Research on a new metal-n-poly thermoelectric material sensor for vacuum sensing with self heating

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper proposes a new vacuum sensor with CMOS Metal-N-Poly thermoelectric materials which works for both thermoelectric sensing and resistive heating. A new method of vacuum measurement with self-heating is proposed based on the dual phases of heating and sensing for the same element which is realized with CMOS thermoelectric sensor. Using the TSMC 0.35 μm CMOS-MEMS process, the proposed thermoelectric sensor is designed and fabricated with standard CMOS materials of the 4th metal and N-polysilicon to form 64 pairs of central-symmetrical thermocouples. There is an air convection-sensing area at the center of membrane and is filled with array of micro-through-holes to enhance the effect of heat convection. When the air molecules move through the array of hole, the heat exchange will take away the heat to cause a temperature drop of sensing area which gives a weak voltage between the cold and hot end of the thermocouples. The heating of thermopile itself is designed at the first phase and sensing the output voltage at the second phase subsequently. According to a careful investigation of the measurement with a wide range of 10m∼10k torr, our proposed sensing scheme based on a thermoelectric type sensor is proved for practical vacuum detection and most of all it is proved as a new approach to use a commercial thermopile without heater, which is easier to include than a special custom design.

Original languageEnglish
Title of host publicationApplied Engineering, Materials and Mechanics II
EditorsJong Wan Hu
PublisherTrans Tech Publications Ltd
Pages152-156
Number of pages5
ISBN (Print)9783035713374
DOIs
Publication statusPublished - 2018 Jan 1
Event3rd International Conference on Applied Engineering, Materials and Mechanics, ICAEMM 2018 - Okinawa Island, Japan
Duration: 2018 Apr 202018 Apr 22

Publication series

NameKey Engineering Materials
Volume773 KEM
ISSN (Print)1013-9826

Other

Other3rd International Conference on Applied Engineering, Materials and Mechanics, ICAEMM 2018
CountryJapan
CityOkinawa Island
Period18-04-2018-04-22

Fingerprint

Metals
Vacuum
Thermopiles
Heating
Sensors
Thermocouples
Heat convection
Electric potential
Air
Polysilicon
MEMS
Membranes
Molecules
Temperature
Hot Temperature

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Shen, C-H., Chen, S. J., & Lin, S. H. (2018). Research on a new metal-n-poly thermoelectric material sensor for vacuum sensing with self heating. In J. W. Hu (Ed.), Applied Engineering, Materials and Mechanics II (pp. 152-156). (Key Engineering Materials; Vol. 773 KEM). Trans Tech Publications Ltd. https://doi.org/10.4028/www.scientific.net/KEM.773.152
Shen, Chih-Hsiung ; Chen, Shu Jung ; Lin, Shih Hao. / Research on a new metal-n-poly thermoelectric material sensor for vacuum sensing with self heating. Applied Engineering, Materials and Mechanics II. editor / Jong Wan Hu. Trans Tech Publications Ltd, 2018. pp. 152-156 (Key Engineering Materials).
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abstract = "This paper proposes a new vacuum sensor with CMOS Metal-N-Poly thermoelectric materials which works for both thermoelectric sensing and resistive heating. A new method of vacuum measurement with self-heating is proposed based on the dual phases of heating and sensing for the same element which is realized with CMOS thermoelectric sensor. Using the TSMC 0.35 μm CMOS-MEMS process, the proposed thermoelectric sensor is designed and fabricated with standard CMOS materials of the 4th metal and N-polysilicon to form 64 pairs of central-symmetrical thermocouples. There is an air convection-sensing area at the center of membrane and is filled with array of micro-through-holes to enhance the effect of heat convection. When the air molecules move through the array of hole, the heat exchange will take away the heat to cause a temperature drop of sensing area which gives a weak voltage between the cold and hot end of the thermocouples. The heating of thermopile itself is designed at the first phase and sensing the output voltage at the second phase subsequently. According to a careful investigation of the measurement with a wide range of 10m∼10k torr, our proposed sensing scheme based on a thermoelectric type sensor is proved for practical vacuum detection and most of all it is proved as a new approach to use a commercial thermopile without heater, which is easier to include than a special custom design.",
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Shen, C-H, Chen, SJ & Lin, SH 2018, Research on a new metal-n-poly thermoelectric material sensor for vacuum sensing with self heating. in JW Hu (ed.), Applied Engineering, Materials and Mechanics II. Key Engineering Materials, vol. 773 KEM, Trans Tech Publications Ltd, pp. 152-156, 3rd International Conference on Applied Engineering, Materials and Mechanics, ICAEMM 2018, Okinawa Island, Japan, 18-04-20. https://doi.org/10.4028/www.scientific.net/KEM.773.152

Research on a new metal-n-poly thermoelectric material sensor for vacuum sensing with self heating. / Shen, Chih-Hsiung; Chen, Shu Jung; Lin, Shih Hao.

Applied Engineering, Materials and Mechanics II. ed. / Jong Wan Hu. Trans Tech Publications Ltd, 2018. p. 152-156 (Key Engineering Materials; Vol. 773 KEM).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Shen C-H, Chen SJ, Lin SH. Research on a new metal-n-poly thermoelectric material sensor for vacuum sensing with self heating. In Hu JW, editor, Applied Engineering, Materials and Mechanics II. Trans Tech Publications Ltd. 2018. p. 152-156. (Key Engineering Materials). https://doi.org/10.4028/www.scientific.net/KEM.773.152