Abstract
This paper reports a new dual-servo-scanning mirror, which makes use of thermal and electrostatic driving principles. By tuning loading of the thermal and electrostatic actuator individually, one can increase the tilting-angle of the mirror.
| Original language | English |
|---|---|
| Title of host publication | CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics |
| Subtitle of host publication | Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings |
| Publisher | Institute of Electrical and Electronics Engineers Inc. |
| Number of pages | 1 |
| ISBN (Electronic) | 0780377664 |
| DOIs | |
| Publication status | Published - 2003 Jan 1 |
| Event | 5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003 - Taipei, Taiwan Duration: 2003 Dec 15 → 2003 Dec 19 |
Publication series
| Name | Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest |
|---|---|
| Volume | 1 |
Other
| Other | 5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003 |
|---|---|
| Country | Taiwan |
| City | Taipei |
| Period | 03-12-15 → 03-12-19 |
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All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Condensed Matter Physics
- Electrical and Electronic Engineering
Cite this
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Low voltage and pull-in state adjustable dual-servo-scanning-mirror. / Wang, Kerwin; Sinclair, Mike; Böhringer, Karl F.
CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings. Institute of Electrical and Electronics Engineers Inc., 2003. 1274606 (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest; Vol. 1).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
TY - GEN
T1 - Low voltage and pull-in state adjustable dual-servo-scanning-mirror
AU - Wang, Kerwin
AU - Sinclair, Mike
AU - Böhringer, Karl F.
PY - 2003/1/1
Y1 - 2003/1/1
N2 - This paper reports a new dual-servo-scanning mirror, which makes use of thermal and electrostatic driving principles. By tuning loading of the thermal and electrostatic actuator individually, one can increase the tilting-angle of the mirror.
AB - This paper reports a new dual-servo-scanning mirror, which makes use of thermal and electrostatic driving principles. By tuning loading of the thermal and electrostatic actuator individually, one can increase the tilting-angle of the mirror.
UR - http://www.scopus.com/inward/record.url?scp=84955107798&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84955107798&partnerID=8YFLogxK
U2 - 10.1109/CLEOPR.2003.1274606
DO - 10.1109/CLEOPR.2003.1274606
M3 - Conference contribution
AN - SCOPUS:84955107798
T3 - Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest
BT - CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics
PB - Institute of Electrical and Electronics Engineers Inc.
ER -