Nonlinear dynamic analysis of micro cantilever beam under electrostatic loading

C. C. Liu, S. C. Yang, C. K. Chen

Research output: Contribution to journalArticlepeer-review

13 Citations (Scopus)


A hybrid differential transformation / finite difference scheme is used to analyze the complex nonlinear behavior of an electrostatically-actuated micro cantilever beam which high aspect ratios (length/width). The validity of the proposed method is confirmed by comparing the numerical results obtained for the tip displacement and pull-in voltage of the cantilever beam with the analytical and experimental results presented in the literature. The hybrid scheme is then applied to analyze both the steady-state and the dynamic deflection behavior of the cantilever beam as a function of the applied voltage. Overall, the results confirm that the hybrid method provides an accurate and computationally- efficient means of analyzing the complex nonlinear behavior of both the current micro cantilever beam system and other micro-scale electrostatically-actuated structures.

Original languageEnglish
Pages (from-to)63-70
Number of pages8
JournalJournal of Mechanics
Issue number1
Publication statusPublished - 2012 Mar

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Mechanical Engineering
  • Applied Mathematics

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