Abstract
The Mg-Al spinel nanocrystals were successfully grown at the etching pits of sapphire single crystal surface by precipitation. However, observation for such nanocrystals requires the resolution of Scanning Electron Microscopy (SEM) or Atomic Force Microscopy (AFM). Scanning distance by scanning-by-probe AFM is constrained when the sample size is large in comparison with the size of nanocrystal. This study presents the design of a piezoelectric-driven motion system integrated with aforementioned AFM. Experimental results show the stage is featured with large scanning distance, fast imaging and maximum 20 nm positioning error resolution.
| Original language | English |
|---|---|
| Title of host publication | Proceedings - 2004 International Conference on Intelligent Mechatronics and Automation |
| Pages | 793-798 |
| Number of pages | 6 |
| Publication status | Published - 2004 Dec 1 |
| Event | Proceedings - 2004 International Conference on Intelligent Mechatronics and Automation - Chengdu, China Duration: 2004 Aug 26 → 2004 Aug 31 |
Other
| Other | Proceedings - 2004 International Conference on Intelligent Mechatronics and Automation |
|---|---|
| Country | China |
| City | Chengdu |
| Period | 04-08-26 → 04-08-31 |
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All Science Journal Classification (ASJC) codes
- Engineering(all)
Cite this
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Motion stage design with scanning-by-probe AFM for imaging nanocrystals on sapphire surface. / Huang, Yi Cheng; Lin, Mou Sheng; Liu, Che Ming; Chen, Jyh Chen.
Proceedings - 2004 International Conference on Intelligent Mechatronics and Automation. 2004. p. 793-798.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
TY - GEN
T1 - Motion stage design with scanning-by-probe AFM for imaging nanocrystals on sapphire surface
AU - Huang, Yi Cheng
AU - Lin, Mou Sheng
AU - Liu, Che Ming
AU - Chen, Jyh Chen
PY - 2004/12/1
Y1 - 2004/12/1
N2 - The Mg-Al spinel nanocrystals were successfully grown at the etching pits of sapphire single crystal surface by precipitation. However, observation for such nanocrystals requires the resolution of Scanning Electron Microscopy (SEM) or Atomic Force Microscopy (AFM). Scanning distance by scanning-by-probe AFM is constrained when the sample size is large in comparison with the size of nanocrystal. This study presents the design of a piezoelectric-driven motion system integrated with aforementioned AFM. Experimental results show the stage is featured with large scanning distance, fast imaging and maximum 20 nm positioning error resolution.
AB - The Mg-Al spinel nanocrystals were successfully grown at the etching pits of sapphire single crystal surface by precipitation. However, observation for such nanocrystals requires the resolution of Scanning Electron Microscopy (SEM) or Atomic Force Microscopy (AFM). Scanning distance by scanning-by-probe AFM is constrained when the sample size is large in comparison with the size of nanocrystal. This study presents the design of a piezoelectric-driven motion system integrated with aforementioned AFM. Experimental results show the stage is featured with large scanning distance, fast imaging and maximum 20 nm positioning error resolution.
UR - http://www.scopus.com/inward/record.url?scp=8844234982&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=8844234982&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:8844234982
SN - 0780387481
SP - 793
EP - 798
BT - Proceedings - 2004 International Conference on Intelligent Mechatronics and Automation
ER -