New groove structures for miniature quartz crystal microbalance with low crystal impedance

Throughout the world, there are numerous of studies on quartz crystal microbalance (QCM). Today, we come up with a new way to reduce both the size of QCM structure and the crystal impedance without lowering the sensitivity. Beyond the conventional design of QCM originally developed in recent years, a new disk shape with multi-groove structures is proposed and investigated thoroughly to realize the miniaturized QCM. Along the miniaturization stage, there are two main approaches to remain the efficiency of vibration. One is to improve the piezoelectric effect which can be further increased by reducing the distance of electric field and the other is to improve the effective area of electric potential flow between the electrodes. Several proposed design with grooves in the disk has been proposed to make effective area larger, crystal impedance lower,and Q value higher. We will investigate between different groove structures on QCM under the same bias voltage. In this study, we propose and verify the innovative design of QCM and a thorough investigation of the electric and mechanical response were performed with evidence marvelous efficiency. Consequently, the three groove structure gives the best piezoelectric performance than the other.