@inproceedings{fa6f75c19ce7443aa755be3fbb5213e3,
title = "Low voltage and pull-in state adjustable dual-servo-scanning-mirror",
abstract = "This paper reports a new dual-servo-scanning mirror, which makes use of thermal and electrostatic driving principles. By tuning loading of the thermal and electrostatic actuator individually, one can increase the tilting-angle of the mirror.",
author = "Kerwin Wang and Mike Sinclair and B{\"o}hringer, {Karl F.}",
year = "2003",
month = jan,
day = "1",
doi = "10.1109/CLEOPR.2003.1274606",
language = "English",
series = "Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics",
address = "United States",
note = "5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003 ; Conference date: 15-12-2003 Through 19-12-2003",
}