Low -voltage large angular displacement electrostatic scanning micromirror using floating slider mechanism

Kerwin Wang, Michael J. Sinclair, Karl F. Böhringer

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

This paper presents a floating slider mechanism to achieve large scanning angular displacements with low voltage electrostatic mirrors. It can amplify the mirror angular displacement from the movement of bimorph electrostatic actuators. Depending on the actuator designs, the initial tilting angles of the mirrors range between 6.5°-13.5°. The slider mechanism has reliable performance after 6.9 billion cycles under continuous operation in vacuum (4mtorr).

Original languageEnglish
Title of host publication17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Subtitle of host publicationMaastricht MEMS 2004 Technical Digest
Pages506-509
Number of pages4
DOIs
Publication statusPublished - 2004 Jul 19
Event17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS): Maastricht MEMS 2004 Technical Digest - Maastricht, Netherlands
Duration: 2004 Jan 252004 Jan 29

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Other

Other17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS): Maastricht MEMS 2004 Technical Digest
CountryNetherlands
CityMaastricht
Period04-01-2504-01-29

Fingerprint

Electrostatic actuators
chutes
low voltage
floating
Electrostatics
Mirrors
Actuators
Vacuum
electrostatics
mirrors
Scanning
scanning
Electric potential
actuators
vacuum
cycles

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Wang, K., Sinclair, M. J., & Böhringer, K. F. (2004). Low -voltage large angular displacement electrostatic scanning micromirror using floating slider mechanism. In 17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS): Maastricht MEMS 2004 Technical Digest (pp. 506-509). (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2003.1189797
Wang, Kerwin ; Sinclair, Michael J. ; Böhringer, Karl F. / Low -voltage large angular displacement electrostatic scanning micromirror using floating slider mechanism. 17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS): Maastricht MEMS 2004 Technical Digest. 2004. pp. 506-509 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).
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abstract = "This paper presents a floating slider mechanism to achieve large scanning angular displacements with low voltage electrostatic mirrors. It can amplify the mirror angular displacement from the movement of bimorph electrostatic actuators. Depending on the actuator designs, the initial tilting angles of the mirrors range between 6.5°-13.5°. The slider mechanism has reliable performance after 6.9 billion cycles under continuous operation in vacuum (4mtorr).",
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Wang, K, Sinclair, MJ & Böhringer, KF 2004, Low -voltage large angular displacement electrostatic scanning micromirror using floating slider mechanism. in 17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS): Maastricht MEMS 2004 Technical Digest. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 506-509, 17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS): Maastricht MEMS 2004 Technical Digest, Maastricht, Netherlands, 04-01-25. https://doi.org/10.1109/MEMSYS.2003.1189797

Low -voltage large angular displacement electrostatic scanning micromirror using floating slider mechanism. / Wang, Kerwin; Sinclair, Michael J.; Böhringer, Karl F.

17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS): Maastricht MEMS 2004 Technical Digest. 2004. p. 506-509 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Wang K, Sinclair MJ, Böhringer KF. Low -voltage large angular displacement electrostatic scanning micromirror using floating slider mechanism. In 17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS): Maastricht MEMS 2004 Technical Digest. 2004. p. 506-509. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2003.1189797