Post-annealing induced formation of zno nanowires on the zno films in the n20 ambient

Ping Yuan Lin, Wei Tsai Liao, Kuo Yi Yan, Chia Chi Chang, Hsin Yuen Lin, Cheng Liang Wang, Jyh Rong Gong, Dong Yuan Lyu, Jian Hao Lin, Tai Yuan Lin, Hung Ji Lin, Der-Yuh Lin

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

ZnO films were grown on (0001) sapphire substrates by atomic layer deposition (ALD) using diethylzinc (DEZn) and nitrous oxide (N 20 ) in an inductively heated reactor operated at atmospheric pressure. Low-temperature (LT) ZnO buffer layers having various thicknesses were deposited at 400 followed by subsequent growth of ZnO films at 600. Some of the ZnO films were then post-annealed at 1000 in the N 2 0 flow. Under certain growth conditions, ZnO nanowires were formed on the post-annealed ZnO samples. Room temperature (RT) photoluminescence (PL) spectra of the ZnO nanowires show strong ultraviolet (UV) near band edge emissions at 3.27 eV with a typical full width at half-maximum (FWHM) of -430 meV and quenched defect luminescence. 10 K PL spectra of the post-annealed ZnO all exhibit sharp excitonic emissions with the dominant emission being located at 3.36 eV having a FWHM of 4.6 meV.

Original languageEnglish
Title of host publicationMaterials Research Society Symposium Proceedings - Low-Dimensional Materials- Synthesis, Assembly, Property Scaling, and Modeling
Pages145-150
Number of pages6
Publication statusPublished - 2007 Dec 1
EventLow-Dimensional Materials- Synthesis, Assembly, Property Scaling, and Modeling - 2007 MRS Spring Meeting - San Francisco, CA, United States
Duration: 2007 Apr 92007 Apr 13

Publication series

NameMaterials Research Society Symposium Proceedings
Volume1017
ISSN (Print)0272-9172

Other

OtherLow-Dimensional Materials- Synthesis, Assembly, Property Scaling, and Modeling - 2007 MRS Spring Meeting
CountryUnited States
CitySan Francisco, CA
Period07-04-0907-04-13

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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