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Dive into the research topics of 'Micro-system displacement and profile measurement by an integrated photon tunneling and confocal microscope'. Together they form a unique fingerprint.
Mathematics
Displacement Measurement
Microsystems
Microscope
Confocal
Photon
Profile
Micromirror
Laser Scanning
Electrostatic Force
Surface Roughness
Microscopy
Topography
Laser
Mechanical Systems
Experimental Data
Discrepancy
Analytical Solution
Finite Element Method
Three-dimensional
Demonstrate
Engineering & Materials Science
Displacement measurement
Photons
Microscopes
Bending (deformation)
Lasers
Electrostatic force
Topography
Electric lamps
Light sources
Microscopic examination
Mirrors
Surface roughness
Scanning
Finite element method
Physics & Astronomy
displacement measurement
microscopes
photons
profiles
surface roughness effects
twisting
halogens
luminaires
topography
micrometers
lasers
finite element method
light sources
electrostatics
optics
mirrors
microscopy
scanning