Mechatronic design of RF MEMS switches for communication applications

Yeong-Lin Lai, Yi De Wen

Research output: Contribution to journalConference article

2 Citations (Scopus)

Abstract

In this paper, we present mechatronic design of RF microelectromechanical system (MEMS) switches. The design is conducted by both the mechanical and electromagnetic schemes on the basis of the finite element method and the full-wave electromagnetic simulation. The relationship among the microelectromechanical characteristics, such as effective stiffness constant, displacement, insertion loss, return loss, and isolation, and switch structures are investigated. The comprehensive mechatronic study of the RF MEMS switches provides a systematic design methodology for RFIC applications.

Original languageEnglish
JournalMidwest Symposium on Circuits and Systems
Volume1
Publication statusPublished - 2004 Dec 1
EventThe 2004 47th Midwest Symposium on Circuits and Systems - Conference Proceedings - Hiroshima, Japan
Duration: 2004 Jul 252004 Jul 28

Fingerprint

Mechatronics
MEMS
Switches
Communication
Insertion losses
Electromagnetic waves
Stiffness
Finite element method

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

Cite this

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title = "Mechatronic design of RF MEMS switches for communication applications",
abstract = "In this paper, we present mechatronic design of RF microelectromechanical system (MEMS) switches. The design is conducted by both the mechanical and electromagnetic schemes on the basis of the finite element method and the full-wave electromagnetic simulation. The relationship among the microelectromechanical characteristics, such as effective stiffness constant, displacement, insertion loss, return loss, and isolation, and switch structures are investigated. The comprehensive mechatronic study of the RF MEMS switches provides a systematic design methodology for RFIC applications.",
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Mechatronic design of RF MEMS switches for communication applications. / Lai, Yeong-Lin; Wen, Yi De.

In: Midwest Symposium on Circuits and Systems, Vol. 1, 01.12.2004.

Research output: Contribution to journalConference article

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T1 - Mechatronic design of RF MEMS switches for communication applications

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AU - Wen, Yi De

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N2 - In this paper, we present mechatronic design of RF microelectromechanical system (MEMS) switches. The design is conducted by both the mechanical and electromagnetic schemes on the basis of the finite element method and the full-wave electromagnetic simulation. The relationship among the microelectromechanical characteristics, such as effective stiffness constant, displacement, insertion loss, return loss, and isolation, and switch structures are investigated. The comprehensive mechatronic study of the RF MEMS switches provides a systematic design methodology for RFIC applications.

AB - In this paper, we present mechatronic design of RF microelectromechanical system (MEMS) switches. The design is conducted by both the mechanical and electromagnetic schemes on the basis of the finite element method and the full-wave electromagnetic simulation. The relationship among the microelectromechanical characteristics, such as effective stiffness constant, displacement, insertion loss, return loss, and isolation, and switch structures are investigated. The comprehensive mechatronic study of the RF MEMS switches provides a systematic design methodology for RFIC applications.

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