TY - JOUR
T1 - Phase-sensitive total-internal-reflection sensing system for measuring vacuum pressure
AU - Chiang, Ken Huan
AU - Hsieh, Meng Chang
AU - Lin, Jiun You
N1 - Funding Information:
The authors would like to thank the Ministry of Science and Technology , R. O. C, for financially supporting this research under Contract No. 102-2221-E-018-02 .
PY - 2019/7
Y1 - 2019/7
N2 - Based on the principle of Chiu et al., this work proposes a phase-sensitive total-internal-reflection (TIR) sensing system for measuring vacuum pressure. In the system, linearly polarized light propagates through a specially-designed phase-sensitive TIR apparatus composed of a wave-plate type phase shifter, an isosceles right-angle prism combined with a vacuum cavity, and an analyzer. Under the suitable axis azimuth of the wave plates and the analyzer, it can raise the phase difference of the s- and p- polarization states of the totally-reflected light beam from the TIR apparatus. The raised phase difference is related to the vacuum pressure; therefore the pressure is easily and accurately determinable with measuring the phase difference variation using the heterodyne phase-detection technique. The experimental results demonstrated the feasibility of this method. Measurement resolution and sensitivity levels superior to 0.4 torr and 0.02°/torr were respectively attainable in measurement region of 10 torr to 760 torr.
AB - Based on the principle of Chiu et al., this work proposes a phase-sensitive total-internal-reflection (TIR) sensing system for measuring vacuum pressure. In the system, linearly polarized light propagates through a specially-designed phase-sensitive TIR apparatus composed of a wave-plate type phase shifter, an isosceles right-angle prism combined with a vacuum cavity, and an analyzer. Under the suitable axis azimuth of the wave plates and the analyzer, it can raise the phase difference of the s- and p- polarization states of the totally-reflected light beam from the TIR apparatus. The raised phase difference is related to the vacuum pressure; therefore the pressure is easily and accurately determinable with measuring the phase difference variation using the heterodyne phase-detection technique. The experimental results demonstrated the feasibility of this method. Measurement resolution and sensitivity levels superior to 0.4 torr and 0.02°/torr were respectively attainable in measurement region of 10 torr to 760 torr.
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U2 - 10.1016/j.optlastec.2019.02.060
DO - 10.1016/j.optlastec.2019.02.060
M3 - Article
AN - SCOPUS:85062518653
VL - 115
SP - 508
EP - 513
JO - Optics and Laser Technology
JF - Optics and Laser Technology
SN - 0030-3992
ER -