Method of analyzing the singlet F-theta scan lens for laser drilling system

Ming Fei Chen, Yu Pin Chen, Chun Wei Hu, Chien Chuan Chen

Research output: Contribution to journalArticle

Abstract

The scanning system which uses the non-linear focusing lens is usually accompanied by a major problem that is a non-constant scanning velocity of the spots in the projection plane. Moreover, the energy of the spots and the shape of the drilling holes would be affected. Hence, the focal lens of the scanning system usually uses the f-theta lens to solve this problem. This paper proposes a method utilizing the ZEMAX to analyze the commercial F-theta lens. The results indicate the F-theta lens can increase the quality of the drilling holes and amend the projection plane. In order to verify the analysis results, each diameter of an array holes drilled by the CO2 laser drilling machine would be measured. The experimental results can demonstrate that the percentage of the variation in the diameter of holes is close to the simulation results. Therefore, the method can effectively analyze the F-theta lens of the scanning systems.

Original languageEnglish
Pages (from-to)521-526
Number of pages6
JournalKey Engineering Materials
Volume364-366 I
Publication statusPublished - 2008 Feb 11

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Lenses
Drilling
Lasers
Scanning

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Chen, Ming Fei ; Chen, Yu Pin ; Hu, Chun Wei ; Chen, Chien Chuan. / Method of analyzing the singlet F-theta scan lens for laser drilling system. In: Key Engineering Materials. 2008 ; Vol. 364-366 I. pp. 521-526.
@article{18fd6b09f9bf48288a3a5e981e3346cc,
title = "Method of analyzing the singlet F-theta scan lens for laser drilling system",
abstract = "The scanning system which uses the non-linear focusing lens is usually accompanied by a major problem that is a non-constant scanning velocity of the spots in the projection plane. Moreover, the energy of the spots and the shape of the drilling holes would be affected. Hence, the focal lens of the scanning system usually uses the f-theta lens to solve this problem. This paper proposes a method utilizing the ZEMAX to analyze the commercial F-theta lens. The results indicate the F-theta lens can increase the quality of the drilling holes and amend the projection plane. In order to verify the analysis results, each diameter of an array holes drilled by the CO2 laser drilling machine would be measured. The experimental results can demonstrate that the percentage of the variation in the diameter of holes is close to the simulation results. Therefore, the method can effectively analyze the F-theta lens of the scanning systems.",
author = "Chen, {Ming Fei} and Chen, {Yu Pin} and Hu, {Chun Wei} and Chen, {Chien Chuan}",
year = "2008",
month = "2",
day = "11",
language = "English",
volume = "364-366 I",
pages = "521--526",
journal = "Key Engineering Materials",
issn = "1013-9826",
publisher = "Trans Tech Publications",

}

Method of analyzing the singlet F-theta scan lens for laser drilling system. / Chen, Ming Fei; Chen, Yu Pin; Hu, Chun Wei; Chen, Chien Chuan.

In: Key Engineering Materials, Vol. 364-366 I, 11.02.2008, p. 521-526.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Method of analyzing the singlet F-theta scan lens for laser drilling system

AU - Chen, Ming Fei

AU - Chen, Yu Pin

AU - Hu, Chun Wei

AU - Chen, Chien Chuan

PY - 2008/2/11

Y1 - 2008/2/11

N2 - The scanning system which uses the non-linear focusing lens is usually accompanied by a major problem that is a non-constant scanning velocity of the spots in the projection plane. Moreover, the energy of the spots and the shape of the drilling holes would be affected. Hence, the focal lens of the scanning system usually uses the f-theta lens to solve this problem. This paper proposes a method utilizing the ZEMAX to analyze the commercial F-theta lens. The results indicate the F-theta lens can increase the quality of the drilling holes and amend the projection plane. In order to verify the analysis results, each diameter of an array holes drilled by the CO2 laser drilling machine would be measured. The experimental results can demonstrate that the percentage of the variation in the diameter of holes is close to the simulation results. Therefore, the method can effectively analyze the F-theta lens of the scanning systems.

AB - The scanning system which uses the non-linear focusing lens is usually accompanied by a major problem that is a non-constant scanning velocity of the spots in the projection plane. Moreover, the energy of the spots and the shape of the drilling holes would be affected. Hence, the focal lens of the scanning system usually uses the f-theta lens to solve this problem. This paper proposes a method utilizing the ZEMAX to analyze the commercial F-theta lens. The results indicate the F-theta lens can increase the quality of the drilling holes and amend the projection plane. In order to verify the analysis results, each diameter of an array holes drilled by the CO2 laser drilling machine would be measured. The experimental results can demonstrate that the percentage of the variation in the diameter of holes is close to the simulation results. Therefore, the method can effectively analyze the F-theta lens of the scanning systems.

UR - http://www.scopus.com/inward/record.url?scp=38849138513&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=38849138513&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:38849138513

VL - 364-366 I

SP - 521

EP - 526

JO - Key Engineering Materials

JF - Key Engineering Materials

SN - 1013-9826

ER -