Mechanical properti es of ZnO

Mo transparent conducting oxide thin film prepared by sputtering

Yi-Cheng or Y. C. Lin, C. C. Chen, W. Y. Lai

Research output: Contribution to journalArticle

Abstract

In this study, molybdenum doped zinc oxide (ZnO:Mo, MZO) transparent conductive films were prepared by using pulsed DC magnetron sputtering on glass substrates. The mechanical properties of MZO films under various film preparation parameters were investigated. Experimental results show that the amount of Mo doping with 1.81 wt % has the highest elastic modulus and hardness. The hardness of MZO film increased in conjunction with the deposition power, film thickness, and substrate temperature. The elastic modulus of MZO film increased in conjunction only with the deposition power and film thickness. The elastic modulus or hardness of MZO film is a function of the tilt angle of the crystal deposited. The values of the elastic modulus of the MZO films are in the range 110 ~ 130 GPa.

Original languageEnglish
Pages (from-to)619-627
Number of pages9
JournalChinese Journal of Physics
Volume51
Issue number3
DOIs
Publication statusPublished - 2013 Oct 14

Fingerprint

sputtering
conduction
oxides
thin films
modulus of elasticity
hardness
film thickness
conjunction
zinc oxides
molybdenum
magnetron sputtering
direct current
mechanical properties
preparation
glass
crystals
temperature

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

Cite this

@article{f76b751c14f1483e98d34da6b7702453,
title = "Mechanical properti es of ZnO: Mo transparent conducting oxide thin film prepared by sputtering",
abstract = "In this study, molybdenum doped zinc oxide (ZnO:Mo, MZO) transparent conductive films were prepared by using pulsed DC magnetron sputtering on glass substrates. The mechanical properties of MZO films under various film preparation parameters were investigated. Experimental results show that the amount of Mo doping with 1.81 wt {\%} has the highest elastic modulus and hardness. The hardness of MZO film increased in conjunction with the deposition power, film thickness, and substrate temperature. The elastic modulus of MZO film increased in conjunction only with the deposition power and film thickness. The elastic modulus or hardness of MZO film is a function of the tilt angle of the crystal deposited. The values of the elastic modulus of the MZO films are in the range 110 ~ 130 GPa.",
author = "Lin, {Yi-Cheng or Y. C.} and Chen, {C. C.} and Lai, {W. Y.}",
year = "2013",
month = "10",
day = "14",
doi = "10.6122/CJP.51.619",
language = "English",
volume = "51",
pages = "619--627",
journal = "Chinese Journal of Physics",
issn = "0577-9073",
publisher = "Physical Society of the Republic of China",
number = "3",

}

Mechanical properti es of ZnO : Mo transparent conducting oxide thin film prepared by sputtering. / Lin, Yi-Cheng or Y. C.; Chen, C. C.; Lai, W. Y.

In: Chinese Journal of Physics, Vol. 51, No. 3, 14.10.2013, p. 619-627.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Mechanical properti es of ZnO

T2 - Mo transparent conducting oxide thin film prepared by sputtering

AU - Lin, Yi-Cheng or Y. C.

AU - Chen, C. C.

AU - Lai, W. Y.

PY - 2013/10/14

Y1 - 2013/10/14

N2 - In this study, molybdenum doped zinc oxide (ZnO:Mo, MZO) transparent conductive films were prepared by using pulsed DC magnetron sputtering on glass substrates. The mechanical properties of MZO films under various film preparation parameters were investigated. Experimental results show that the amount of Mo doping with 1.81 wt % has the highest elastic modulus and hardness. The hardness of MZO film increased in conjunction with the deposition power, film thickness, and substrate temperature. The elastic modulus of MZO film increased in conjunction only with the deposition power and film thickness. The elastic modulus or hardness of MZO film is a function of the tilt angle of the crystal deposited. The values of the elastic modulus of the MZO films are in the range 110 ~ 130 GPa.

AB - In this study, molybdenum doped zinc oxide (ZnO:Mo, MZO) transparent conductive films were prepared by using pulsed DC magnetron sputtering on glass substrates. The mechanical properties of MZO films under various film preparation parameters were investigated. Experimental results show that the amount of Mo doping with 1.81 wt % has the highest elastic modulus and hardness. The hardness of MZO film increased in conjunction with the deposition power, film thickness, and substrate temperature. The elastic modulus of MZO film increased in conjunction only with the deposition power and film thickness. The elastic modulus or hardness of MZO film is a function of the tilt angle of the crystal deposited. The values of the elastic modulus of the MZO films are in the range 110 ~ 130 GPa.

UR - http://www.scopus.com/inward/record.url?scp=84885143902&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84885143902&partnerID=8YFLogxK

U2 - 10.6122/CJP.51.619

DO - 10.6122/CJP.51.619

M3 - Article

VL - 51

SP - 619

EP - 627

JO - Chinese Journal of Physics

JF - Chinese Journal of Physics

SN - 0577-9073

IS - 3

ER -