Numerical investigation into nonlinear dynamic behavior of electrically-actuated clamped-clamped micro-beam with squeeze-film damping effect

Chin-Chia Liu, Cheng Chi Wang

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10 Citations (Scopus)

Abstract

A numerical investigation is performed into the nonlinear dynamic behavior of a clamped-clamped micro-beam actuated by a combined DC/AC voltage and subject to a squeeze-film damping effect. An analytical model based on a nonlinear deflection equation and a linearized Reynolds equation is proposed to describe the deflection of the micro-beam under the effects of the electrostatic actuating force. The deflection of the micro-beam is investigated under various actuating conditions by solving the analytical model using a hybrid numerical scheme comprising the differential transformation method and the finite difference approximation method. It is shown that the numerical results for the dynamic pull-in voltage of the clamped-clamped micro-beam deviate by no more than 2.04% from those presented in the literature based on the conventional finite difference scheme. The effects of the AC voltage amplitude, excitation frequency, residual stress, and ambient pressure on the center-point displacement of the micro-beam are systematically explored. Moreover, the actuation conditions which ensure the stability of the micro-beam are identified by means of phase portraits. Overall, the results presented in this study confirm that the hybrid numerical method provides an accurate means of analyzing the complex nonlinear behavior of common electrostatically-actuated microstructures.

Original languageEnglish
Pages (from-to)3269-3280
Number of pages12
JournalApplied Mathematical Modelling
Volume38
Issue number13
DOIs
Publication statusPublished - 2014 Jul 1

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Numerical Investigation
Dynamic Behavior
Nonlinear Dynamics
Damping
Analytical models
Electric potential
Deflection
Reynolds equation
Electrostatic force
Voltage
Analytical Model
Residual stresses
Numerical methods
Differential Transformation Method
Electrostatic Force
Microstructure
Reynolds Equation
Finite Difference Approximation
Phase Portrait
Residual Stress

All Science Journal Classification (ASJC) codes

  • Modelling and Simulation
  • Applied Mathematics

Cite this

@article{5cd17b0b749d41a3b4d5ca223b32b883,
title = "Numerical investigation into nonlinear dynamic behavior of electrically-actuated clamped-clamped micro-beam with squeeze-film damping effect",
abstract = "A numerical investigation is performed into the nonlinear dynamic behavior of a clamped-clamped micro-beam actuated by a combined DC/AC voltage and subject to a squeeze-film damping effect. An analytical model based on a nonlinear deflection equation and a linearized Reynolds equation is proposed to describe the deflection of the micro-beam under the effects of the electrostatic actuating force. The deflection of the micro-beam is investigated under various actuating conditions by solving the analytical model using a hybrid numerical scheme comprising the differential transformation method and the finite difference approximation method. It is shown that the numerical results for the dynamic pull-in voltage of the clamped-clamped micro-beam deviate by no more than 2.04{\%} from those presented in the literature based on the conventional finite difference scheme. The effects of the AC voltage amplitude, excitation frequency, residual stress, and ambient pressure on the center-point displacement of the micro-beam are systematically explored. Moreover, the actuation conditions which ensure the stability of the micro-beam are identified by means of phase portraits. Overall, the results presented in this study confirm that the hybrid numerical method provides an accurate means of analyzing the complex nonlinear behavior of common electrostatically-actuated microstructures.",
author = "Chin-Chia Liu and Wang, {Cheng Chi}",
year = "2014",
month = "7",
day = "1",
doi = "10.1016/j.apm.2013.11.048",
language = "English",
volume = "38",
pages = "3269--3280",
journal = "Applied Mathematical Modelling",
issn = "0307-904X",
publisher = "Elsevier Inc.",
number = "13",

}

TY - JOUR

T1 - Numerical investigation into nonlinear dynamic behavior of electrically-actuated clamped-clamped micro-beam with squeeze-film damping effect

AU - Liu, Chin-Chia

AU - Wang, Cheng Chi

PY - 2014/7/1

Y1 - 2014/7/1

N2 - A numerical investigation is performed into the nonlinear dynamic behavior of a clamped-clamped micro-beam actuated by a combined DC/AC voltage and subject to a squeeze-film damping effect. An analytical model based on a nonlinear deflection equation and a linearized Reynolds equation is proposed to describe the deflection of the micro-beam under the effects of the electrostatic actuating force. The deflection of the micro-beam is investigated under various actuating conditions by solving the analytical model using a hybrid numerical scheme comprising the differential transformation method and the finite difference approximation method. It is shown that the numerical results for the dynamic pull-in voltage of the clamped-clamped micro-beam deviate by no more than 2.04% from those presented in the literature based on the conventional finite difference scheme. The effects of the AC voltage amplitude, excitation frequency, residual stress, and ambient pressure on the center-point displacement of the micro-beam are systematically explored. Moreover, the actuation conditions which ensure the stability of the micro-beam are identified by means of phase portraits. Overall, the results presented in this study confirm that the hybrid numerical method provides an accurate means of analyzing the complex nonlinear behavior of common electrostatically-actuated microstructures.

AB - A numerical investigation is performed into the nonlinear dynamic behavior of a clamped-clamped micro-beam actuated by a combined DC/AC voltage and subject to a squeeze-film damping effect. An analytical model based on a nonlinear deflection equation and a linearized Reynolds equation is proposed to describe the deflection of the micro-beam under the effects of the electrostatic actuating force. The deflection of the micro-beam is investigated under various actuating conditions by solving the analytical model using a hybrid numerical scheme comprising the differential transformation method and the finite difference approximation method. It is shown that the numerical results for the dynamic pull-in voltage of the clamped-clamped micro-beam deviate by no more than 2.04% from those presented in the literature based on the conventional finite difference scheme. The effects of the AC voltage amplitude, excitation frequency, residual stress, and ambient pressure on the center-point displacement of the micro-beam are systematically explored. Moreover, the actuation conditions which ensure the stability of the micro-beam are identified by means of phase portraits. Overall, the results presented in this study confirm that the hybrid numerical method provides an accurate means of analyzing the complex nonlinear behavior of common electrostatically-actuated microstructures.

UR - http://www.scopus.com/inward/record.url?scp=84900854458&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84900854458&partnerID=8YFLogxK

U2 - 10.1016/j.apm.2013.11.048

DO - 10.1016/j.apm.2013.11.048

M3 - Article

VL - 38

SP - 3269

EP - 3280

JO - Applied Mathematical Modelling

JF - Applied Mathematical Modelling

SN - 0307-904X

IS - 13

ER -