TY - GEN
T1 - Research on a new metal-n-poly thermoelectric material sensor for vacuum sensing with self heating
AU - Shen, Chih Hsiung
AU - Chen, Shu Jung
AU - Lin, Shih Hao
N1 - Funding Information:
This research was supported in part by grant of making chips from National Chip Implementation Center (CIC). The authors would also like to thank the National Science Council of the Republic of china, Taiwan for financially supporting this research under Contract. MOST 106-2221-E-018-026-
PY - 2018
Y1 - 2018
N2 - This paper proposes a new vacuum sensor with CMOS Metal-N-Poly thermoelectric materials which works for both thermoelectric sensing and resistive heating. A new method of vacuum measurement with self-heating is proposed based on the dual phases of heating and sensing for the same element which is realized with CMOS thermoelectric sensor. Using the TSMC 0.35 μm CMOS-MEMS process, the proposed thermoelectric sensor is designed and fabricated with standard CMOS materials of the 4th metal and N-polysilicon to form 64 pairs of central-symmetrical thermocouples. There is an air convection-sensing area at the center of membrane and is filled with array of micro-through-holes to enhance the effect of heat convection. When the air molecules move through the array of hole, the heat exchange will take away the heat to cause a temperature drop of sensing area which gives a weak voltage between the cold and hot end of the thermocouples. The heating of thermopile itself is designed at the first phase and sensing the output voltage at the second phase subsequently. According to a careful investigation of the measurement with a wide range of 10m∼10k torr, our proposed sensing scheme based on a thermoelectric type sensor is proved for practical vacuum detection and most of all it is proved as a new approach to use a commercial thermopile without heater, which is easier to include than a special custom design.
AB - This paper proposes a new vacuum sensor with CMOS Metal-N-Poly thermoelectric materials which works for both thermoelectric sensing and resistive heating. A new method of vacuum measurement with self-heating is proposed based on the dual phases of heating and sensing for the same element which is realized with CMOS thermoelectric sensor. Using the TSMC 0.35 μm CMOS-MEMS process, the proposed thermoelectric sensor is designed and fabricated with standard CMOS materials of the 4th metal and N-polysilicon to form 64 pairs of central-symmetrical thermocouples. There is an air convection-sensing area at the center of membrane and is filled with array of micro-through-holes to enhance the effect of heat convection. When the air molecules move through the array of hole, the heat exchange will take away the heat to cause a temperature drop of sensing area which gives a weak voltage between the cold and hot end of the thermocouples. The heating of thermopile itself is designed at the first phase and sensing the output voltage at the second phase subsequently. According to a careful investigation of the measurement with a wide range of 10m∼10k torr, our proposed sensing scheme based on a thermoelectric type sensor is proved for practical vacuum detection and most of all it is proved as a new approach to use a commercial thermopile without heater, which is easier to include than a special custom design.
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U2 - 10.4028/www.scientific.net/KEM.773.152
DO - 10.4028/www.scientific.net/KEM.773.152
M3 - Conference contribution
AN - SCOPUS:85052754055
SN - 9783035713374
T3 - Key Engineering Materials
SP - 152
EP - 156
BT - Applied Engineering, Materials and Mechanics II
A2 - Hu, Jong Wan
PB - Trans Tech Publications Ltd
T2 - 3rd International Conference on Applied Engineering, Materials and Mechanics, ICAEMM 2018
Y2 - 20 April 2018 through 22 April 2018
ER -