Abstract
This paper presents a floating slider mechanism to achieve large scanning angular displacements with low voltage electrostatic mirrors. It can amplify the mirror angular displacement from the movement of bimorph electrostatic actuators. Depending on the actuator designs, the initial tilting angles of the mirrors range between 6.5°-13.5°. The slider mechanism has reliable performance after 6.9 billion cycles under continuous operation in vacuum (4mtorr).
| Original language | English |
|---|---|
| Title of host publication | 17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) |
| Subtitle of host publication | Maastricht MEMS 2004 Technical Digest |
| Pages | 506-509 |
| Number of pages | 4 |
| DOIs | |
| Publication status | Published - 2004 Jul 19 |
| Event | 17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS): Maastricht MEMS 2004 Technical Digest - Maastricht, Netherlands Duration: 2004 Jan 25 → 2004 Jan 29 |
Publication series
| Name | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) |
|---|---|
| ISSN (Print) | 1084-6999 |
Other
| Other | 17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS): Maastricht MEMS 2004 Technical Digest |
|---|---|
| Country | Netherlands |
| City | Maastricht |
| Period | 04-01-25 → 04-01-29 |
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All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Mechanical Engineering
- Electrical and Electronic Engineering
Cite this
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Low -voltage large angular displacement electrostatic scanning micromirror using floating slider mechanism. / Wang, Kerwin; Sinclair, Michael J.; Böhringer, Karl F.
17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS): Maastricht MEMS 2004 Technical Digest. 2004. p. 506-509 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
TY - GEN
T1 - Low -voltage large angular displacement electrostatic scanning micromirror using floating slider mechanism
AU - Wang, Kerwin
AU - Sinclair, Michael J.
AU - Böhringer, Karl F.
PY - 2004/7/19
Y1 - 2004/7/19
N2 - This paper presents a floating slider mechanism to achieve large scanning angular displacements with low voltage electrostatic mirrors. It can amplify the mirror angular displacement from the movement of bimorph electrostatic actuators. Depending on the actuator designs, the initial tilting angles of the mirrors range between 6.5°-13.5°. The slider mechanism has reliable performance after 6.9 billion cycles under continuous operation in vacuum (4mtorr).
AB - This paper presents a floating slider mechanism to achieve large scanning angular displacements with low voltage electrostatic mirrors. It can amplify the mirror angular displacement from the movement of bimorph electrostatic actuators. Depending on the actuator designs, the initial tilting angles of the mirrors range between 6.5°-13.5°. The slider mechanism has reliable performance after 6.9 billion cycles under continuous operation in vacuum (4mtorr).
UR - http://www.scopus.com/inward/record.url?scp=3042822227&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=3042822227&partnerID=8YFLogxK
U2 - 10.1109/MEMSYS.2003.1189797
DO - 10.1109/MEMSYS.2003.1189797
M3 - Conference contribution
AN - SCOPUS:3042822227
SN - 0780377443
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 506
EP - 509
BT - 17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ER -