Abstract
Phononic crystal (PnC) resonators of Bloch-mode resonance made by replacing periodically arranged two or three rows of air holes with one row of air holes on a two-dimensional (2-D) silicon slab with air holes of square lattice have been investigated. Piezoelectric aluminum nitride (AlN) film is employed as the interdigital transducers to transmit and detect acoustic waves, thus making the whole microfabrication process CMOS compatible. We also fabricate a PnC structure which has a stopband of 140 MHz < f < 195 MHz which agrees well with the simulation results. From our experimental results, we found that the two kinds of microfabricated PnC resonators have different optimization conditions in terms of resonant frequency and Q factor, as well as insertion loss, despite their similar design approach. As compared to PnC resonators of hexagonal lattice, the proposed Bloch-mode PnC resonators of square lattice demonstrated higher resonant frequency, higher Q factor, and a smaller device area. The promising acoustic characteristics may be further optimized for applications such as microfluidics, biomedical devices, and radio-frequency communications in the gigahertz range.
| Original language | English |
|---|---|
| Article number | 6095572 |
| Pages (from-to) | 801-810 |
| Number of pages | 10 |
| Journal | Journal of Microelectromechanical Systems |
| Volume | 21 |
| Issue number | 4 |
| DOIs | |
| Publication status | Published - 2012 Jan 1 |
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All Science Journal Classification (ASJC) codes
- Mechanical Engineering
- Electrical and Electronic Engineering
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Micromechanical resonators based on silicon two-dimensional phononic crystals of square lattice. / Wang, Nan; Tsai, Julius Ming Lin; Hsiao, Fu-Li; Soon, Bo Woon; Kwong, Dim Lee; Palaniapan, Moorthi; Lee, Chengkuo.
In: Journal of Microelectromechanical Systems, Vol. 21, No. 4, 6095572, 01.01.2012, p. 801-810.Research output: Contribution to journal › Article
TY - JOUR
T1 - Micromechanical resonators based on silicon two-dimensional phononic crystals of square lattice
AU - Wang, Nan
AU - Tsai, Julius Ming Lin
AU - Hsiao, Fu-Li
AU - Soon, Bo Woon
AU - Kwong, Dim Lee
AU - Palaniapan, Moorthi
AU - Lee, Chengkuo
PY - 2012/1/1
Y1 - 2012/1/1
N2 - Phononic crystal (PnC) resonators of Bloch-mode resonance made by replacing periodically arranged two or three rows of air holes with one row of air holes on a two-dimensional (2-D) silicon slab with air holes of square lattice have been investigated. Piezoelectric aluminum nitride (AlN) film is employed as the interdigital transducers to transmit and detect acoustic waves, thus making the whole microfabrication process CMOS compatible. We also fabricate a PnC structure which has a stopband of 140 MHz < f < 195 MHz which agrees well with the simulation results. From our experimental results, we found that the two kinds of microfabricated PnC resonators have different optimization conditions in terms of resonant frequency and Q factor, as well as insertion loss, despite their similar design approach. As compared to PnC resonators of hexagonal lattice, the proposed Bloch-mode PnC resonators of square lattice demonstrated higher resonant frequency, higher Q factor, and a smaller device area. The promising acoustic characteristics may be further optimized for applications such as microfluidics, biomedical devices, and radio-frequency communications in the gigahertz range.
AB - Phononic crystal (PnC) resonators of Bloch-mode resonance made by replacing periodically arranged two or three rows of air holes with one row of air holes on a two-dimensional (2-D) silicon slab with air holes of square lattice have been investigated. Piezoelectric aluminum nitride (AlN) film is employed as the interdigital transducers to transmit and detect acoustic waves, thus making the whole microfabrication process CMOS compatible. We also fabricate a PnC structure which has a stopband of 140 MHz < f < 195 MHz which agrees well with the simulation results. From our experimental results, we found that the two kinds of microfabricated PnC resonators have different optimization conditions in terms of resonant frequency and Q factor, as well as insertion loss, despite their similar design approach. As compared to PnC resonators of hexagonal lattice, the proposed Bloch-mode PnC resonators of square lattice demonstrated higher resonant frequency, higher Q factor, and a smaller device area. The promising acoustic characteristics may be further optimized for applications such as microfluidics, biomedical devices, and radio-frequency communications in the gigahertz range.
UR - http://www.scopus.com/inward/record.url?scp=84864619913&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84864619913&partnerID=8YFLogxK
U2 - 10.1109/JMEMS.2011.2174416
DO - 10.1109/JMEMS.2011.2174416
M3 - Article
VL - 21
SP - 801
EP - 810
JO - Journal of Microelectromechanical Systems
JF - Journal of Microelectromechanical Systems
SN - 1057-7157
IS - 4
M1 - 6095572
ER -