New technique for fabrication of individual carbon-nanotube field emitters

Ming Way Lee, Yu Shen Chen, Wei Ciao Lai, Yuen Wuu Suen, Jong-Ching Wu

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

Currently, field emission experiments on individual carbon nanotubes (CNTs) are carried out by placing the CNTs inside a transmission electron microscope. In this work we report an alternative method of fabricating and measuring individual multiwalled CNT-field emitters fabricated on a silicon substrate by the e-beam lithography technique. A field emission experiment is then performed in a high-vacuum system for CNTs with various radii, lengths, interelectrode separations and tip structures. The geometrical enhancement factors β exhibit three ranges: low (β ∼ 10), medium (β ∼ 100) and high (β > 200) depending on whether the CNT tip is closed-tipped, open-tipped with a flat end or open-tipped with an oblique-angle end, respectively. The turn-on voltage Vto also depends on the tip structure and the lowest Vto occurs in open-tipped-with-oblique-angle CNTs. The geometrical enhancement factor depends on the tube geometry via a linear equation β = β0(1 + d/kr) with k ≈ 40 and β0 equals 163 and 53 for the high-β and medium-β lines, respectively, where r is the radius and d is the CNT tip-anode spacing. The new method may open a path leading to the integration of nanotube field emitters with other miniature devices using semiconductor integrating technology.

Original languageEnglish
Pages (from-to)430-433
Number of pages4
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume46
Issue number1
DOIs
Publication statusPublished - 2007 Jan 10

Fingerprint

Carbon nanotubes
emitters
carbon nanotubes
Fabrication
fabrication
Field emission
field emission
Multiwalled carbon nanotubes (MWCN)
Semiconductor devices
radii
Linear equations
augmentation
vacuum systems
Lithography
Nanotubes
linear equations
high vacuum
semiconductor devices
Anodes
Electron microscopes

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

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title = "New technique for fabrication of individual carbon-nanotube field emitters",
abstract = "Currently, field emission experiments on individual carbon nanotubes (CNTs) are carried out by placing the CNTs inside a transmission electron microscope. In this work we report an alternative method of fabricating and measuring individual multiwalled CNT-field emitters fabricated on a silicon substrate by the e-beam lithography technique. A field emission experiment is then performed in a high-vacuum system for CNTs with various radii, lengths, interelectrode separations and tip structures. The geometrical enhancement factors β exhibit three ranges: low (β ∼ 10), medium (β ∼ 100) and high (β > 200) depending on whether the CNT tip is closed-tipped, open-tipped with a flat end or open-tipped with an oblique-angle end, respectively. The turn-on voltage Vto also depends on the tip structure and the lowest Vto occurs in open-tipped-with-oblique-angle CNTs. The geometrical enhancement factor depends on the tube geometry via a linear equation β = β0(1 + d/kr) with k ≈ 40 and β0 equals 163 and 53 for the high-β and medium-β lines, respectively, where r is the radius and d is the CNT tip-anode spacing. The new method may open a path leading to the integration of nanotube field emitters with other miniature devices using semiconductor integrating technology.",
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New technique for fabrication of individual carbon-nanotube field emitters. / Lee, Ming Way; Chen, Yu Shen; Lai, Wei Ciao; Suen, Yuen Wuu; Wu, Jong-Ching.

In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 46, No. 1, 10.01.2007, p. 430-433.

Research output: Contribution to journalArticle

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