TY - GEN
T1 - Low -voltage large angular displacement electrostatic scanning micromirror using floating slider mechanism
AU - Wang, Kerwin
AU - Sinclair, Michael J.
AU - Böhringer, Karl F.
PY - 2004/7/19
Y1 - 2004/7/19
N2 - This paper presents a floating slider mechanism to achieve large scanning angular displacements with low voltage electrostatic mirrors. It can amplify the mirror angular displacement from the movement of bimorph electrostatic actuators. Depending on the actuator designs, the initial tilting angles of the mirrors range between 6.5°-13.5°. The slider mechanism has reliable performance after 6.9 billion cycles under continuous operation in vacuum (4mtorr).
AB - This paper presents a floating slider mechanism to achieve large scanning angular displacements with low voltage electrostatic mirrors. It can amplify the mirror angular displacement from the movement of bimorph electrostatic actuators. Depending on the actuator designs, the initial tilting angles of the mirrors range between 6.5°-13.5°. The slider mechanism has reliable performance after 6.9 billion cycles under continuous operation in vacuum (4mtorr).
UR - http://www.scopus.com/inward/record.url?scp=3042822227&partnerID=8YFLogxK
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U2 - 10.1109/MEMSYS.2003.1189797
DO - 10.1109/MEMSYS.2003.1189797
M3 - Conference contribution
AN - SCOPUS:3042822227
SN - 0780377443
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 506
EP - 509
BT - 17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
T2 - 17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS): Maastricht MEMS 2004 Technical Digest
Y2 - 25 January 2004 through 29 January 2004
ER -