Real time monitoring of thickness of silicon membrane during wet etching using a novel surface acoustic wave sensor

Chi Yuan Lee, Tsung Tsong Wu, Yung Yu Chen, Ying Chou Cheng, Wen Jong Chen, Shih Yung Pao, Pei Zen Chang, Ping Hei Chen, Kai Hsiang Yen, Fu Yuan Xiao

Research output: Contribution to journalConference article

1 Citation (Scopus)

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Mathematics

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