In this paper, we present mechatronic design of RF microelectromechanical system (MEMS) switches. The design is conducted by both the mechanical and electromagnetic schemes on the basis of the finite element method and the full-wave electromagnetic simulation. The relationship among the microelectromechanical characteristics, such as effective stiffness constant, displacement, insertion loss, return loss, and isolation, and switch structures are investigated. The comprehensive mechatronic study of the RF MEMS switches provides a systematic design methodology for RFIC applications.
|Journal||Midwest Symposium on Circuits and Systems|
|Publication status||Published - 2004 Dec 1|
|Event||The 2004 47th Midwest Symposium on Circuits and Systems - Conference Proceedings - Hiroshima, Japan|
Duration: 2004 Jul 25 → 2004 Jul 28
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering