Measurement of small displacement based on surface plasmon resonance heterodyne interferometry

Jiun-You Lin, Kun Huang Chen, Jing Heng Chen

Research output: Contribution to journalArticle

20 Citations (Scopus)

Abstract

This paper proposes an optical method for measuring small displacements using the surface plasmon resonance (SPR) heterodyne interferometry. A heterodyne light beam reflected by a mirror passes through a hemisphere glass and then enters into a surface plasmon resonance apparatus at the resonant angle. A small displacement of the mirror will introduce a phase-difference variation between p- and s-polarizations of the light emerging from the SPR apparatus. The phase-difference variation can be precisely measured with the heterodyne interferometric technique, and the associated displacement can be estimated. The feasibility of this method was verified by experiment, and the displacement measurement resolution of about 1.4 nm over a traveling range of 6 μm was achieved. Our method of measurement has the merits of both common-path interferometry and heterodyne interferometry.

Original languageEnglish
Pages (from-to)811-815
Number of pages5
JournalOptics and Lasers in Engineering
Volume49
Issue number7
DOIs
Publication statusPublished - 2011 Jul 1

Fingerprint

Surface plasmon resonance
surface plasmon resonance
Interferometry
interferometry
Mirrors
mirrors
Displacement measurement
displacement measurement
hemispheres
light beams
emerging
optics
Polarization
Glass
glass
polarization
Experiments

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

@article{e9172cd97474474daf1b7ba27a9b67ac,
title = "Measurement of small displacement based on surface plasmon resonance heterodyne interferometry",
abstract = "This paper proposes an optical method for measuring small displacements using the surface plasmon resonance (SPR) heterodyne interferometry. A heterodyne light beam reflected by a mirror passes through a hemisphere glass and then enters into a surface plasmon resonance apparatus at the resonant angle. A small displacement of the mirror will introduce a phase-difference variation between p- and s-polarizations of the light emerging from the SPR apparatus. The phase-difference variation can be precisely measured with the heterodyne interferometric technique, and the associated displacement can be estimated. The feasibility of this method was verified by experiment, and the displacement measurement resolution of about 1.4 nm over a traveling range of 6 μm was achieved. Our method of measurement has the merits of both common-path interferometry and heterodyne interferometry.",
author = "Jiun-You Lin and Chen, {Kun Huang} and Chen, {Jing Heng}",
year = "2011",
month = "7",
day = "1",
doi = "10.1016/j.optlaseng.2011.03.005",
language = "English",
volume = "49",
pages = "811--815",
journal = "Optics and Lasers in Engineering",
issn = "0143-8166",
publisher = "Elsevier Limited",
number = "7",

}

Measurement of small displacement based on surface plasmon resonance heterodyne interferometry. / Lin, Jiun-You; Chen, Kun Huang; Chen, Jing Heng.

In: Optics and Lasers in Engineering, Vol. 49, No. 7, 01.07.2011, p. 811-815.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Measurement of small displacement based on surface plasmon resonance heterodyne interferometry

AU - Lin, Jiun-You

AU - Chen, Kun Huang

AU - Chen, Jing Heng

PY - 2011/7/1

Y1 - 2011/7/1

N2 - This paper proposes an optical method for measuring small displacements using the surface plasmon resonance (SPR) heterodyne interferometry. A heterodyne light beam reflected by a mirror passes through a hemisphere glass and then enters into a surface plasmon resonance apparatus at the resonant angle. A small displacement of the mirror will introduce a phase-difference variation between p- and s-polarizations of the light emerging from the SPR apparatus. The phase-difference variation can be precisely measured with the heterodyne interferometric technique, and the associated displacement can be estimated. The feasibility of this method was verified by experiment, and the displacement measurement resolution of about 1.4 nm over a traveling range of 6 μm was achieved. Our method of measurement has the merits of both common-path interferometry and heterodyne interferometry.

AB - This paper proposes an optical method for measuring small displacements using the surface plasmon resonance (SPR) heterodyne interferometry. A heterodyne light beam reflected by a mirror passes through a hemisphere glass and then enters into a surface plasmon resonance apparatus at the resonant angle. A small displacement of the mirror will introduce a phase-difference variation between p- and s-polarizations of the light emerging from the SPR apparatus. The phase-difference variation can be precisely measured with the heterodyne interferometric technique, and the associated displacement can be estimated. The feasibility of this method was verified by experiment, and the displacement measurement resolution of about 1.4 nm over a traveling range of 6 μm was achieved. Our method of measurement has the merits of both common-path interferometry and heterodyne interferometry.

UR - http://www.scopus.com/inward/record.url?scp=79957734294&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=79957734294&partnerID=8YFLogxK

U2 - 10.1016/j.optlaseng.2011.03.005

DO - 10.1016/j.optlaseng.2011.03.005

M3 - Article

VL - 49

SP - 811

EP - 815

JO - Optics and Lasers in Engineering

JF - Optics and Lasers in Engineering

SN - 0143-8166

IS - 7

ER -