Microstructures and recording mechanism of Mo/Si bilayer applied for write-once blue laser optical recording

Sin Liang Ou, Kuo Sheng Kao, Han Feng Chang, Tsung-Shine Ko, Chin Yen Yeh

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

Mo/Si bilayer thin films were grown by magnetron sputtering and applied to write-once blu-ray disc (BD-R). The microstructures and optical storage properties of Mo/Si bilayer were investigated. From the temperature dependence of reflectivity measurement, it was revealed that a phase change occurred in the range of 255-425°C. Transmission electron microscopy analysis showed that the as-deposited film possessed Mo polycrystalline phase. The hexagonal MoSi2 and cubic Mo3Si phases appeared after annealing at 300 and 450°C, respectively. By measuring the optical reflectivity at a wavelength of 405 nm, the optical contrast of Mo/Si bilayer between as-deposited and 450°C-annealed states was evaluated to 25.8%. The optimum jitter value of 6.8% was obtained at 10.65 mW for 4× recording speed. The dynamic tests show that the Mo/Si bilayer has high potential in BD-R applications.

Original languageEnglish
Article number862928
JournalJournal of Nanomaterials
Volume2014
DOIs
Publication statusPublished - 2014 Jan 1

Fingerprint

Optical recording
Microstructure
Lasers
Jitter
Magnetron sputtering
Annealing
Transmission electron microscopy
Thin films
Wavelength
Temperature

All Science Journal Classification (ASJC) codes

  • Materials Science(all)

Cite this

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title = "Microstructures and recording mechanism of Mo/Si bilayer applied for write-once blue laser optical recording",
abstract = "Mo/Si bilayer thin films were grown by magnetron sputtering and applied to write-once blu-ray disc (BD-R). The microstructures and optical storage properties of Mo/Si bilayer were investigated. From the temperature dependence of reflectivity measurement, it was revealed that a phase change occurred in the range of 255-425°C. Transmission electron microscopy analysis showed that the as-deposited film possessed Mo polycrystalline phase. The hexagonal MoSi2 and cubic Mo3Si phases appeared after annealing at 300 and 450°C, respectively. By measuring the optical reflectivity at a wavelength of 405 nm, the optical contrast of Mo/Si bilayer between as-deposited and 450°C-annealed states was evaluated to 25.8{\%}. The optimum jitter value of 6.8{\%} was obtained at 10.65 mW for 4× recording speed. The dynamic tests show that the Mo/Si bilayer has high potential in BD-R applications.",
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Microstructures and recording mechanism of Mo/Si bilayer applied for write-once blue laser optical recording. / Ou, Sin Liang; Kao, Kuo Sheng; Chang, Han Feng; Ko, Tsung-Shine; Yeh, Chin Yen.

In: Journal of Nanomaterials, Vol. 2014, 862928, 01.01.2014.

Research output: Contribution to journalArticle

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