Abstract
Nanomagnetism deals with magnetic phenomena in nanoscale structures, involving processes at the atomic level. Magnetic sensors, which exhibit the surprising giant magnetoresistance (GMR) effect, are some of the first real applications of nanotechnology, and have become very important in the last two decades. In addition, high-performance magnetoresistance (MR) measurement is a critical technique in modern electrical applications, including electronic compasses, aviation navigation, motion tracking, noncontact current sensing, rotation sensing, and vehicle detection. Both GMR and tunneling magnetoresistance (TMR) sensors have been used in the state-of-art electronic compasses. A new planar design layout of a vector magnetometer is proposed in this report. It can sense variations in three-dimensional (3-D) magnetic fields. The planarization of a vector magnetometer is carried out with consideration of materials, magnetic schematics, as well as transducer circuit designs. The optimization of an advanced magnetic material for use in GMR and TMR sensors and its planarization in a 3-D design are crucial practical issues. This paper presents an overview of the planarization of vector magnetometers and the development of its applications. It focuses on recent works, covers an analytic model of magnetoresistive sensors, and methods of thin film fabrication. It also addresses the planar vector magnetometer with a flux-guide, the chopping technique, and techniques for microfabrication of substrates. Planarization in magnetic sensors will become increasingly exploited as nanomagnetism grows in importance.
| Original language | English |
|---|---|
| Article number | 7835300 |
| Pages (from-to) | 11-25 |
| Number of pages | 15 |
| Journal | IEEE Transactions on Nanotechnology |
| Volume | 17 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 2018 Jan 1 |
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All Science Journal Classification (ASJC) codes
- Computer Science Applications
- Electrical and Electronic Engineering
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Planarization, Fabrication, and Characterization of Three-Dimensional Magnetic Field Sensors. / Luong, Van Su; Su, Yu Hsin; Lu, Chih Cheng; Jeng, Jen Tzong; Hsu, Jen Hwa; Liao, Ming Han; Wu, Jong-Ching; Lai, Meng Huang; Chang, Ching Ray.
In: IEEE Transactions on Nanotechnology, Vol. 17, No. 1, 7835300, 01.01.2018, p. 11-25.Research output: Contribution to journal › Article
TY - JOUR
T1 - Planarization, Fabrication, and Characterization of Three-Dimensional Magnetic Field Sensors
AU - Luong, Van Su
AU - Su, Yu Hsin
AU - Lu, Chih Cheng
AU - Jeng, Jen Tzong
AU - Hsu, Jen Hwa
AU - Liao, Ming Han
AU - Wu, Jong-Ching
AU - Lai, Meng Huang
AU - Chang, Ching Ray
PY - 2018/1/1
Y1 - 2018/1/1
N2 - Nanomagnetism deals with magnetic phenomena in nanoscale structures, involving processes at the atomic level. Magnetic sensors, which exhibit the surprising giant magnetoresistance (GMR) effect, are some of the first real applications of nanotechnology, and have become very important in the last two decades. In addition, high-performance magnetoresistance (MR) measurement is a critical technique in modern electrical applications, including electronic compasses, aviation navigation, motion tracking, noncontact current sensing, rotation sensing, and vehicle detection. Both GMR and tunneling magnetoresistance (TMR) sensors have been used in the state-of-art electronic compasses. A new planar design layout of a vector magnetometer is proposed in this report. It can sense variations in three-dimensional (3-D) magnetic fields. The planarization of a vector magnetometer is carried out with consideration of materials, magnetic schematics, as well as transducer circuit designs. The optimization of an advanced magnetic material for use in GMR and TMR sensors and its planarization in a 3-D design are crucial practical issues. This paper presents an overview of the planarization of vector magnetometers and the development of its applications. It focuses on recent works, covers an analytic model of magnetoresistive sensors, and methods of thin film fabrication. It also addresses the planar vector magnetometer with a flux-guide, the chopping technique, and techniques for microfabrication of substrates. Planarization in magnetic sensors will become increasingly exploited as nanomagnetism grows in importance.
AB - Nanomagnetism deals with magnetic phenomena in nanoscale structures, involving processes at the atomic level. Magnetic sensors, which exhibit the surprising giant magnetoresistance (GMR) effect, are some of the first real applications of nanotechnology, and have become very important in the last two decades. In addition, high-performance magnetoresistance (MR) measurement is a critical technique in modern electrical applications, including electronic compasses, aviation navigation, motion tracking, noncontact current sensing, rotation sensing, and vehicle detection. Both GMR and tunneling magnetoresistance (TMR) sensors have been used in the state-of-art electronic compasses. A new planar design layout of a vector magnetometer is proposed in this report. It can sense variations in three-dimensional (3-D) magnetic fields. The planarization of a vector magnetometer is carried out with consideration of materials, magnetic schematics, as well as transducer circuit designs. The optimization of an advanced magnetic material for use in GMR and TMR sensors and its planarization in a 3-D design are crucial practical issues. This paper presents an overview of the planarization of vector magnetometers and the development of its applications. It focuses on recent works, covers an analytic model of magnetoresistive sensors, and methods of thin film fabrication. It also addresses the planar vector magnetometer with a flux-guide, the chopping technique, and techniques for microfabrication of substrates. Planarization in magnetic sensors will become increasingly exploited as nanomagnetism grows in importance.
UR - http://www.scopus.com/inward/record.url?scp=85040738271&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85040738271&partnerID=8YFLogxK
U2 - 10.1109/TNANO.2017.2660062
DO - 10.1109/TNANO.2017.2660062
M3 - Article
AN - SCOPUS:85040738271
VL - 17
SP - 11
EP - 25
JO - IEEE Transactions on Nanotechnology
JF - IEEE Transactions on Nanotechnology
SN - 1536-125X
IS - 1
M1 - 7835300
ER -