Periodic Flux Interruption and Sustained Two-Dimensional Growth for Molecular Beam Epitaxy

C. P. Lee, K. H. Chang, D. G. Liu, J. S. Wu

Research output: Contribution to journalArticle

2 Citations (Scopus)


Periodic interruption of Ga flux during MBE growth of GaAs has been used to achieve sustained two-dimensional layer-by-layer growth. RHEED intensity oscillation for extended growth shows no degradation in the oscillation amplitude, indicating an atomically smooth growth front throughout the growth.

Original languageEnglish
Pages (from-to)1659-1660
Number of pages2
JournalElectronics Letters
Issue number24
Publication statusPublished - 1989 Sep 1


All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

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