Abstract
This paper proposes a new vacuum sensor with CMOS Metal-N-Poly thermoelectric materials which works for both thermoelectric sensing and resistive heating. A new method of vacuum measurement with self-heating is proposed based on the dual phases of heating and sensing for the same element which is realized with CMOS thermoelectric sensor. Using the TSMC 0.35 μm CMOS-MEMS process, the proposed thermoelectric sensor is designed and fabricated with standard CMOS materials of the 4th metal and N-polysilicon to form 64 pairs of central-symmetrical thermocouples. There is an air convection-sensing area at the center of membrane and is filled with array of micro-through-holes to enhance the effect of heat convection. When the air molecules move through the array of hole, the heat exchange will take away the heat to cause a temperature drop of sensing area which gives a weak voltage between the cold and hot end of the thermocouples. The heating of thermopile itself is designed at the first phase and sensing the output voltage at the second phase subsequently. According to a careful investigation of the measurement with a wide range of 10m∼10k torr, our proposed sensing scheme based on a thermoelectric type sensor is proved for practical vacuum detection and most of all it is proved as a new approach to use a commercial thermopile without heater, which is easier to include than a special custom design.
| Original language | English |
|---|---|
| Title of host publication | Applied Engineering, Materials and Mechanics II |
| Editors | Jong Wan Hu |
| Publisher | Trans Tech Publications Ltd |
| Pages | 152-156 |
| Number of pages | 5 |
| ISBN (Print) | 9783035713374 |
| DOIs | |
| Publication status | Published - 2018 Jan 1 |
| Event | 3rd International Conference on Applied Engineering, Materials and Mechanics, ICAEMM 2018 - Okinawa Island, Japan Duration: 2018 Apr 20 → 2018 Apr 22 |
Publication series
| Name | Key Engineering Materials |
|---|---|
| Volume | 773 KEM |
| ISSN (Print) | 1013-9826 |
Other
| Other | 3rd International Conference on Applied Engineering, Materials and Mechanics, ICAEMM 2018 |
|---|---|
| Country | Japan |
| City | Okinawa Island |
| Period | 18-04-20 → 18-04-22 |
Fingerprint
All Science Journal Classification (ASJC) codes
- Materials Science(all)
- Mechanics of Materials
- Mechanical Engineering
Cite this
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Research on a new metal-n-poly thermoelectric material sensor for vacuum sensing with self heating. / Shen, Chih-Hsiung; Chen, Shu Jung; Lin, Shih Hao.
Applied Engineering, Materials and Mechanics II. ed. / Jong Wan Hu. Trans Tech Publications Ltd, 2018. p. 152-156 (Key Engineering Materials; Vol. 773 KEM).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
TY - GEN
T1 - Research on a new metal-n-poly thermoelectric material sensor for vacuum sensing with self heating
AU - Shen, Chih-Hsiung
AU - Chen, Shu Jung
AU - Lin, Shih Hao
PY - 2018/1/1
Y1 - 2018/1/1
N2 - This paper proposes a new vacuum sensor with CMOS Metal-N-Poly thermoelectric materials which works for both thermoelectric sensing and resistive heating. A new method of vacuum measurement with self-heating is proposed based on the dual phases of heating and sensing for the same element which is realized with CMOS thermoelectric sensor. Using the TSMC 0.35 μm CMOS-MEMS process, the proposed thermoelectric sensor is designed and fabricated with standard CMOS materials of the 4th metal and N-polysilicon to form 64 pairs of central-symmetrical thermocouples. There is an air convection-sensing area at the center of membrane and is filled with array of micro-through-holes to enhance the effect of heat convection. When the air molecules move through the array of hole, the heat exchange will take away the heat to cause a temperature drop of sensing area which gives a weak voltage between the cold and hot end of the thermocouples. The heating of thermopile itself is designed at the first phase and sensing the output voltage at the second phase subsequently. According to a careful investigation of the measurement with a wide range of 10m∼10k torr, our proposed sensing scheme based on a thermoelectric type sensor is proved for practical vacuum detection and most of all it is proved as a new approach to use a commercial thermopile without heater, which is easier to include than a special custom design.
AB - This paper proposes a new vacuum sensor with CMOS Metal-N-Poly thermoelectric materials which works for both thermoelectric sensing and resistive heating. A new method of vacuum measurement with self-heating is proposed based on the dual phases of heating and sensing for the same element which is realized with CMOS thermoelectric sensor. Using the TSMC 0.35 μm CMOS-MEMS process, the proposed thermoelectric sensor is designed and fabricated with standard CMOS materials of the 4th metal and N-polysilicon to form 64 pairs of central-symmetrical thermocouples. There is an air convection-sensing area at the center of membrane and is filled with array of micro-through-holes to enhance the effect of heat convection. When the air molecules move through the array of hole, the heat exchange will take away the heat to cause a temperature drop of sensing area which gives a weak voltage between the cold and hot end of the thermocouples. The heating of thermopile itself is designed at the first phase and sensing the output voltage at the second phase subsequently. According to a careful investigation of the measurement with a wide range of 10m∼10k torr, our proposed sensing scheme based on a thermoelectric type sensor is proved for practical vacuum detection and most of all it is proved as a new approach to use a commercial thermopile without heater, which is easier to include than a special custom design.
UR - http://www.scopus.com/inward/record.url?scp=85052754055&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85052754055&partnerID=8YFLogxK
U2 - 10.4028/www.scientific.net/KEM.773.152
DO - 10.4028/www.scientific.net/KEM.773.152
M3 - Conference contribution
AN - SCOPUS:85052754055
SN - 9783035713374
T3 - Key Engineering Materials
SP - 152
EP - 156
BT - Applied Engineering, Materials and Mechanics II
A2 - Hu, Jong Wan
PB - Trans Tech Publications Ltd
ER -