Research on a novel integration chip of CMOS-MEMS sensor and differential GRO circuit

Chih Hsiung Shen, Jianda Chen

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this research a new high resolution voltage-to-frequency type converter and measurement system for the differential signals of CMOS-MEMS sensor is proposed. In order to verify the feasibility of high resolution converting, a two-dimensional thermoelectric flow sensor with quadrant symmetrical structure was fabricated by using 2P4M 0.35μm CMOS-MEMS process of TSMC. The measurement circuit is designed by using Gated-Ring-Oscillator (GRO) structure to convert the output voltages of CMOS-MEMS sensor to the frequency signal. For the differential type signals, each output of two signals will be delivered to two GRO and each ring gives a corresponding oscillation frequency with small difference. Based on the heterodyne conversion architecture, after a low-pass filter, the output of mixed high frequency signals gives a low frequency with high-precision resolution of conversion. Beyond the traditional complex analog signal processing circuits, the proposed converter and measurement system gives a new approach to reach higher resolution highly-integration for the CMOS-MEMS sensor's applications.

Original languageEnglish
Title of host publicationProceedings of 4th IEEE International Conference on Applied System Innovation 2018, ICASI 2018
EditorsArtde Donald Kin-Tak Lam, Stephen D. Prior, Teen-Hang Meen
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages235-238
Number of pages4
ISBN (Electronic)9781538643426
DOIs
Publication statusPublished - 2018 Jun 22
Event4th IEEE International Conference on Applied System Innovation, ICASI 2018 - Chiba, Japan
Duration: 2018 Apr 132018 Apr 17

Publication series

NameProceedings of 4th IEEE International Conference on Applied System Innovation 2018, ICASI 2018

Other

Other4th IEEE International Conference on Applied System Innovation, ICASI 2018
CountryJapan
CityChiba
Period18-04-1318-04-17

All Science Journal Classification (ASJC) codes

  • Computer Networks and Communications
  • Hardware and Architecture
  • Energy Engineering and Power Technology
  • Control and Systems Engineering
  • Mechanical Engineering
  • Control and Optimization
  • Modelling and Simulation
  • Biomedical Engineering

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  • Cite this

    Shen, C. H., & Chen, J. (2018). Research on a novel integration chip of CMOS-MEMS sensor and differential GRO circuit. In A. D. K-T. Lam, S. D. Prior, & T-H. Meen (Eds.), Proceedings of 4th IEEE International Conference on Applied System Innovation 2018, ICASI 2018 (pp. 235-238). (Proceedings of 4th IEEE International Conference on Applied System Innovation 2018, ICASI 2018). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ICASI.2018.8394576