Measure the mechanical behavior of thin films using four step phase-shifting methods on the novel paddle cantilever beam

Ming Tzer Lin, Chi Jia Tong, Ya Chi Cheng, Kuan Jung Chung, Jiong Shiun Hsu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

A technique developed for studying the mechanical behavior of nano-scale thin metal films on substrate is presented. The test structure was designed on a novel "paddle" cantilever beam specimens with dimensions as few hundred nanometers to less than 10 nanometers. This beam is in triangle shape in order to provide uniform plane strain distribution. Standard clean room processing was used to prepare the paddle sample. The experiment can be operated by using the electrostatic deflection on the "paddle" uniform distributed stress cantilever beam and then measure the deposited thin metal film materials on top of it. The measured strain was converted through the four step phase-shifting method measurement for the deflection of the cantilever. System performance on the residual stress measurement of thin films were studied with the deflections of silver, gold, and copper films and calculated.

Original languageEnglish
Title of host publicationSociety for Experimental Mechanics - SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2009
Pages2387-2393
Number of pages7
Publication statusPublished - 2009 Dec 1
EventSEM Annual Conference and Exposition on Experimental and Applied Mechanics 2009 - Albuquerque, NM, United States
Duration: 2009 Jun 12009 Jun 4

Publication series

NameSociety for Experimental Mechanics - SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2009
Volume4

Other

OtherSEM Annual Conference and Exposition on Experimental and Applied Mechanics 2009
CountryUnited States
CityAlbuquerque, NM
Period09-06-0109-06-04

Fingerprint

Cantilever beams
Thin films
Deflection (structures)
Clean rooms
Stress measurement
Metals
Electrostatics
Residual stresses
Silver
Gold
Copper
Substrates
Processing
Experiments

All Science Journal Classification (ASJC) codes

  • Computational Mechanics

Cite this

Lin, M. T., Tong, C. J., Cheng, Y. C., Chung, K. J., & Hsu, J. S. (2009). Measure the mechanical behavior of thin films using four step phase-shifting methods on the novel paddle cantilever beam. In Society for Experimental Mechanics - SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2009 (pp. 2387-2393). (Society for Experimental Mechanics - SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2009; Vol. 4).
Lin, Ming Tzer ; Tong, Chi Jia ; Cheng, Ya Chi ; Chung, Kuan Jung ; Hsu, Jiong Shiun. / Measure the mechanical behavior of thin films using four step phase-shifting methods on the novel paddle cantilever beam. Society for Experimental Mechanics - SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2009. 2009. pp. 2387-2393 (Society for Experimental Mechanics - SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2009).
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abstract = "A technique developed for studying the mechanical behavior of nano-scale thin metal films on substrate is presented. The test structure was designed on a novel {"}paddle{"} cantilever beam specimens with dimensions as few hundred nanometers to less than 10 nanometers. This beam is in triangle shape in order to provide uniform plane strain distribution. Standard clean room processing was used to prepare the paddle sample. The experiment can be operated by using the electrostatic deflection on the {"}paddle{"} uniform distributed stress cantilever beam and then measure the deposited thin metal film materials on top of it. The measured strain was converted through the four step phase-shifting method measurement for the deflection of the cantilever. System performance on the residual stress measurement of thin films were studied with the deflections of silver, gold, and copper films and calculated.",
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Lin, MT, Tong, CJ, Cheng, YC, Chung, KJ & Hsu, JS 2009, Measure the mechanical behavior of thin films using four step phase-shifting methods on the novel paddle cantilever beam. in Society for Experimental Mechanics - SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2009. Society for Experimental Mechanics - SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2009, vol. 4, pp. 2387-2393, SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2009, Albuquerque, NM, United States, 09-06-01.

Measure the mechanical behavior of thin films using four step phase-shifting methods on the novel paddle cantilever beam. / Lin, Ming Tzer; Tong, Chi Jia; Cheng, Ya Chi; Chung, Kuan Jung; Hsu, Jiong Shiun.

Society for Experimental Mechanics - SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2009. 2009. p. 2387-2393 (Society for Experimental Mechanics - SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2009; Vol. 4).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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AB - A technique developed for studying the mechanical behavior of nano-scale thin metal films on substrate is presented. The test structure was designed on a novel "paddle" cantilever beam specimens with dimensions as few hundred nanometers to less than 10 nanometers. This beam is in triangle shape in order to provide uniform plane strain distribution. Standard clean room processing was used to prepare the paddle sample. The experiment can be operated by using the electrostatic deflection on the "paddle" uniform distributed stress cantilever beam and then measure the deposited thin metal film materials on top of it. The measured strain was converted through the four step phase-shifting method measurement for the deflection of the cantilever. System performance on the residual stress measurement of thin films were studied with the deflections of silver, gold, and copper films and calculated.

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Lin MT, Tong CJ, Cheng YC, Chung KJ, Hsu JS. Measure the mechanical behavior of thin films using four step phase-shifting methods on the novel paddle cantilever beam. In Society for Experimental Mechanics - SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2009. 2009. p. 2387-2393. (Society for Experimental Mechanics - SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2009).