Optical relative humidity sensor based on a polyvinyl alcohol film and a phase-enhancement total-internal-reflection heterodyne interferometer

Meng Chang Hsieh, Chien Heng Liao, Jiun You Lin

Research output: Contribution to journalArticlepeer-review

Abstract

This study presents an optical relative humidity (RH) sensor based on the hydrophilic feature of a polyvinyl alcohol (PVA) film and a phase-enhancement total-internal-reflection (TIR) heterodyne interferometer. The sensor operation is based on the interaction of a TIR evanescent wave with a PVA film coated on the base of a phase-enhancement TIR apparatus. Relative humidity influences the PVA refractive index, thus bringing a significant variation in the phase difference between the s- and p- polarized states of a beam completely reflected from the TIR apparatus. The phase difference variation can be obtained using heterodyne interferometric technique, and the relative humidity measurement therefore is realized. In this study, the sensor produced measurement sensitivity and resolution superior to 0.49°/% RH and 0.5% RH in the range of 30%–75% RH.

Original languageEnglish
Article number112412
JournalSensors and Actuators, A: Physical
Volume316
DOIs
Publication statusPublished - 2020 Dec 1

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

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