Research on a highly sensitive magnetic-catalytic CMOS-MEMS compatible gas sensor

Chih Hsiung Shen, Shi Ching Ke

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

This letter proposes a new magnetic-catalytic sensing mechanism designed to increase the sensitivity of a gas sensor with mesh-stacked sensing electrodes. Beyond the conventional power dissipation of heating to maintain a certain working temperature, the novel gas sensor with a magneticcatalytic mechanism operates at an ambient temperature, and heating power does not need to be considered. The standard 0.35 μm CMOS process was used to fabricate a gas sensor with mesh-stacked electrodes. To prepare the magnetic sensing material, a SnO2 solution, prepared using the sol-gel method, was mixed with Fe3O4 at a ratio of SnO2:Fe3O 4 = 3:1 and was deposited onto mesh-stacked electrodes. When the CO gas sensor was introduced, the sample was tested and verified inside a CO gas chamber using a magnetic field generator composed of solenoidal coils. According to a careful investigation of the measurement results, the highest sensitivity, 1.73%/ppm, was obtained under 12 G in a horizontal magnetic field, indicating that the mechanism is applicable for use in an ultralow power chemical microsensor with high sensitivity.

Original languageEnglish
Article number6679259
Pages (from-to)120-122
Number of pages3
JournalIEEE Electron Device Letters
Volume35
Issue number1
DOIs
Publication statusPublished - 2014 Jan 1

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Chemical sensors
MEMS
Carbon Monoxide
Electrodes
Magnetic fields
Heating
Microsensors
Sol-gel process
Energy dissipation
Gases
Temperature

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

Cite this

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abstract = "This letter proposes a new magnetic-catalytic sensing mechanism designed to increase the sensitivity of a gas sensor with mesh-stacked sensing electrodes. Beyond the conventional power dissipation of heating to maintain a certain working temperature, the novel gas sensor with a magneticcatalytic mechanism operates at an ambient temperature, and heating power does not need to be considered. The standard 0.35 μm CMOS process was used to fabricate a gas sensor with mesh-stacked electrodes. To prepare the magnetic sensing material, a SnO2 solution, prepared using the sol-gel method, was mixed with Fe3O4 at a ratio of SnO2:Fe3O 4 = 3:1 and was deposited onto mesh-stacked electrodes. When the CO gas sensor was introduced, the sample was tested and verified inside a CO gas chamber using a magnetic field generator composed of solenoidal coils. According to a careful investigation of the measurement results, the highest sensitivity, 1.73{\%}/ppm, was obtained under 12 G in a horizontal magnetic field, indicating that the mechanism is applicable for use in an ultralow power chemical microsensor with high sensitivity.",
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Research on a highly sensitive magnetic-catalytic CMOS-MEMS compatible gas sensor. / Shen, Chih Hsiung; Ke, Shi Ching.

In: IEEE Electron Device Letters, Vol. 35, No. 1, 6679259, 01.01.2014, p. 120-122.

Research output: Contribution to journalArticle

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