Microstructures and recording mechanism of Mo/Si bilayer applied for write-once blue laser optical recording

Sin Liang Ou, Kuo Sheng Kao, Han Feng Chang, Tsung Shine Ko, Chin Yen Yeh

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Mo/Si bilayer thin films were grown by magnetron sputtering and applied to write-once blu-ray disc (BD-R). The microstructures and optical storage properties of Mo/Si bilayer were investigated. From the temperature dependence of reflectivity measurement, it was revealed that a phase change occurred in the range of 255-425°C. Transmission electron microscopy analysis showed that the as-deposited film possessed Mo polycrystalline phase. The hexagonal MoSi2 and cubic Mo3Si phases appeared after annealing at 300 and 450°C, respectively. By measuring the optical reflectivity at a wavelength of 405 nm, the optical contrast of Mo/Si bilayer between as-deposited and 450°C-annealed states was evaluated to 25.8%. The optimum jitter value of 6.8% was obtained at 10.65 mW for 4× recording speed. The dynamic tests show that the Mo/Si bilayer has high potential in BD-R applications.

Original languageEnglish
Article number862928
JournalJournal of Nanomaterials
Publication statusPublished - 2014


All Science Journal Classification (ASJC) codes

  • Materials Science(all)

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