Novel method for measuring the thickness of quartz using a plate wave sensor

Chi Yuan Lee, Ying Chou Cheng, Yung Yu Chen, Pei Zen Chang, Ching Liang Dai, Ping Hei Chen, Shih Yung Pao, Wen Jong Chen

Research output: Contribution to journalArticlepeer-review


This investigation proposes a novel method based on the plate wave sensor for measuring the thickness of quartz. Like resonators and oscillators, some devices require the thickness of quartz to be known precisely. Precisely controlling the thickness of quartz by wet etching is important, because the thickness strongly affects post-processing and frequency control. The proposed method for measuring the thickness of a quartz is highly accurate, simple to implement and can be mass-produced. The spectral analysis of surface waves (SASW), detailed process flows, measurement set-up and the simulation and experimental results are also presented. The theoretical and measured values-differ by an error of less than 2 μm, so the results agree with each other.

Original languageEnglish
Pages (from-to)321-328
Number of pages8
JournalJournal of the Chinese Society of Mechanical Engineers, Transactions of the Chinese Institute of Engineers, Series C/Chung-Kuo Chi Hsueh Kung Ch'eng Hsuebo Pao
Issue number4
Publication statusPublished - 2004 Aug 1

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering

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