Optical relative humidity sensor based on a polyvinyl alcohol film and a phase-enhancement total-internal-reflection heterodyne interferometer

Meng Chang Hsieh; Chien Heng Liao; Jiun You Lin

doi:10.1016/j.sna.2020.112412

Optical relative humidity sensor based on a polyvinyl alcohol film and a phase-enhancement total-internal-reflection heterodyne interferometer

Meng Chang Hsieh, Chien Heng Liao, Jiun You Lin

Department of Mechatronic Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

This study presents an optical relative humidity (RH) sensor based on the hydrophilic feature of a polyvinyl alcohol (PVA) film and a phase-enhancement total-internal-reflection (TIR) heterodyne interferometer. The sensor operation is based on the interaction of a TIR evanescent wave with a PVA film coated on the base of a phase-enhancement TIR apparatus. Relative humidity influences the PVA refractive index, thus bringing a significant variation in the phase difference between the s- and p- polarized states of a beam completely reflected from the TIR apparatus. The phase difference variation can be obtained using heterodyne interferometric technique, and the relative humidity measurement therefore is realized. In this study, the sensor produced measurement sensitivity and resolution superior to 0.49°/% RH and 0.5% RH in the range of 30%–75% RH.

Original language	English
Article number	112412
Journal	Sensors and Actuators, A: Physical
Volume	316
DOIs	https://doi.org/10.1016/j.sna.2020.112412
Publication status	Published - 2020 Dec 1

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering

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title = "Optical relative humidity sensor based on a polyvinyl alcohol film and a phase-enhancement total-internal-reflection heterodyne interferometer",

abstract = "This study presents an optical relative humidity (RH) sensor based on the hydrophilic feature of a polyvinyl alcohol (PVA) film and a phase-enhancement total-internal-reflection (TIR) heterodyne interferometer. The sensor operation is based on the interaction of a TIR evanescent wave with a PVA film coated on the base of a phase-enhancement TIR apparatus. Relative humidity influences the PVA refractive index, thus bringing a significant variation in the phase difference between the s- and p- polarized states of a beam completely reflected from the TIR apparatus. The phase difference variation can be obtained using heterodyne interferometric technique, and the relative humidity measurement therefore is realized. In this study, the sensor produced measurement sensitivity and resolution superior to 0.49°/% RH and 0.5% RH in the range of 30%–75% RH.",

author = "Hsieh, {Meng Chang} and Liao, {Chien Heng} and Lin, {Jiun You}",

note = "Funding Information: The research was partially supported by Ministry of Science and Technology, Taiwan, R. O. C. under Contract No. 109-2221-E-018-020. ",

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AU - Hsieh, Meng Chang

AU - Liao, Chien Heng

AU - Lin, Jiun You

N1 - Funding Information: The research was partially supported by Ministry of Science and Technology, Taiwan, R. O. C. under Contract No. 109-2221-E-018-020.

PY - 2020/12/1

Y1 - 2020/12/1

N2 - This study presents an optical relative humidity (RH) sensor based on the hydrophilic feature of a polyvinyl alcohol (PVA) film and a phase-enhancement total-internal-reflection (TIR) heterodyne interferometer. The sensor operation is based on the interaction of a TIR evanescent wave with a PVA film coated on the base of a phase-enhancement TIR apparatus. Relative humidity influences the PVA refractive index, thus bringing a significant variation in the phase difference between the s- and p- polarized states of a beam completely reflected from the TIR apparatus. The phase difference variation can be obtained using heterodyne interferometric technique, and the relative humidity measurement therefore is realized. In this study, the sensor produced measurement sensitivity and resolution superior to 0.49°/% RH and 0.5% RH in the range of 30%–75% RH.

AB - This study presents an optical relative humidity (RH) sensor based on the hydrophilic feature of a polyvinyl alcohol (PVA) film and a phase-enhancement total-internal-reflection (TIR) heterodyne interferometer. The sensor operation is based on the interaction of a TIR evanescent wave with a PVA film coated on the base of a phase-enhancement TIR apparatus. Relative humidity influences the PVA refractive index, thus bringing a significant variation in the phase difference between the s- and p- polarized states of a beam completely reflected from the TIR apparatus. The phase difference variation can be obtained using heterodyne interferometric technique, and the relative humidity measurement therefore is realized. In this study, the sensor produced measurement sensitivity and resolution superior to 0.49°/% RH and 0.5% RH in the range of 30%–75% RH.

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