TY - JOUR
T1 - Research on an ultra-low power thermoelectric-type anemometer
AU - Shen, Chih Hsiung
AU - Lin, Po Hsuan
AU - Chen, Shu Jung
N1 - Funding Information:
This research was supported in part by grant of making chips from National Chip Implementation Center (CIC). The authors would also like to thank the National Science Council of the Republic of china, Taiwan for financially supporting this research under Contract. MOST 106-2221-E-018-026.
PY - 2018/7/4
Y1 - 2018/7/4
N2 - Beyond the conventional hot-wire sensor, a new thermoelectric sensor with ultra-low power consumption without heating is proposed. Using the TSMC 0.35 um CMOS-MEMS process, the thermoelectric sensor is fabricated with 32 pair of central-symmetrical thermocouples positioned. When the fluid passes through the thermopile, the fluid will take away the heat, so that a temperature difference is generated between the cold end and hot end of the thermocouples. The temperature sensor is calibrated and senses the drop of temperature at the center of membrane during the measurement. For different flow velocities, it is interesting to find that the drop of temperature is verified by the output voltage of sensing circuit from thermopile and the same for temperature sensor which behaves as a function of flow velocity. The new approach for the anemometer of sensing flow velocity is realized by our proposed thermopile which is proved to be a practical technique with ultra-low power consumption.
AB - Beyond the conventional hot-wire sensor, a new thermoelectric sensor with ultra-low power consumption without heating is proposed. Using the TSMC 0.35 um CMOS-MEMS process, the thermoelectric sensor is fabricated with 32 pair of central-symmetrical thermocouples positioned. When the fluid passes through the thermopile, the fluid will take away the heat, so that a temperature difference is generated between the cold end and hot end of the thermocouples. The temperature sensor is calibrated and senses the drop of temperature at the center of membrane during the measurement. For different flow velocities, it is interesting to find that the drop of temperature is verified by the output voltage of sensing circuit from thermopile and the same for temperature sensor which behaves as a function of flow velocity. The new approach for the anemometer of sensing flow velocity is realized by our proposed thermopile which is proved to be a practical technique with ultra-low power consumption.
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U2 - 10.1088/1757-899X/383/1/012021
DO - 10.1088/1757-899X/383/1/012021
M3 - Conference article
AN - SCOPUS:85050497832
VL - 383
JO - IOP Conference Series: Materials Science and Engineering
JF - IOP Conference Series: Materials Science and Engineering
SN - 1757-8981
IS - 1
M1 - 012021
T2 - 2018 International Joint Conference on Materials Science and Mechanical Engineering, CMSME 2018
Y2 - 24 February 2018 through 26 February 2018
ER -