Optical design and signal processing for a microcrack detection system

Wen-Ren Yang, Yu Lin Li

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper presents optical design, proof-of-principle experiments, and post-signal processing for a wafer microcrack detection system. Cylindrical lens and Solid Immersion Lens (SIL) are used for the optical module. Near-field probe array is also investigated for future implementation. For post-signal processing, Probabilistic Neural Network (PNN) is used in order to identify vibration-induced deviation. Derived Short-Time Discrete Wavelet Transform (STDWT) is developed in order to identify microcrack.

Original languageEnglish
Title of host publicationProceedings of the 2010 5th IEEE Conference on Industrial Electronics and Applications, ICIEA 2010
Pages1780-1785
Number of pages6
DOIs
Publication statusPublished - 2010 Sep 1
Event5th IEEE Conference on Industrial Electronics and Applications, ICIEA 2010 - Taichung, Taiwan
Duration: 2010 Jun 152010 Jun 17

Publication series

NameProceedings of the 2010 5th IEEE Conference on Industrial Electronics and Applications, ICIEA 2010

Other

Other5th IEEE Conference on Industrial Electronics and Applications, ICIEA 2010
CountryTaiwan
CityTaichung
Period10-06-1510-06-17

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

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  • Cite this

    Yang, W-R., & Li, Y. L. (2010). Optical design and signal processing for a microcrack detection system. In Proceedings of the 2010 5th IEEE Conference on Industrial Electronics and Applications, ICIEA 2010 (pp. 1780-1785). [5515329] (Proceedings of the 2010 5th IEEE Conference on Industrial Electronics and Applications, ICIEA 2010). https://doi.org/10.1109/ICIEA.2010.5515329