New technique for fabrication of individual carbon-nanotube field emitters

Ming Way Lee, Yu Shen Chen, Wei Ciao Lai, Yuen Wuu Suen, Jong-Ching Wu

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)


Currently, field emission experiments on individual carbon nanotubes (CNTs) are carried out by placing the CNTs inside a transmission electron microscope. In this work we report an alternative method of fabricating and measuring individual multiwalled CNT-field emitters fabricated on a silicon substrate by the e-beam lithography technique. A field emission experiment is then performed in a high-vacuum system for CNTs with various radii, lengths, interelectrode separations and tip structures. The geometrical enhancement factors β exhibit three ranges: low (β ∼ 10), medium (β ∼ 100) and high (β > 200) depending on whether the CNT tip is closed-tipped, open-tipped with a flat end or open-tipped with an oblique-angle end, respectively. The turn-on voltage Vto also depends on the tip structure and the lowest Vto occurs in open-tipped-with-oblique-angle CNTs. The geometrical enhancement factor depends on the tube geometry via a linear equation β = β0(1 + d/kr) with k ≈ 40 and β0 equals 163 and 53 for the high-β and medium-β lines, respectively, where r is the radius and d is the CNT tip-anode spacing. The new method may open a path leading to the integration of nanotube field emitters with other miniature devices using semiconductor integrating technology.

Original languageEnglish
Pages (from-to)430-433
Number of pages4
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Issue number1
Publication statusPublished - 2007 Jan 10

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

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