Abstract
Mo/Si bilayer thin films were grown by magnetron sputtering and applied to write-once blu-ray disc (BD-R). The microstructures and optical storage properties of Mo/Si bilayer were investigated. From the temperature dependence of reflectivity measurement, it was revealed that a phase change occurred in the range of 255-425°C. Transmission electron microscopy analysis showed that the as-deposited film possessed Mo polycrystalline phase. The hexagonal MoSi2 and cubic Mo3Si phases appeared after annealing at 300 and 450°C, respectively. By measuring the optical reflectivity at a wavelength of 405 nm, the optical contrast of Mo/Si bilayer between as-deposited and 450°C-annealed states was evaluated to 25.8%. The optimum jitter value of 6.8% was obtained at 10.65 mW for 4× recording speed. The dynamic tests show that the Mo/Si bilayer has high potential in BD-R applications.
| Original language | English |
|---|---|
| Article number | 862928 |
| Journal | Journal of Nanomaterials |
| Volume | 2014 |
| DOIs | |
| Publication status | Published - 2014 Jan 1 |
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All Science Journal Classification (ASJC) codes
- Materials Science(all)
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Microstructures and recording mechanism of Mo/Si bilayer applied for write-once blue laser optical recording. / Ou, Sin Liang; Kao, Kuo Sheng; Chang, Han Feng; Ko, Tsung-Shine; Yeh, Chin Yen.
In: Journal of Nanomaterials, Vol. 2014, 862928, 01.01.2014.Research output: Contribution to journal › Article
TY - JOUR
T1 - Microstructures and recording mechanism of Mo/Si bilayer applied for write-once blue laser optical recording
AU - Ou, Sin Liang
AU - Kao, Kuo Sheng
AU - Chang, Han Feng
AU - Ko, Tsung-Shine
AU - Yeh, Chin Yen
PY - 2014/1/1
Y1 - 2014/1/1
N2 - Mo/Si bilayer thin films were grown by magnetron sputtering and applied to write-once blu-ray disc (BD-R). The microstructures and optical storage properties of Mo/Si bilayer were investigated. From the temperature dependence of reflectivity measurement, it was revealed that a phase change occurred in the range of 255-425°C. Transmission electron microscopy analysis showed that the as-deposited film possessed Mo polycrystalline phase. The hexagonal MoSi2 and cubic Mo3Si phases appeared after annealing at 300 and 450°C, respectively. By measuring the optical reflectivity at a wavelength of 405 nm, the optical contrast of Mo/Si bilayer between as-deposited and 450°C-annealed states was evaluated to 25.8%. The optimum jitter value of 6.8% was obtained at 10.65 mW for 4× recording speed. The dynamic tests show that the Mo/Si bilayer has high potential in BD-R applications.
AB - Mo/Si bilayer thin films were grown by magnetron sputtering and applied to write-once blu-ray disc (BD-R). The microstructures and optical storage properties of Mo/Si bilayer were investigated. From the temperature dependence of reflectivity measurement, it was revealed that a phase change occurred in the range of 255-425°C. Transmission electron microscopy analysis showed that the as-deposited film possessed Mo polycrystalline phase. The hexagonal MoSi2 and cubic Mo3Si phases appeared after annealing at 300 and 450°C, respectively. By measuring the optical reflectivity at a wavelength of 405 nm, the optical contrast of Mo/Si bilayer between as-deposited and 450°C-annealed states was evaluated to 25.8%. The optimum jitter value of 6.8% was obtained at 10.65 mW for 4× recording speed. The dynamic tests show that the Mo/Si bilayer has high potential in BD-R applications.
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U2 - 10.1155/2014/862928
DO - 10.1155/2014/862928
M3 - Article
AN - SCOPUS:84899926464
VL - 2014
JO - Journal of Nanomaterials
JF - Journal of Nanomaterials
SN - 1687-4110
M1 - 862928
ER -