Abstract
In this research, a novel magnetic catalyzed SnO2 with Mn3O4 of CMOS-MEMS gas sensor is firstly proposed. Beyond the conventional heating methods to obtain high chemical reaction rate, the sensitivity of gas sensors can be enhanced by using our proposed magnetic catalysis technique at ultra-low power consumption. Fabrication of sensor structure is realized by the standard 0.35μm CMOS process and MEMS post process. Preparing for the magnetic sensing material, the solution of SnCl4(aq) with powder of Mn3O4 and the precursor is mixed to obtain sol-gel solution. Measurement of gas concentration of monoxide is arranged in the gas chamber with solenoidal coils using magnetic material, SnO2-Mn3O4 coated onto a CMOS-MEMS gas sensor with donut-shaped stacked electrodes by horizontal magnetic field to facilitate sensitivity. Based on our mature CMOS-MEMS gas sensor structure and developed magnetic-catalytic sensing mechanism, the enhancement of sensitivity with SnO2-Mn3O4 is investigated and formulated with the Gibbs free energy and the Eyric equation. According to a careful investigation of the measurement results, the sensitivity of proposed CO gas sensor reaches 1.87%/ppm under the 6 Gauss. Moreover, the sensitivity of the novel material SnO2-Mn3O4 is better than our previous research with sensing material SnO2-Fe3O4. This research shows a highly practical application to CMOS gas sensor with a widespread magnetic-catalytic mechanism and sol-gel solution.
| Original language | English |
|---|---|
| Title of host publication | 2014 IEEE 3rd Global Conference on Consumer Electronics, GCCE 2014 |
| Publisher | Institute of Electrical and Electronics Engineers Inc. |
| Pages | 198-199 |
| Number of pages | 2 |
| ISBN (Electronic) | 9781479951451 |
| DOIs | |
| Publication status | Published - 2014 Feb 3 |
| Event | 2014 IEEE 3rd Global Conference on Consumer Electronics, GCCE 2014 - Tokyo, Japan Duration: 2014 Oct 7 → 2014 Oct 10 |
Other
| Other | 2014 IEEE 3rd Global Conference on Consumer Electronics, GCCE 2014 |
|---|---|
| Country | Japan |
| City | Tokyo |
| Period | 14-10-07 → 14-10-10 |
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All Science Journal Classification (ASJC) codes
- Electrical and Electronic Engineering
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Research on a novel magnetic-catalytic sensing material on CMOS-MEMS gas sensor. / Chen, Hsin Ying; Shen, Chih-Hsiung.
2014 IEEE 3rd Global Conference on Consumer Electronics, GCCE 2014. Institute of Electrical and Electronics Engineers Inc., 2014. p. 198-199 7031247.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
TY - GEN
T1 - Research on a novel magnetic-catalytic sensing material on CMOS-MEMS gas sensor
AU - Chen, Hsin Ying
AU - Shen, Chih-Hsiung
PY - 2014/2/3
Y1 - 2014/2/3
N2 - In this research, a novel magnetic catalyzed SnO2 with Mn3O4 of CMOS-MEMS gas sensor is firstly proposed. Beyond the conventional heating methods to obtain high chemical reaction rate, the sensitivity of gas sensors can be enhanced by using our proposed magnetic catalysis technique at ultra-low power consumption. Fabrication of sensor structure is realized by the standard 0.35μm CMOS process and MEMS post process. Preparing for the magnetic sensing material, the solution of SnCl4(aq) with powder of Mn3O4 and the precursor is mixed to obtain sol-gel solution. Measurement of gas concentration of monoxide is arranged in the gas chamber with solenoidal coils using magnetic material, SnO2-Mn3O4 coated onto a CMOS-MEMS gas sensor with donut-shaped stacked electrodes by horizontal magnetic field to facilitate sensitivity. Based on our mature CMOS-MEMS gas sensor structure and developed magnetic-catalytic sensing mechanism, the enhancement of sensitivity with SnO2-Mn3O4 is investigated and formulated with the Gibbs free energy and the Eyric equation. According to a careful investigation of the measurement results, the sensitivity of proposed CO gas sensor reaches 1.87%/ppm under the 6 Gauss. Moreover, the sensitivity of the novel material SnO2-Mn3O4 is better than our previous research with sensing material SnO2-Fe3O4. This research shows a highly practical application to CMOS gas sensor with a widespread magnetic-catalytic mechanism and sol-gel solution.
AB - In this research, a novel magnetic catalyzed SnO2 with Mn3O4 of CMOS-MEMS gas sensor is firstly proposed. Beyond the conventional heating methods to obtain high chemical reaction rate, the sensitivity of gas sensors can be enhanced by using our proposed magnetic catalysis technique at ultra-low power consumption. Fabrication of sensor structure is realized by the standard 0.35μm CMOS process and MEMS post process. Preparing for the magnetic sensing material, the solution of SnCl4(aq) with powder of Mn3O4 and the precursor is mixed to obtain sol-gel solution. Measurement of gas concentration of monoxide is arranged in the gas chamber with solenoidal coils using magnetic material, SnO2-Mn3O4 coated onto a CMOS-MEMS gas sensor with donut-shaped stacked electrodes by horizontal magnetic field to facilitate sensitivity. Based on our mature CMOS-MEMS gas sensor structure and developed magnetic-catalytic sensing mechanism, the enhancement of sensitivity with SnO2-Mn3O4 is investigated and formulated with the Gibbs free energy and the Eyric equation. According to a careful investigation of the measurement results, the sensitivity of proposed CO gas sensor reaches 1.87%/ppm under the 6 Gauss. Moreover, the sensitivity of the novel material SnO2-Mn3O4 is better than our previous research with sensing material SnO2-Fe3O4. This research shows a highly practical application to CMOS gas sensor with a widespread magnetic-catalytic mechanism and sol-gel solution.
UR - http://www.scopus.com/inward/record.url?scp=84946692989&partnerID=8YFLogxK
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U2 - 10.1109/GCCE.2014.7031247
DO - 10.1109/GCCE.2014.7031247
M3 - Conference contribution
SP - 198
EP - 199
BT - 2014 IEEE 3rd Global Conference on Consumer Electronics, GCCE 2014
PB - Institute of Electrical and Electronics Engineers Inc.
ER -