Motion stage design with scanning-by-probe AFM for imaging nanocrystals on sapphire surface

Yi Cheng Huang, Mou Sheng Lin, Che Ming Liu, Jyh Chen Chen

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The Mg-Al spinel nanocrystals were successfully grown at the etching pits of sapphire single crystal surface by precipitation. However, observation for such nanocrystals requires the resolution of Scanning Electron Microscopy (SEM) or Atomic Force Microscopy (AFM). Scanning distance by scanning-by-probe AFM is constrained when the sample size is large in comparison with the size of nanocrystal. This study presents the design of a piezoelectric-driven motion system integrated with aforementioned AFM. Experimental results show the stage is featured with large scanning distance, fast imaging and maximum 20 nm positioning error resolution.

Original languageEnglish
Title of host publicationProceedings - 2004 International Conference on Intelligent Mechatronics and Automation
Pages793-798
Number of pages6
Publication statusPublished - 2004 Dec 1
EventProceedings - 2004 International Conference on Intelligent Mechatronics and Automation - Chengdu, China
Duration: 2004 Aug 262004 Aug 31

Other

OtherProceedings - 2004 International Conference on Intelligent Mechatronics and Automation
CountryChina
CityChengdu
Period04-08-2604-08-31

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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