Optical strain sensor based on diffraction grating and surface plasmon resonance heterodyne interferometer

Jiun You Lin, Jing Heng Chen, Kun Huang Chen

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)


We designed an optical sensor for measuring a tensile strain by using a diffraction grating and a surface plasmon resonance (SPR) interferometer, and analyzed the periodic nonlinearity effect and the thermal effects in the sensor. As a heterodyne light beam strikes a grating, the +1st order diffraction beam generates and then enters into a SPR apparatus at the resonance angle. A tensile force applied to the grating will introduce a significant phase-difference variation between p- and s-polarizations of the light emerging from SPR apparatus. The variation used to determine the strain can be precisely measured with heterodyne interferometric technique. The feasibility of our method was demonstrated with a measurement resolution of 0.52 mε and a sensitivity of 0.58°/mε in a dynamic range of 10 mε. The sensor provides the advantages of low temperature sensitivity, high stability against air fluctuation, a simple structure, rapid measurement, and straightforward operation.

Original languageEnglish
Pages (from-to)233-237
Number of pages5
JournalSensors and Actuators, A: Physical
Publication statusPublished - 2013 Feb 25

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

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