Research on a novel integration chip of CMOS-MEMS sensor and differential GRO circuit

Chih-Hsiung Shen, Jianda Chen

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this research a new high resolution voltage-to-frequency type converter and measurement system for the differential signals of CMOS-MEMS sensor is proposed. In order to verify the feasibility of high resolution converting, a two-dimensional thermoelectric flow sensor with quadrant symmetrical structure was fabricated by using 2P4M 0.35μm CMOS-MEMS process of TSMC. The measurement circuit is designed by using Gated-Ring-Oscillator (GRO) structure to convert the output voltages of CMOS-MEMS sensor to the frequency signal. For the differential type signals, each output of two signals will be delivered to two GRO and each ring gives a corresponding oscillation frequency with small difference. Based on the heterodyne conversion architecture, after a low-pass filter, the output of mixed high frequency signals gives a low frequency with high-precision resolution of conversion. Beyond the traditional complex analog signal processing circuits, the proposed converter and measurement system gives a new approach to reach higher resolution highly-integration for the CMOS-MEMS sensor's applications.

Original languageEnglish
Title of host publicationProceedings of 4th IEEE International Conference on Applied System Innovation 2018, ICASI 2018
EditorsArtde Donald Kin-Tak Lam, Stephen D. Prior, Teen-Hang Meen
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages235-238
Number of pages4
ISBN (Electronic)9781538643426
DOIs
Publication statusPublished - 2018 Jun 22
Event4th IEEE International Conference on Applied System Innovation, ICASI 2018 - Chiba, Japan
Duration: 2018 Apr 132018 Apr 17

Other

Other4th IEEE International Conference on Applied System Innovation, ICASI 2018
CountryJapan
CityChiba
Period18-04-1318-04-17

Fingerprint

Micro-electro-mechanical Systems
MEMS
Chip
Ring
Sensor
Networks (circuits)
Sensors
High Resolution
Measurement System
Converter
Output
Voltage
Low pass filters
Electric potential
Heterodyne
Low-pass Filter
Quadrant
Signal processing
Convert
Low Frequency

All Science Journal Classification (ASJC) codes

  • Computer Networks and Communications
  • Hardware and Architecture
  • Energy Engineering and Power Technology
  • Control and Systems Engineering
  • Mechanical Engineering
  • Control and Optimization
  • Modelling and Simulation
  • Biomedical Engineering

Cite this

Shen, C-H., & Chen, J. (2018). Research on a novel integration chip of CMOS-MEMS sensor and differential GRO circuit. In A. D. K-T. Lam, S. D. Prior, & T-H. Meen (Eds.), Proceedings of 4th IEEE International Conference on Applied System Innovation 2018, ICASI 2018 (pp. 235-238). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ICASI.2018.8394576
Shen, Chih-Hsiung ; Chen, Jianda. / Research on a novel integration chip of CMOS-MEMS sensor and differential GRO circuit. Proceedings of 4th IEEE International Conference on Applied System Innovation 2018, ICASI 2018. editor / Artde Donald Kin-Tak Lam ; Stephen D. Prior ; Teen-Hang Meen. Institute of Electrical and Electronics Engineers Inc., 2018. pp. 235-238
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Shen, C-H & Chen, J 2018, Research on a novel integration chip of CMOS-MEMS sensor and differential GRO circuit. in ADK-T Lam, SD Prior & T-H Meen (eds), Proceedings of 4th IEEE International Conference on Applied System Innovation 2018, ICASI 2018. Institute of Electrical and Electronics Engineers Inc., pp. 235-238, 4th IEEE International Conference on Applied System Innovation, ICASI 2018, Chiba, Japan, 18-04-13. https://doi.org/10.1109/ICASI.2018.8394576

Research on a novel integration chip of CMOS-MEMS sensor and differential GRO circuit. / Shen, Chih-Hsiung; Chen, Jianda.

Proceedings of 4th IEEE International Conference on Applied System Innovation 2018, ICASI 2018. ed. / Artde Donald Kin-Tak Lam; Stephen D. Prior; Teen-Hang Meen. Institute of Electrical and Electronics Engineers Inc., 2018. p. 235-238.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Shen C-H, Chen J. Research on a novel integration chip of CMOS-MEMS sensor and differential GRO circuit. In Lam ADK-T, Prior SD, Meen T-H, editors, Proceedings of 4th IEEE International Conference on Applied System Innovation 2018, ICASI 2018. Institute of Electrical and Electronics Engineers Inc. 2018. p. 235-238 https://doi.org/10.1109/ICASI.2018.8394576