Abstract
In this study, molybdenum doped zinc oxide (ZnO:Mo, MZO) transparent conductive films were prepared by using pulsed DC magnetron sputtering on glass substrates. The mechanical properties of MZO films under various film preparation parameters were investigated. Experimental results show that the amount of Mo doping with 1.81 wt % has the highest elastic modulus and hardness. The hardness of MZO film increased in conjunction with the deposition power, film thickness, and substrate temperature. The elastic modulus of MZO film increased in conjunction only with the deposition power and film thickness. The elastic modulus or hardness of MZO film is a function of the tilt angle of the crystal deposited. The values of the elastic modulus of the MZO films are in the range 110 ~ 130 GPa.
| Original language | English |
|---|---|
| Pages (from-to) | 619-627 |
| Number of pages | 9 |
| Journal | Chinese Journal of Physics |
| Volume | 51 |
| Issue number | 3 |
| DOIs | |
| Publication status | Published - 2013 Oct 14 |
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All Science Journal Classification (ASJC) codes
- Physics and Astronomy(all)
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Mechanical properti es of ZnO : Mo transparent conducting oxide thin film prepared by sputtering. / Lin, Yi-Cheng or Y. C.; Chen, C. C.; Lai, W. Y.
In: Chinese Journal of Physics, Vol. 51, No. 3, 14.10.2013, p. 619-627.Research output: Contribution to journal › Article
TY - JOUR
T1 - Mechanical properti es of ZnO
T2 - Mo transparent conducting oxide thin film prepared by sputtering
AU - Lin, Yi-Cheng or Y. C.
AU - Chen, C. C.
AU - Lai, W. Y.
PY - 2013/10/14
Y1 - 2013/10/14
N2 - In this study, molybdenum doped zinc oxide (ZnO:Mo, MZO) transparent conductive films were prepared by using pulsed DC magnetron sputtering on glass substrates. The mechanical properties of MZO films under various film preparation parameters were investigated. Experimental results show that the amount of Mo doping with 1.81 wt % has the highest elastic modulus and hardness. The hardness of MZO film increased in conjunction with the deposition power, film thickness, and substrate temperature. The elastic modulus of MZO film increased in conjunction only with the deposition power and film thickness. The elastic modulus or hardness of MZO film is a function of the tilt angle of the crystal deposited. The values of the elastic modulus of the MZO films are in the range 110 ~ 130 GPa.
AB - In this study, molybdenum doped zinc oxide (ZnO:Mo, MZO) transparent conductive films were prepared by using pulsed DC magnetron sputtering on glass substrates. The mechanical properties of MZO films under various film preparation parameters were investigated. Experimental results show that the amount of Mo doping with 1.81 wt % has the highest elastic modulus and hardness. The hardness of MZO film increased in conjunction with the deposition power, film thickness, and substrate temperature. The elastic modulus of MZO film increased in conjunction only with the deposition power and film thickness. The elastic modulus or hardness of MZO film is a function of the tilt angle of the crystal deposited. The values of the elastic modulus of the MZO films are in the range 110 ~ 130 GPa.
UR - http://www.scopus.com/inward/record.url?scp=84885143902&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84885143902&partnerID=8YFLogxK
U2 - 10.6122/CJP.51.619
DO - 10.6122/CJP.51.619
M3 - Article
AN - SCOPUS:84885143902
VL - 51
SP - 619
EP - 627
JO - Chinese Journal of Physics
JF - Chinese Journal of Physics
SN - 0577-9073
IS - 3
ER -