Low -voltage large angular displacement electrostatic scanning micromirror using floating slider mechanism

Kerwin Wang; Michael J. Sinclair; Karl F. Böhringer

doi:10.1109/MEMSYS.2003.1189797

Low -voltage large angular displacement electrostatic scanning micromirror using floating slider mechanism

Kerwin Wang, Michael J. Sinclair, Karl F. Böhringer

Department of Mechatronic Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

3 Citations (Scopus)

Abstract

This paper presents a floating slider mechanism to achieve large scanning angular displacements with low voltage electrostatic mirrors. It can amplify the mirror angular displacement from the movement of bimorph electrostatic actuators. Depending on the actuator designs, the initial tilting angles of the mirrors range between 6.5°-13.5°. The slider mechanism has reliable performance after 6.9 billion cycles under continuous operation in vacuum (4mtorr).

Original language	English
Title of host publication	17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Subtitle of host publication	Maastricht MEMS 2004 Technical Digest
Pages	506-509
Number of pages	4
DOIs	https://doi.org/10.1109/MEMSYS.2003.1189797
Publication status	Published - 2004 Jul 19
Event	17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS): Maastricht MEMS 2004 Technical Digest - Maastricht, Netherlands Duration: 2004 Jan 25 → 2004 Jan 29

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Other

Other	17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS): Maastricht MEMS 2004 Technical Digest
Country	Netherlands
City	Maastricht
Period	04-01-25 → 04-01-29

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All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Cite this

Wang, K., Sinclair, M. J., & Böhringer, K. F. (2004). Low -voltage large angular displacement electrostatic scanning micromirror using floating slider mechanism. In 17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS): Maastricht MEMS 2004 Technical Digest (pp. 506-509). (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2003.1189797

Wang, Kerwin ; Sinclair, Michael J. ; Böhringer, Karl F. / Low -voltage large angular displacement electrostatic scanning micromirror using floating slider mechanism. 17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS): Maastricht MEMS 2004 Technical Digest. 2004. pp. 506-509 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

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abstract = "This paper presents a floating slider mechanism to achieve large scanning angular displacements with low voltage electrostatic mirrors. It can amplify the mirror angular displacement from the movement of bimorph electrostatic actuators. Depending on the actuator designs, the initial tilting angles of the mirrors range between 6.5°-13.5°. The slider mechanism has reliable performance after 6.9 billion cycles under continuous operation in vacuum (4mtorr).",

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Wang, K, Sinclair, MJ & Böhringer, KF 2004, Low -voltage large angular displacement electrostatic scanning micromirror using floating slider mechanism. in 17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS): Maastricht MEMS 2004 Technical Digest. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 506-509, 17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS): Maastricht MEMS 2004 Technical Digest, Maastricht, Netherlands, 04-01-25. https://doi.org/10.1109/MEMSYS.2003.1189797

Low -voltage large angular displacement electrostatic scanning micromirror using floating slider mechanism. / Wang, Kerwin; Sinclair, Michael J.; Böhringer, Karl F.

17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS): Maastricht MEMS 2004 Technical Digest. 2004. p. 506-509 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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AU - Böhringer, Karl F.

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N2 - This paper presents a floating slider mechanism to achieve large scanning angular displacements with low voltage electrostatic mirrors. It can amplify the mirror angular displacement from the movement of bimorph electrostatic actuators. Depending on the actuator designs, the initial tilting angles of the mirrors range between 6.5°-13.5°. The slider mechanism has reliable performance after 6.9 billion cycles under continuous operation in vacuum (4mtorr).

AB - This paper presents a floating slider mechanism to achieve large scanning angular displacements with low voltage electrostatic mirrors. It can amplify the mirror angular displacement from the movement of bimorph electrostatic actuators. Depending on the actuator designs, the initial tilting angles of the mirrors range between 6.5°-13.5°. The slider mechanism has reliable performance after 6.9 billion cycles under continuous operation in vacuum (4mtorr).

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Wang K, Sinclair MJ, Böhringer KF. Low -voltage large angular displacement electrostatic scanning micromirror using floating slider mechanism. In 17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS): Maastricht MEMS 2004 Technical Digest. 2004. p. 506-509. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2003.1189797

Access to Document

10.1109/MEMSYS.2003.1189797