Motion stage design with scanning-by-probe AFM for imaging nanocrystals on sapphire surface

Yi Cheng Huang; Mou Sheng Lin; Che Ming Liu; Jyh Chen Chen

Motion stage design with scanning-by-probe AFM for imaging nanocrystals on sapphire surface

Yi Cheng Huang, Mou Sheng Lin, Che Ming Liu, Jyh Chen Chen

Department of Mechatronic Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

The Mg-Al spinel nanocrystals were successfully grown at the etching pits of sapphire single crystal surface by precipitation. However, observation for such nanocrystals requires the resolution of Scanning Electron Microscopy (SEM) or Atomic Force Microscopy (AFM). Scanning distance by scanning-by-probe AFM is constrained when the sample size is large in comparison with the size of nanocrystal. This study presents the design of a piezoelectric-driven motion system integrated with aforementioned AFM. Experimental results show the stage is featured with large scanning distance, fast imaging and maximum 20 nm positioning error resolution.

Original language	English
Title of host publication	Proceedings - 2004 International Conference on Intelligent Mechatronics and Automation
Pages	793-798
Number of pages	6
Publication status	Published - 2004 Dec 1
Event	Proceedings - 2004 International Conference on Intelligent Mechatronics and Automation - Chengdu, China Duration: 2004 Aug 26 → 2004 Aug 31

Other

Other	Proceedings - 2004 International Conference on Intelligent Mechatronics and Automation
Country	China
City	Chengdu
Period	04-08-26 → 04-08-31

All Science Journal Classification (ASJC) codes

Engineering(all)

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title = "Motion stage design with scanning-by-probe AFM for imaging nanocrystals on sapphire surface",

abstract = "The Mg-Al spinel nanocrystals were successfully grown at the etching pits of sapphire single crystal surface by precipitation. However, observation for such nanocrystals requires the resolution of Scanning Electron Microscopy (SEM) or Atomic Force Microscopy (AFM). Scanning distance by scanning-by-probe AFM is constrained when the sample size is large in comparison with the size of nanocrystal. This study presents the design of a piezoelectric-driven motion system integrated with aforementioned AFM. Experimental results show the stage is featured with large scanning distance, fast imaging and maximum 20 nm positioning error resolution.",

author = "Huang, {Yi Cheng} and Lin, {Mou Sheng} and Liu, {Che Ming} and Chen, {Jyh Chen}",

year = "2004",

month = dec,

day = "1",

language = "English",

isbn = "0780387481",

pages = "793--798",

booktitle = "Proceedings - 2004 International Conference on Intelligent Mechatronics and Automation",

note = "Proceedings - 2004 International Conference on Intelligent Mechatronics and Automation ; Conference date: 26-08-2004 Through 31-08-2004",

}

TY - GEN

T1 - Motion stage design with scanning-by-probe AFM for imaging nanocrystals on sapphire surface

AU - Huang, Yi Cheng

AU - Lin, Mou Sheng

AU - Liu, Che Ming

AU - Chen, Jyh Chen

PY - 2004/12/1

Y1 - 2004/12/1

N2 - The Mg-Al spinel nanocrystals were successfully grown at the etching pits of sapphire single crystal surface by precipitation. However, observation for such nanocrystals requires the resolution of Scanning Electron Microscopy (SEM) or Atomic Force Microscopy (AFM). Scanning distance by scanning-by-probe AFM is constrained when the sample size is large in comparison with the size of nanocrystal. This study presents the design of a piezoelectric-driven motion system integrated with aforementioned AFM. Experimental results show the stage is featured with large scanning distance, fast imaging and maximum 20 nm positioning error resolution.

AB - The Mg-Al spinel nanocrystals were successfully grown at the etching pits of sapphire single crystal surface by precipitation. However, observation for such nanocrystals requires the resolution of Scanning Electron Microscopy (SEM) or Atomic Force Microscopy (AFM). Scanning distance by scanning-by-probe AFM is constrained when the sample size is large in comparison with the size of nanocrystal. This study presents the design of a piezoelectric-driven motion system integrated with aforementioned AFM. Experimental results show the stage is featured with large scanning distance, fast imaging and maximum 20 nm positioning error resolution.

UR - http://www.scopus.com/inward/record.url?scp=8844234982&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=8844234982&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:8844234982

SN - 0780387481

SP - 793

EP - 798

BT - Proceedings - 2004 International Conference on Intelligent Mechatronics and Automation

T2 - Proceedings - 2004 International Conference on Intelligent Mechatronics and Automation

Y2 - 26 August 2004 through 31 August 2004

ER -