Micro-system displacement and profile measurement by an integrated photon tunneling and confocal microscope

Wen-Jong Chen, Long Sun Huang, Chih Kung Lee, Ta Shun Chu, Wu Fone Yeh, Shui Shong Lu, Ying Chou Cheng

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

An integrated optical method for measuring deformation of micro-mechanical systems with better than sub-micron resolutions is detailed. Both a confocal laser scanning microscope and a photon tunneling microscope were integrated into a single microscopy system due to their complimentary capabilities for examining sub-micrometer deformations. A halogen lamp and laser were adopted as the two light sources for the measurements. Since topographic information of samples up to a 15μm by 15μm area can be measured, a three-dimensional displacement field of the sample was extracted by comparing topographies of the same specimen area before and after deformation. The bending and twisting deformation of a micro-mirror driven by the electrostatic force was measured to demonstrate the capability of this newly developed instrument. The experimental data obtained agrees reasonably well with the theoretical results calculated by adopting an analytical solution and a finite element method. The small discrepancy in the result can be traced to the surface roughness effect, which is often non-negligible in micro-systems.

Original languageEnglish
Pages (from-to)173-183
Number of pages11
JournalJournal of Mechanics
Volume18
Issue number4
DOIs
Publication statusPublished - 2002 Jan 1

Fingerprint

Microsystems
displacement measurement
Confocal
Microscope
Photon
Microscopes
Photons
microscopes
photons
profiles
surface roughness effects
Electrostatic Force
Micromirror
Bending (deformation)
Laser Scanning
Electrostatic force
Lasers
twisting
Topography
Surface Roughness

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Mechanical Engineering
  • Applied Mathematics

Cite this

Chen, Wen-Jong ; Huang, Long Sun ; Lee, Chih Kung ; Chu, Ta Shun ; Yeh, Wu Fone ; Lu, Shui Shong ; Cheng, Ying Chou. / Micro-system displacement and profile measurement by an integrated photon tunneling and confocal microscope. In: Journal of Mechanics. 2002 ; Vol. 18, No. 4. pp. 173-183.
@article{db06546e59f54ac48852fe860c613955,
title = "Micro-system displacement and profile measurement by an integrated photon tunneling and confocal microscope",
abstract = "An integrated optical method for measuring deformation of micro-mechanical systems with better than sub-micron resolutions is detailed. Both a confocal laser scanning microscope and a photon tunneling microscope were integrated into a single microscopy system due to their complimentary capabilities for examining sub-micrometer deformations. A halogen lamp and laser were adopted as the two light sources for the measurements. Since topographic information of samples up to a 15μm by 15μm area can be measured, a three-dimensional displacement field of the sample was extracted by comparing topographies of the same specimen area before and after deformation. The bending and twisting deformation of a micro-mirror driven by the electrostatic force was measured to demonstrate the capability of this newly developed instrument. The experimental data obtained agrees reasonably well with the theoretical results calculated by adopting an analytical solution and a finite element method. The small discrepancy in the result can be traced to the surface roughness effect, which is often non-negligible in micro-systems.",
author = "Wen-Jong Chen and Huang, {Long Sun} and Lee, {Chih Kung} and Chu, {Ta Shun} and Yeh, {Wu Fone} and Lu, {Shui Shong} and Cheng, {Ying Chou}",
year = "2002",
month = "1",
day = "1",
doi = "10.1017/S1727719100004081",
language = "English",
volume = "18",
pages = "173--183",
journal = "Journal of Mechanics",
issn = "1727-7191",
publisher = "Cambridge University Press",
number = "4",

}

Micro-system displacement and profile measurement by an integrated photon tunneling and confocal microscope. / Chen, Wen-Jong; Huang, Long Sun; Lee, Chih Kung; Chu, Ta Shun; Yeh, Wu Fone; Lu, Shui Shong; Cheng, Ying Chou.

In: Journal of Mechanics, Vol. 18, No. 4, 01.01.2002, p. 173-183.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Micro-system displacement and profile measurement by an integrated photon tunneling and confocal microscope

AU - Chen, Wen-Jong

AU - Huang, Long Sun

AU - Lee, Chih Kung

AU - Chu, Ta Shun

AU - Yeh, Wu Fone

AU - Lu, Shui Shong

AU - Cheng, Ying Chou

PY - 2002/1/1

Y1 - 2002/1/1

N2 - An integrated optical method for measuring deformation of micro-mechanical systems with better than sub-micron resolutions is detailed. Both a confocal laser scanning microscope and a photon tunneling microscope were integrated into a single microscopy system due to their complimentary capabilities for examining sub-micrometer deformations. A halogen lamp and laser were adopted as the two light sources for the measurements. Since topographic information of samples up to a 15μm by 15μm area can be measured, a three-dimensional displacement field of the sample was extracted by comparing topographies of the same specimen area before and after deformation. The bending and twisting deformation of a micro-mirror driven by the electrostatic force was measured to demonstrate the capability of this newly developed instrument. The experimental data obtained agrees reasonably well with the theoretical results calculated by adopting an analytical solution and a finite element method. The small discrepancy in the result can be traced to the surface roughness effect, which is often non-negligible in micro-systems.

AB - An integrated optical method for measuring deformation of micro-mechanical systems with better than sub-micron resolutions is detailed. Both a confocal laser scanning microscope and a photon tunneling microscope were integrated into a single microscopy system due to their complimentary capabilities for examining sub-micrometer deformations. A halogen lamp and laser were adopted as the two light sources for the measurements. Since topographic information of samples up to a 15μm by 15μm area can be measured, a three-dimensional displacement field of the sample was extracted by comparing topographies of the same specimen area before and after deformation. The bending and twisting deformation of a micro-mirror driven by the electrostatic force was measured to demonstrate the capability of this newly developed instrument. The experimental data obtained agrees reasonably well with the theoretical results calculated by adopting an analytical solution and a finite element method. The small discrepancy in the result can be traced to the surface roughness effect, which is often non-negligible in micro-systems.

UR - http://www.scopus.com/inward/record.url?scp=0037523429&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0037523429&partnerID=8YFLogxK

U2 - 10.1017/S1727719100004081

DO - 10.1017/S1727719100004081

M3 - Article

VL - 18

SP - 173

EP - 183

JO - Journal of Mechanics

JF - Journal of Mechanics

SN - 1727-7191

IS - 4

ER -