Practical photoluminescence and photoreflectance spectroscopic system for optical characterization of semiconductor devices

Ching Hwa Ho, Kuo Wei Huang, Yu Shyan Lin, Der Yuh Lin

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8 Citations (Scopus)

Abstract

We present a practical experimental design for performing photoluminescence (PL) and photoreflectance (PR) measurements of semiconductors with only one PL spectroscopic system. The measurement setup is more cost efficient than typical PL-plus-PR systems. The design of the ex-perimental setup of the PL-PR system is described in detail. Measurements of two actual device structures, a high-electron-mobility transistor (HEMT) and a double heterojunction-bipolar transistor (DHBT), are carried out by using this design. The experimental PL and PR spectra of the HEMT device, as well as polarized-photoreflectance (PPR) spectra of the DHBT structure, are analyzed in detailed and discussed. The experimental analyses demonstrate the well-behaved performance of this PL-PR design.

Original languageEnglish
Pages (from-to)3951-3960
Number of pages10
JournalOptics Express
Volume13
Issue number11
DOIs
Publication statusPublished - 2005 May 30

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All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics

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