Novel method for measuring the thickness of quartz using a plate wave sensor

Chi Yuan Lee, Ying Chou Cheng, Yung Yu Chen, Pei Zen Chang, Ching Liang Dai, Ping Hei Chen, Shih Yung Pao, Wen Jong Chen

Research output: Contribution to journalArticle

Abstract

This investigation proposes a novel method based on the plate wave sensor for measuring the thickness of quartz. Like resonators and oscillators, some devices require the thickness of quartz to be known precisely. Precisely controlling the thickness of quartz by wet etching is important, because the thickness strongly affects post-processing and frequency control. The proposed method for measuring the thickness of a quartz is highly accurate, simple to implement and can be mass-produced. The spectral analysis of surface waves (SASW), detailed process flows, measurement set-up and the simulation and experimental results are also presented. The theoretical and measured values-differ by an error of less than 2 μm, so the results agree with each other.

Original languageEnglish
Pages (from-to)321-328
Number of pages8
JournalJournal of the Chinese Society of Mechanical Engineers, Transactions of the Chinese Institute of Engineers, Series C/Chung-Kuo Chi Hsueh Kung Ch'eng Hsuebo Pao
Volume25
Issue number4
Publication statusPublished - 2004 Aug 1

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Quartz
Sensors
Wet etching
Flow measurement
Surface waves
Spectrum analysis
Resonators
Processing

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering

Cite this

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title = "Novel method for measuring the thickness of quartz using a plate wave sensor",
abstract = "This investigation proposes a novel method based on the plate wave sensor for measuring the thickness of quartz. Like resonators and oscillators, some devices require the thickness of quartz to be known precisely. Precisely controlling the thickness of quartz by wet etching is important, because the thickness strongly affects post-processing and frequency control. The proposed method for measuring the thickness of a quartz is highly accurate, simple to implement and can be mass-produced. The spectral analysis of surface waves (SASW), detailed process flows, measurement set-up and the simulation and experimental results are also presented. The theoretical and measured values-differ by an error of less than 2 μm, so the results agree with each other.",
author = "Lee, {Chi Yuan} and Cheng, {Ying Chou} and Chen, {Yung Yu} and Chang, {Pei Zen} and Dai, {Ching Liang} and Chen, {Ping Hei} and Pao, {Shih Yung} and Chen, {Wen Jong}",
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Novel method for measuring the thickness of quartz using a plate wave sensor. / Lee, Chi Yuan; Cheng, Ying Chou; Chen, Yung Yu; Chang, Pei Zen; Dai, Ching Liang; Chen, Ping Hei; Pao, Shih Yung; Chen, Wen Jong.

In: Journal of the Chinese Society of Mechanical Engineers, Transactions of the Chinese Institute of Engineers, Series C/Chung-Kuo Chi Hsueh Kung Ch'eng Hsuebo Pao, Vol. 25, No. 4, 01.08.2004, p. 321-328.

Research output: Contribution to journalArticle

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AU - Pao, Shih Yung

AU - Chen, Wen Jong

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