Motion stage design with scanning-by-probe AFM for imaging nanocrystals on sapphire surface

Yi Cheng Huang, Mou Sheng Lin, Che Ming Liu, Jyh Chen Chen

Research output: Contribution to journalArticle

1 Citation (Scopus)


The Mg-Al spinel nanocrystals were successfully grown at the etching pits of sapphire single crystal surface by precipitation. However, observation for such few hundred nanometers size of the nanocrystals requires the resolution of Scanning Electron Microscopy (SEM) or Atomic Force Microscopy (AFM). Scanning distance by the scanning-by-probe AFM is constrained when the sample size is large in comparison with the size of nanocrystal. This study presents the design of a piezoelectric-driven motion system for scanning-by-probe AFM. Experimental results validate the AFM featured with large scanning positioning, fast imaging and maximum 20 nm positioning error resolution.

Original languageEnglish
Pages (from-to)257-265
Number of pages9
JournalJournal of the Chinese Society of Mechanical Engineers, Transactions of the Chinese Institute of Engineers, Series C/Chung-Kuo Chi Hsueh Kung Ch'eng Hsuebo Pao
Issue number3
Publication statusPublished - 2004 Jun 1


All Science Journal Classification (ASJC) codes

  • Mechanical Engineering

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