Low voltage and pull-in state adjustable dual-servo-scanning-mirror

Kerwin Wang, Mike Sinclair, Karl F. Böhringer

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

This paper reports a new dual-servo-scanning mirror, which makes use of thermal and electrostatic driving principles. By tuning loading of the thermal and electrostatic actuator individually, one can increase the tilting-angle of the mirror.

Original languageEnglish
Title of host publicationCLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics
Subtitle of host publicationPhotonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
Number of pages1
ISBN (Electronic)0780377664
DOIs
Publication statusPublished - 2003 Jan 1
Event5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003 - Taipei, Taiwan
Duration: 2003 Dec 152003 Dec 19

Publication series

NamePacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest
Volume1

Other

Other5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003
CountryTaiwan
CityTaipei
Period03-12-1503-12-19

Fingerprint

low voltage
Mirrors
Electrostatic actuators
electrostatics
mirrors
Scanning
scanning
Electric potential
Electrostatics
Tuning
actuators
tuning
Hot Temperature

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Cite this

Wang, K., Sinclair, M., & Böhringer, K. F. (2003). Low voltage and pull-in state adjustable dual-servo-scanning-mirror. In CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings [1274606] (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest; Vol. 1). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/CLEOPR.2003.1274606
Wang, Kerwin ; Sinclair, Mike ; Böhringer, Karl F. / Low voltage and pull-in state adjustable dual-servo-scanning-mirror. CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings. Institute of Electrical and Electronics Engineers Inc., 2003. (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest).
@inproceedings{fa6f75c19ce7443aa755be3fbb5213e3,
title = "Low voltage and pull-in state adjustable dual-servo-scanning-mirror",
abstract = "This paper reports a new dual-servo-scanning mirror, which makes use of thermal and electrostatic driving principles. By tuning loading of the thermal and electrostatic actuator individually, one can increase the tilting-angle of the mirror.",
author = "Kerwin Wang and Mike Sinclair and B{\"o}hringer, {Karl F.}",
year = "2003",
month = "1",
day = "1",
doi = "10.1109/CLEOPR.2003.1274606",
language = "English",
series = "Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics",
address = "United States",

}

Wang, K, Sinclair, M & Böhringer, KF 2003, Low voltage and pull-in state adjustable dual-servo-scanning-mirror. in CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings., 1274606, Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest, vol. 1, Institute of Electrical and Electronics Engineers Inc., 5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003, Taipei, Taiwan, 03-12-15. https://doi.org/10.1109/CLEOPR.2003.1274606

Low voltage and pull-in state adjustable dual-servo-scanning-mirror. / Wang, Kerwin; Sinclair, Mike; Böhringer, Karl F.

CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings. Institute of Electrical and Electronics Engineers Inc., 2003. 1274606 (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest; Vol. 1).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

TY - GEN

T1 - Low voltage and pull-in state adjustable dual-servo-scanning-mirror

AU - Wang, Kerwin

AU - Sinclair, Mike

AU - Böhringer, Karl F.

PY - 2003/1/1

Y1 - 2003/1/1

N2 - This paper reports a new dual-servo-scanning mirror, which makes use of thermal and electrostatic driving principles. By tuning loading of the thermal and electrostatic actuator individually, one can increase the tilting-angle of the mirror.

AB - This paper reports a new dual-servo-scanning mirror, which makes use of thermal and electrostatic driving principles. By tuning loading of the thermal and electrostatic actuator individually, one can increase the tilting-angle of the mirror.

UR - http://www.scopus.com/inward/record.url?scp=84955107798&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84955107798&partnerID=8YFLogxK

U2 - 10.1109/CLEOPR.2003.1274606

DO - 10.1109/CLEOPR.2003.1274606

M3 - Conference contribution

AN - SCOPUS:84955107798

T3 - Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest

BT - CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics

PB - Institute of Electrical and Electronics Engineers Inc.

ER -

Wang K, Sinclair M, Böhringer KF. Low voltage and pull-in state adjustable dual-servo-scanning-mirror. In CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings. Institute of Electrical and Electronics Engineers Inc. 2003. 1274606. (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest). https://doi.org/10.1109/CLEOPR.2003.1274606