potentially used for nano technology applications for precision engineering in industrial systems.
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M3 - Paper
AN - SCOPUS:17744388429
SP - 977
EP - 982
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