Mechanical properti es of ZnO: Mo transparent conducting oxide thin film prepared by sputtering

Yi-Cheng or Y. C. Lin, C. C. Chen, W. Y. Lai

Research output: Contribution to journalArticle


In this study, molybdenum doped zinc oxide (ZnO:Mo, MZO) transparent conductive films were prepared by using pulsed DC magnetron sputtering on glass substrates. The mechanical properties of MZO films under various film preparation parameters were investigated. Experimental results show that the amount of Mo doping with 1.81 wt % has the highest elastic modulus and hardness. The hardness of MZO film increased in conjunction with the deposition power, film thickness, and substrate temperature. The elastic modulus of MZO film increased in conjunction only with the deposition power and film thickness. The elastic modulus or hardness of MZO film is a function of the tilt angle of the crystal deposited. The values of the elastic modulus of the MZO films are in the range 110 ~ 130 GPa.

Original languageEnglish
Pages (from-to)619-627
Number of pages9
JournalChinese Journal of Physics
Issue number3
Publication statusPublished - 2013 Oct 14


All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

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