Low voltage and pull-in state adjustable dual-servo-scanning-mirror

Kerwin Wang; Mike Sinclair; Karl F. Böhringer

doi:10.1109/CLEOPR.2003.1274606

Low voltage and pull-in state adjustable dual-servo-scanning-mirror

Kerwin Wang, Mike Sinclair, Karl F. Böhringer

Department of Mechatronic Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2 Citations (Scopus)

Abstract

This paper reports a new dual-servo-scanning mirror, which makes use of thermal and electrostatic driving principles. By tuning loading of the thermal and electrostatic actuator individually, one can increase the tilting-angle of the mirror.

Original language	English
Title of host publication	CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics
Subtitle of host publication	Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings
Publisher	Institute of Electrical and Electronics Engineers Inc.
Number of pages	1
ISBN (Electronic)	0780377664
DOIs	https://doi.org/10.1109/CLEOPR.2003.1274606
Publication status	Published - 2003 Jan 1
Event	5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003 - Taipei, Taiwan Duration: 2003 Dec 15 → 2003 Dec 19

Publication series

Name	Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest
Volume	1

Other

Other	5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003
Country	Taiwan
City	Taipei
Period	03-12-15 → 03-12-19

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All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Electrical and Electronic Engineering

Cite this

Wang, K., Sinclair, M., & Böhringer, K. F. (2003). Low voltage and pull-in state adjustable dual-servo-scanning-mirror. In CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings [1274606] (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest; Vol. 1). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/CLEOPR.2003.1274606

Wang, Kerwin ; Sinclair, Mike ; Böhringer, Karl F. / Low voltage and pull-in state adjustable dual-servo-scanning-mirror. CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings. Institute of Electrical and Electronics Engineers Inc., 2003. (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest).

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Wang, K, Sinclair, M & Böhringer, KF 2003, Low voltage and pull-in state adjustable dual-servo-scanning-mirror. in CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings., 1274606, Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest, vol. 1, Institute of Electrical and Electronics Engineers Inc., 5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003, Taipei, Taiwan, 03-12-15. https://doi.org/10.1109/CLEOPR.2003.1274606

Low voltage and pull-in state adjustable dual-servo-scanning-mirror. / Wang, Kerwin; Sinclair, Mike; Böhringer, Karl F.

CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings. Institute of Electrical and Electronics Engineers Inc., 2003. 1274606 (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest; Vol. 1).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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AU - Sinclair, Mike

AU - Böhringer, Karl F.

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N2 - This paper reports a new dual-servo-scanning mirror, which makes use of thermal and electrostatic driving principles. By tuning loading of the thermal and electrostatic actuator individually, one can increase the tilting-angle of the mirror.

AB - This paper reports a new dual-servo-scanning mirror, which makes use of thermal and electrostatic driving principles. By tuning loading of the thermal and electrostatic actuator individually, one can increase the tilting-angle of the mirror.

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Wang K, Sinclair M, Böhringer KF. Low voltage and pull-in state adjustable dual-servo-scanning-mirror. In CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings. Institute of Electrical and Electronics Engineers Inc. 2003. 1274606. (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest). https://doi.org/10.1109/CLEOPR.2003.1274606

Access to Document

10.1109/CLEOPR.2003.1274606