Nanomechanical cantilever sensor using optical nanocavity resonator

Chengkuo Lee, Wenfeng Xiang, Jayaraj Thillaigovindan, Fu Li Hsiaol

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We present modeling results of a novel nanomechanical cantilever sensor using optical nanocavity resonator. A nanocavity resonator comprises two-hole pairs which are placed along a V-shaped silicon waveguide at the edge of cantilever. The resonant wavelength of output spectrum is sensitive to the shape of air holes and defect length of the nanocavity resonator. The minimum detectable strain vertical deflection at the cantilever end, and force load are observed as 0.0136%, 0.94J.μm and 0.046 pN for 50J.μm long cantilever. The measured strain is a linear function of resonant wavelength shift and applied force. This new sensing shows promising features for biomolecules detection.

Original languageEnglish
Title of host publication4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009
Pages808-812
Number of pages5
DOIs
Publication statusPublished - 2009 Oct 12
Event4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009 - Shenzhen, China
Duration: 2009 Jan 52009 Jan 8

Publication series

Name4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009

Other

Other4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009
CountryChina
CityShenzhen
Period09-01-0509-01-08

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All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

Cite this

Lee, C., Xiang, W., Thillaigovindan, J., & Hsiaol, F. L. (2009). Nanomechanical cantilever sensor using optical nanocavity resonator. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009 (pp. 808-812). [5068700] (4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009). https://doi.org/10.1109/NEMS.2009.5068700