Parameters optimization of laser electrode patterning on ITO/glass using multi-performance characteristics analysis

Chih Chung Yang, Wen Tse Hsiao, Chien Kai Chung, Shih Feng Tseng, Kuo Cheng Huang, Ming Fei Chen

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The objective of this study was to obtain the optimal parameters for laser electrode patterning of indium-tinoxide (ITO) films coated on soda lime glass substrates; the parameters were determined through grey relational analysis. The electrode patterning parameters affecting the sheet resistance and optical transmittance of the film include the laser power, pulse repetition frequency, pulse duration, and focus point position. Multiple performance characteristics associated with the sheet resistance and optical transmittance were investigated by conducting experiments. An infrared (1064 nm) laser system was used to directly fabricate electrode patterns on ITO films, and the characteristics of the patterned films were systematically analyzed using an ultraviolet-visible-near-infrared spectrophotometer and a four-point probe instrument. The data obtained from the experiments were analyzed to optimize the laser patterning parameters correlated with multiple performance characteristics.

Original languageEnglish
Title of host publicationProceedings - 2016 IEEE International Conference on Industrial Technology, ICIT 2016
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1818-1822
Number of pages5
ISBN (Electronic)9781467380751
DOIs
Publication statusPublished - 2016 May 19
EventIEEE International Conference on Industrial Technology, ICIT 2016 - Taipei, Taiwan
Duration: 2016 Mar 142016 Mar 17

Publication series

NameProceedings of the IEEE International Conference on Industrial Technology
Volume2016-May

Other

OtherIEEE International Conference on Industrial Technology, ICIT 2016
CountryTaiwan
CityTaipei
Period16-03-1416-03-17

Fingerprint

Indium
Glass
Electrodes
Lasers
Sheet resistance
Opacity
Laser pulses
Infrared spectrophotometers
Lime
Experiments
Infrared radiation
Substrates

All Science Journal Classification (ASJC) codes

  • Computer Science Applications
  • Electrical and Electronic Engineering

Cite this

Yang, C. C., Hsiao, W. T., Chung, C. K., Tseng, S. F., Huang, K. C., & Chen, M. F. (2016). Parameters optimization of laser electrode patterning on ITO/glass using multi-performance characteristics analysis. In Proceedings - 2016 IEEE International Conference on Industrial Technology, ICIT 2016 (pp. 1818-1822). [7475040] (Proceedings of the IEEE International Conference on Industrial Technology; Vol. 2016-May). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ICIT.2016.7475040
Yang, Chih Chung ; Hsiao, Wen Tse ; Chung, Chien Kai ; Tseng, Shih Feng ; Huang, Kuo Cheng ; Chen, Ming Fei. / Parameters optimization of laser electrode patterning on ITO/glass using multi-performance characteristics analysis. Proceedings - 2016 IEEE International Conference on Industrial Technology, ICIT 2016. Institute of Electrical and Electronics Engineers Inc., 2016. pp. 1818-1822 (Proceedings of the IEEE International Conference on Industrial Technology).
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abstract = "The objective of this study was to obtain the optimal parameters for laser electrode patterning of indium-tinoxide (ITO) films coated on soda lime glass substrates; the parameters were determined through grey relational analysis. The electrode patterning parameters affecting the sheet resistance and optical transmittance of the film include the laser power, pulse repetition frequency, pulse duration, and focus point position. Multiple performance characteristics associated with the sheet resistance and optical transmittance were investigated by conducting experiments. An infrared (1064 nm) laser system was used to directly fabricate electrode patterns on ITO films, and the characteristics of the patterned films were systematically analyzed using an ultraviolet-visible-near-infrared spectrophotometer and a four-point probe instrument. The data obtained from the experiments were analyzed to optimize the laser patterning parameters correlated with multiple performance characteristics.",
author = "Yang, {Chih Chung} and Hsiao, {Wen Tse} and Chung, {Chien Kai} and Tseng, {Shih Feng} and Huang, {Kuo Cheng} and Chen, {Ming Fei}",
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language = "English",
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Yang, CC, Hsiao, WT, Chung, CK, Tseng, SF, Huang, KC & Chen, MF 2016, Parameters optimization of laser electrode patterning on ITO/glass using multi-performance characteristics analysis. in Proceedings - 2016 IEEE International Conference on Industrial Technology, ICIT 2016., 7475040, Proceedings of the IEEE International Conference on Industrial Technology, vol. 2016-May, Institute of Electrical and Electronics Engineers Inc., pp. 1818-1822, IEEE International Conference on Industrial Technology, ICIT 2016, Taipei, Taiwan, 16-03-14. https://doi.org/10.1109/ICIT.2016.7475040

Parameters optimization of laser electrode patterning on ITO/glass using multi-performance characteristics analysis. / Yang, Chih Chung; Hsiao, Wen Tse; Chung, Chien Kai; Tseng, Shih Feng; Huang, Kuo Cheng; Chen, Ming Fei.

Proceedings - 2016 IEEE International Conference on Industrial Technology, ICIT 2016. Institute of Electrical and Electronics Engineers Inc., 2016. p. 1818-1822 7475040 (Proceedings of the IEEE International Conference on Industrial Technology; Vol. 2016-May).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Yang CC, Hsiao WT, Chung CK, Tseng SF, Huang KC, Chen MF. Parameters optimization of laser electrode patterning on ITO/glass using multi-performance characteristics analysis. In Proceedings - 2016 IEEE International Conference on Industrial Technology, ICIT 2016. Institute of Electrical and Electronics Engineers Inc. 2016. p. 1818-1822. 7475040. (Proceedings of the IEEE International Conference on Industrial Technology). https://doi.org/10.1109/ICIT.2016.7475040