Parameter investigation of nano-sized etching in an ICP silicon etching system

S. C. Chen, C. Y. Kuo, Y. C. Lin, J. C. Wu, L. Horng

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Fingerprint Dive into the research topics of 'Parameter investigation of nano-sized etching in an ICP silicon etching system'. Together they form a unique fingerprint.

Engineering & Materials Science