Abstract
Based on the principle of Chiu et al., this work proposes a phase-sensitive total-internal-reflection (TIR) sensing system for measuring vacuum pressure. In the system, linearly polarized light propagates through a specially-designed phase-sensitive TIR apparatus composed of a wave-plate type phase shifter, an isosceles right-angle prism combined with a vacuum cavity, and an analyzer. Under the suitable axis azimuth of the wave plates and the analyzer, it can raise the phase difference of the s- and p- polarization states of the totally-reflected light beam from the TIR apparatus. The raised phase difference is related to the vacuum pressure; therefore the pressure is easily and accurately determinable with measuring the phase difference variation using the heterodyne phase-detection technique. The experimental results demonstrated the feasibility of this method. Measurement resolution and sensitivity levels superior to 0.4 torr and 0.02°/torr were respectively attainable in measurement region of 10 torr to 760 torr.
| Original language | English |
|---|---|
| Pages (from-to) | 508-513 |
| Number of pages | 6 |
| Journal | Optics and Laser Technology |
| Volume | 115 |
| DOIs | |
| Publication status | Published - 2019 Jul 1 |
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All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Electrical and Electronic Engineering
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Phase-sensitive total-internal-reflection sensing system for measuring vacuum pressure. / Chiang, Ken Huan; Hsieh, Meng Chang; Lin, Jiun-You.
In: Optics and Laser Technology, Vol. 115, 01.07.2019, p. 508-513.Research output: Contribution to journal › Article
TY - JOUR
T1 - Phase-sensitive total-internal-reflection sensing system for measuring vacuum pressure
AU - Chiang, Ken Huan
AU - Hsieh, Meng Chang
AU - Lin, Jiun-You
PY - 2019/7/1
Y1 - 2019/7/1
N2 - Based on the principle of Chiu et al., this work proposes a phase-sensitive total-internal-reflection (TIR) sensing system for measuring vacuum pressure. In the system, linearly polarized light propagates through a specially-designed phase-sensitive TIR apparatus composed of a wave-plate type phase shifter, an isosceles right-angle prism combined with a vacuum cavity, and an analyzer. Under the suitable axis azimuth of the wave plates and the analyzer, it can raise the phase difference of the s- and p- polarization states of the totally-reflected light beam from the TIR apparatus. The raised phase difference is related to the vacuum pressure; therefore the pressure is easily and accurately determinable with measuring the phase difference variation using the heterodyne phase-detection technique. The experimental results demonstrated the feasibility of this method. Measurement resolution and sensitivity levels superior to 0.4 torr and 0.02°/torr were respectively attainable in measurement region of 10 torr to 760 torr.
AB - Based on the principle of Chiu et al., this work proposes a phase-sensitive total-internal-reflection (TIR) sensing system for measuring vacuum pressure. In the system, linearly polarized light propagates through a specially-designed phase-sensitive TIR apparatus composed of a wave-plate type phase shifter, an isosceles right-angle prism combined with a vacuum cavity, and an analyzer. Under the suitable axis azimuth of the wave plates and the analyzer, it can raise the phase difference of the s- and p- polarization states of the totally-reflected light beam from the TIR apparatus. The raised phase difference is related to the vacuum pressure; therefore the pressure is easily and accurately determinable with measuring the phase difference variation using the heterodyne phase-detection technique. The experimental results demonstrated the feasibility of this method. Measurement resolution and sensitivity levels superior to 0.4 torr and 0.02°/torr were respectively attainable in measurement region of 10 torr to 760 torr.
UR - http://www.scopus.com/inward/record.url?scp=85062518653&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85062518653&partnerID=8YFLogxK
U2 - 10.1016/j.optlastec.2019.02.060
DO - 10.1016/j.optlastec.2019.02.060
M3 - Article
AN - SCOPUS:85062518653
VL - 115
SP - 508
EP - 513
JO - Optics and Laser Technology
JF - Optics and Laser Technology
SN - 0030-3992
ER -