Planarization, Fabrication, and Characterization of Three-Dimensional Magnetic Field Sensors

Van Su Luong, Yu Hsin Su, Chih Cheng Lu, Jen Tzong Jeng, Jen Hwa Hsu, Ming Han Liao, Jong-Ching Wu, Meng Huang Lai, Ching Ray Chang

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

Nanomagnetism deals with magnetic phenomena in nanoscale structures, involving processes at the atomic level. Magnetic sensors, which exhibit the surprising giant magnetoresistance (GMR) effect, are some of the first real applications of nanotechnology, and have become very important in the last two decades. In addition, high-performance magnetoresistance (MR) measurement is a critical technique in modern electrical applications, including electronic compasses, aviation navigation, motion tracking, noncontact current sensing, rotation sensing, and vehicle detection. Both GMR and tunneling magnetoresistance (TMR) sensors have been used in the state-of-art electronic compasses. A new planar design layout of a vector magnetometer is proposed in this report. It can sense variations in three-dimensional (3-D) magnetic fields. The planarization of a vector magnetometer is carried out with consideration of materials, magnetic schematics, as well as transducer circuit designs. The optimization of an advanced magnetic material for use in GMR and TMR sensors and its planarization in a 3-D design are crucial practical issues. This paper presents an overview of the planarization of vector magnetometers and the development of its applications. It focuses on recent works, covers an analytic model of magnetoresistive sensors, and methods of thin film fabrication. It also addresses the planar vector magnetometer with a flux-guide, the chopping technique, and techniques for microfabrication of substrates. Planarization in magnetic sensors will become increasingly exploited as nanomagnetism grows in importance.

Original languageEnglish
Article number7835300
Pages (from-to)11-25
Number of pages15
JournalIEEE Transactions on Nanotechnology
Volume17
Issue number1
DOIs
Publication statusPublished - 2018 Jan 1

Fingerprint

Magnetometers
Giant magnetoresistance
Tunnelling magnetoresistance
Magnetic fields
Fabrication
Magnetic sensors
Magnetic materials
Sensors
Microfabrication
Schematic diagrams
Magnetoresistance
Nanotechnology
Aviation
Transducers
Navigation
Fluxes
Thin films
Networks (circuits)
Substrates

All Science Journal Classification (ASJC) codes

  • Computer Science Applications
  • Electrical and Electronic Engineering

Cite this

Luong, V. S., Su, Y. H., Lu, C. C., Jeng, J. T., Hsu, J. H., Liao, M. H., ... Chang, C. R. (2018). Planarization, Fabrication, and Characterization of Three-Dimensional Magnetic Field Sensors. IEEE Transactions on Nanotechnology, 17(1), 11-25. [7835300]. https://doi.org/10.1109/TNANO.2017.2660062
Luong, Van Su ; Su, Yu Hsin ; Lu, Chih Cheng ; Jeng, Jen Tzong ; Hsu, Jen Hwa ; Liao, Ming Han ; Wu, Jong-Ching ; Lai, Meng Huang ; Chang, Ching Ray. / Planarization, Fabrication, and Characterization of Three-Dimensional Magnetic Field Sensors. In: IEEE Transactions on Nanotechnology. 2018 ; Vol. 17, No. 1. pp. 11-25.
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Luong, VS, Su, YH, Lu, CC, Jeng, JT, Hsu, JH, Liao, MH, Wu, J-C, Lai, MH & Chang, CR 2018, 'Planarization, Fabrication, and Characterization of Three-Dimensional Magnetic Field Sensors', IEEE Transactions on Nanotechnology, vol. 17, no. 1, 7835300, pp. 11-25. https://doi.org/10.1109/TNANO.2017.2660062

Planarization, Fabrication, and Characterization of Three-Dimensional Magnetic Field Sensors. / Luong, Van Su; Su, Yu Hsin; Lu, Chih Cheng; Jeng, Jen Tzong; Hsu, Jen Hwa; Liao, Ming Han; Wu, Jong-Ching; Lai, Meng Huang; Chang, Ching Ray.

In: IEEE Transactions on Nanotechnology, Vol. 17, No. 1, 7835300, 01.01.2018, p. 11-25.

Research output: Contribution to journalArticle

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AU - Lai, Meng Huang

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