Nanomechanical cantilever sensor using optical nanocavity resonator

Chengkuo Lee; Wenfeng Xiang; Jayaraj Thillaigovindan; Fu Li Hsiaol

doi:10.1109/NEMS.2009.5068700

Nanomechanical cantilever sensor using optical nanocavity resonator

Chengkuo Lee, Wenfeng Xiang, Jayaraj Thillaigovindan, Fu Li Hsiaol

Graduate Institute of Photonics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We present modeling results of a novel nanomechanical cantilever sensor using optical nanocavity resonator. A nanocavity resonator comprises two-hole pairs which are placed along a V-shaped silicon waveguide at the edge of cantilever. The resonant wavelength of output spectrum is sensitive to the shape of air holes and defect length of the nanocavity resonator. The minimum detectable strain vertical deflection at the cantilever end, and force load are observed as 0.0136%, 0.94J.μm and 0.046 pN for 50J.μm long cantilever. The measured strain is a linear function of resonant wavelength shift and applied force. This new sensing shows promising features for biomolecules detection.

Original language	English
Title of host publication	4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009
Pages	808-812
Number of pages	5
DOIs	https://doi.org/10.1109/NEMS.2009.5068700
Publication status	Published - 2009 Oct 12
Event	4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009 - Shenzhen, China Duration: 2009 Jan 5 → 2009 Jan 8

Publication series

Name	4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009

Other

Other	4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009
Country	China
City	Shenzhen
Period	09-01-05 → 09-01-08

All Science Journal Classification (ASJC) codes

Electrical and Electronic Engineering

Access to Document

10.1109/NEMS.2009.5068700

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Lee, C., Xiang, W., Thillaigovindan, J., & Hsiaol, F. L. (2009). Nanomechanical cantilever sensor using optical nanocavity resonator. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009 (pp. 808-812). [5068700] (4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009). https://doi.org/10.1109/NEMS.2009.5068700

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title = "Nanomechanical cantilever sensor using optical nanocavity resonator",

abstract = "We present modeling results of a novel nanomechanical cantilever sensor using optical nanocavity resonator. A nanocavity resonator comprises two-hole pairs which are placed along a V-shaped silicon waveguide at the edge of cantilever. The resonant wavelength of output spectrum is sensitive to the shape of air holes and defect length of the nanocavity resonator. The minimum detectable strain vertical deflection at the cantilever end, and force load are observed as 0.0136%, 0.94J.μm and 0.046 pN for 50J.μm long cantilever. The measured strain is a linear function of resonant wavelength shift and applied force. This new sensing shows promising features for biomolecules detection.",

author = "Chengkuo Lee and Wenfeng Xiang and Jayaraj Thillaigovindan and Hsiaol, {Fu Li}",

year = "2009",

month = oct,

day = "12",

doi = "10.1109/NEMS.2009.5068700",

language = "English",

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series = "4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009",

pages = "808--812",

booktitle = "4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009",

note = "4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009 ; Conference date: 05-01-2009 Through 08-01-2009",

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Lee, C, Xiang, W, Thillaigovindan, J & Hsiaol, FL 2009, Nanomechanical cantilever sensor using optical nanocavity resonator. in 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009., 5068700, 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009, pp. 808-812, 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009, Shenzhen, China, 09-01-05. https://doi.org/10.1109/NEMS.2009.5068700

Nanomechanical cantilever sensor using optical nanocavity resonator. / Lee, Chengkuo; Xiang, Wenfeng; Thillaigovindan, Jayaraj; Hsiaol, Fu Li.

4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009. 2009. p. 808-812 5068700 (4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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N2 - We present modeling results of a novel nanomechanical cantilever sensor using optical nanocavity resonator. A nanocavity resonator comprises two-hole pairs which are placed along a V-shaped silicon waveguide at the edge of cantilever. The resonant wavelength of output spectrum is sensitive to the shape of air holes and defect length of the nanocavity resonator. The minimum detectable strain vertical deflection at the cantilever end, and force load are observed as 0.0136%, 0.94J.μm and 0.046 pN for 50J.μm long cantilever. The measured strain is a linear function of resonant wavelength shift and applied force. This new sensing shows promising features for biomolecules detection.

AB - We present modeling results of a novel nanomechanical cantilever sensor using optical nanocavity resonator. A nanocavity resonator comprises two-hole pairs which are placed along a V-shaped silicon waveguide at the edge of cantilever. The resonant wavelength of output spectrum is sensitive to the shape of air holes and defect length of the nanocavity resonator. The minimum detectable strain vertical deflection at the cantilever end, and force load are observed as 0.0136%, 0.94J.μm and 0.046 pN for 50J.μm long cantilever. The measured strain is a linear function of resonant wavelength shift and applied force. This new sensing shows promising features for biomolecules detection.

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Lee C, Xiang W, Thillaigovindan J, Hsiaol FL. Nanomechanical cantilever sensor using optical nanocavity resonator. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009. 2009. p. 808-812. 5068700. (4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009). https://doi.org/10.1109/NEMS.2009.5068700