Modeling and simulation of nonlinear micro-electromechanical circular plate

Chin Chia Liu, Cha'o Kuang Chen

Research output: Contribution to journalArticlepeer-review

11 Citations (Scopus)


In the present study, the hybrid differential transformation and finite difference method is applied to analyze the dynamic behavior of the nonlinear micro-electromechanical circular plate actuated by combined DC / AC loading schemes. The analysis takes account of the axial residual stress and hydrostatic pressure acting on micro circular plate upper surface. The dynamic response of the plate as a function of the magnitude of the AC driving voltage is explored. Moreover, the effect of the initial gap height on the pull-in voltage of the plate is systematically explored.

Original languageEnglish
Pages (from-to)59-63
Number of pages5
JournalSmart Science
Issue number1
Publication statusPublished - 2013

All Science Journal Classification (ASJC) codes

  • Chemistry (miscellaneous)
  • Modelling and Simulation
  • Energy (miscellaneous)
  • Engineering(all)
  • Fluid Flow and Transfer Processes
  • Computer Networks and Communications
  • Computational Mathematics

Fingerprint Dive into the research topics of 'Modeling and simulation of nonlinear micro-electromechanical circular plate'. Together they form a unique fingerprint.

Cite this