Microcantilever sensor using photonic crystal nanocavity resonator

Wenfeng Xiang, Fu Li Hsiao, Chengkuo Lee

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

A novel nanomechanical cantilever sensor integrated with photonic crystal (PC) resonator is investigated computationally in this study. A U-shaped PC waveguide with a nanocavity resonator located at the edge of a suspended cantilever can be applied to detect cantilever bending in solution. The detection limit of this nanomechanical cantilever sensor operated in water is better than that of the same one operated in air. It implies promising features that this novel nanomechanical cantilever sensor could be good at biomolecules detection.

Original languageEnglish
Title of host publicationTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages959-962
Number of pages4
DOIs
Publication statusPublished - 2009 Dec 11
EventTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems - Denver, CO, United States
Duration: 2009 Jun 212009 Jun 25

Publication series

NameTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Other

OtherTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
CountryUnited States
CityDenver, CO
Period09-06-2109-06-25

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All Science Journal Classification (ASJC) codes

  • Hardware and Architecture
  • Electrical and Electronic Engineering

Cite this

Xiang, W., Hsiao, F. L., & Lee, C. (2009). Microcantilever sensor using photonic crystal nanocavity resonator. In TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 959-962). [5285976] (TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems). https://doi.org/10.1109/SENSOR.2009.5285976