Polymer-based photonic crystals fabricated with single-step electron-beam lithography

Cen Shawn Wu, Chih Fu Lin, Hung Yi Lin, Cho Lun Lee, Chii Dong Chen

Research output: Contribution to journalArticlepeer-review

26 Citations (Scopus)


A new method to fabricate polymer-based suspended quasi-3D photonic slabs and 3D photonic crystals (PC) with single-step electron-beam lithography (EBL) was demonstrated. The suspended bilayer polymer structures are made on virtually any kind of substrate while the suspended PC slab exhibits simultaneously a band gap for both transverse electric (TE)-like modes and transverse magnetic (TM)-line modes at a 1.3μm wavelength. The difference in color of the scattered light between the PC samples is due to PC band gap. The transmission spectrum for PC samples with a hole radius of 50 nm shows no particular absorption band, which demonstrates the applicability of polymer suspended PC slabs as quasi-3D PCs in the visible spectrum. The multilayer pillar structure of PCs have tetragonal lattice symmetry while the 3D pillars are constructed by filling the air gap using the multilayer polymer structure as a mold.

Original languageEnglish
Pages (from-to)3052-3056
Number of pages5
JournalAdvanced Materials
Issue number19
Publication statusPublished - 2007 Oct 5

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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