Abstract
We present modeling results of a novel nanomechanical cantilever sensor using optical nanocavity resonator. A nanocavity resonator comprises two-hole pairs which are placed along a V-shaped silicon waveguide at the edge of cantilever. The resonant wavelength of output spectrum is sensitive to the shape of air holes and defect length of the nanocavity resonator. The minimum detectable strain vertical deflection at the cantilever end, and force load are observed as 0.0136%, 0.94J.μm and 0.046 pN for 50J.μm long cantilever. The measured strain is a linear function of resonant wavelength shift and applied force. This new sensing shows promising features for biomolecules detection.
| Original language | English |
|---|---|
| Title of host publication | 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009 |
| Pages | 808-812 |
| Number of pages | 5 |
| DOIs | |
| Publication status | Published - 2009 Oct 12 |
| Event | 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009 - Shenzhen, China Duration: 2009 Jan 5 → 2009 Jan 8 |
Other
| Other | 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009 |
|---|---|
| Country | China |
| City | Shenzhen |
| Period | 09-01-05 → 09-01-08 |
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All Science Journal Classification (ASJC) codes
- Electrical and Electronic Engineering
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Nanomechanical cantilever sensor using optical nanocavity resonator. / Lee, Chengkuo; Xiang, Wenfeng; Thillaigovindan, Jayaraj; Hsiao, Fu-Li.
4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009. 2009. p. 808-812 5068700.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
TY - GEN
T1 - Nanomechanical cantilever sensor using optical nanocavity resonator
AU - Lee, Chengkuo
AU - Xiang, Wenfeng
AU - Thillaigovindan, Jayaraj
AU - Hsiao, Fu-Li
PY - 2009/10/12
Y1 - 2009/10/12
N2 - We present modeling results of a novel nanomechanical cantilever sensor using optical nanocavity resonator. A nanocavity resonator comprises two-hole pairs which are placed along a V-shaped silicon waveguide at the edge of cantilever. The resonant wavelength of output spectrum is sensitive to the shape of air holes and defect length of the nanocavity resonator. The minimum detectable strain vertical deflection at the cantilever end, and force load are observed as 0.0136%, 0.94J.μm and 0.046 pN for 50J.μm long cantilever. The measured strain is a linear function of resonant wavelength shift and applied force. This new sensing shows promising features for biomolecules detection.
AB - We present modeling results of a novel nanomechanical cantilever sensor using optical nanocavity resonator. A nanocavity resonator comprises two-hole pairs which are placed along a V-shaped silicon waveguide at the edge of cantilever. The resonant wavelength of output spectrum is sensitive to the shape of air holes and defect length of the nanocavity resonator. The minimum detectable strain vertical deflection at the cantilever end, and force load are observed as 0.0136%, 0.94J.μm and 0.046 pN for 50J.μm long cantilever. The measured strain is a linear function of resonant wavelength shift and applied force. This new sensing shows promising features for biomolecules detection.
UR - http://www.scopus.com/inward/record.url?scp=70349667815&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=70349667815&partnerID=8YFLogxK
U2 - 10.1109/NEMS.2009.5068700
DO - 10.1109/NEMS.2009.5068700
M3 - Conference contribution
SN - 9781424446308
SP - 808
EP - 812
BT - 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009
ER -