Abstract
A hybrid differential transformation / finite difference scheme is used to analyze the complex nonlinear behavior of an electrostatically-actuated micro cantilever beam which high aspect ratios (length/width). The validity of the proposed method is confirmed by comparing the numerical results obtained for the tip displacement and pull-in voltage of the cantilever beam with the analytical and experimental results presented in the literature. The hybrid scheme is then applied to analyze both the steady-state and the dynamic deflection behavior of the cantilever beam as a function of the applied voltage. Overall, the results confirm that the hybrid method provides an accurate and computationally- efficient means of analyzing the complex nonlinear behavior of both the current micro cantilever beam system and other micro-scale electrostatically-actuated structures.
Original language | English |
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Pages (from-to) | 63-70 |
Number of pages | 8 |
Journal | Journal of Mechanics |
Volume | 28 |
Issue number | 1 |
DOIs | |
Publication status | Published - 2012 Mar |
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
- Mechanical Engineering
- Applied Mathematics